Optical properties of Al‐doped ZnO thin films deposited by two different sputtering methods

Aluminum‐doped zinc oxide (AZO) thin films were deposited on sapphire (002) and glass substrates by two different sputtering techniques radio frequency magnetron cosputtering of AZO and ZnO targets and sputtering of an AZO target. The dependence of the photoluminescence (PL) and transmittance properties of the AZO films deposited by cosputtering and sputtering on the AZO/ZnO target power ratio, R and the O₂/Ar flow ratio, r were investigated, respectively. Only a deep level emission peak appears in the PL spectra of cosputtered AZO films whereas both UV emission and deep level emission peaks are observed in the PL spectra of sputtered AZO films. The absorption edges in the transmittance spectra of the AZO films shift to the lower wavelength region as R and r increase. Also effects of crystallinity, surface roughness, PL on the transmittance of the AZO films were explained using the X‐ray diffraction (XRD), atomic force microscopy (AFM), and PL analysis results. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Crystallographic,optical and magnetic properties of Co‐doped ZnO thin films synthesized by sol gel route

ZnO thin films with various Co doping levels (0%, 1%, 3%, 5%, 8%, respectively) have been synthesized by sol gel spin coating method on glass substrates. XRD and XPS studies of the films reveal that cobalt ions are successfully doped into ZnO crystal lattice without changing the hexagonal wurtzite structure. The morphologies are studied by SEM and AFM and show wrinkle network structures with uniform size distribution. With Co doping concentration increasing, the wrinkle network width decreases gradually. The transmittance spectra indicate that Co doping can effectively reduce the optical bandgap of ZnO thin films. Photoluminescence show that all samples have ultraviolet, violet and green emission. When Co doping concentration increases up to 5%, the intensity of violet emission is greatly increased and a strong deep blue emission centered at 439 nm appears. The ferromagnetism of all samples was observed at room temperature. The emission mechanisms and ferromagnetism origination are discussed in detail. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Properties of Sm‐doped CaNb2O6 thin films deposited by radio‐frequency magnetron sputtering

Sm‐doped CaNb₂O₆ (CaNb₂O₆:Sm) phosphor thin films were prepared by radio‐frequency magnetron sputtering on sapphire substrates. The thin films were grown at several growth temperatures and subsequently annealed at 800 °C in air. The crystallinity, surface morphology, optical transmittance, and photoluminescence of the thin films were investigated by X‐ray diffraction, scanning electron microscopy, ultraviolet‐visible spectrophotometry, and fluorescence spectrophotometry, respectively. All of the thin films showed a main red emission radiated by the transition from the ⁴G_5/2 excited state to the ⁶H_9/2 ground state of the Sm³⁺ ions and several weak bands under ultraviolet excitation with a 279 nm wavelength. The optimum growth temperature for depositing the high‐quality CaNb₂O₆:Sm thin films, which was determined from the luminescence intensity, was found to be 400 °C, where the thin film exhibited an orthorhombic structure with a thickness of 370 nm, an average grain size of 220 nm, a band gap energy of 3.99 eV, and an average optical transmittance of 85.9%. These results indicate that the growth temperature plays an important role in controlling the emission intensity and optical band gap energy of CaNb₂O₆:Sm thin films.     

Substrate effect on microstructure and optical performance of sputter‐deposited TiO2 thin films

This study deals with the role of the different substrates on the microstructural, optical and electronical properties of TiO₂ thin films produced by conventional direct current (DC) magnetron sputtering in a mixture of pure argon and oxygen using a Ti metal target with the aid of X–ray diffractometer (XRD), ultra violet spectrometer (UV–vis) and atomic force microscopy (AFM) measurements. Transparent TiO₂ thin films are deposited on Soda lime glass, MgO(100), quartz and sitall substrates. Phase purity, surface morphology, optical and photocatalytic properties of the films are compared with each other. It is found that the amplitude of interference oscillation of the films is in a range of 77‐89%. The transmittance of the film deposited on Soda lime glass is the smallest while the film produced on MgO(100) substrate obtains the maximum transmittance value. The refractive index and optical band gap of the TiO₂ thin films are also inferred from the transmittance spectra. The results show that the film deposited on Soda lime glass has the better optical property while the film produced on MgO(100) substrate exhibits much better photoactivity than the other films because of the large optical energy band gap. As for the XRD results, the film prepared on MgO(100) substrate contains the anatase phase only; on the other hand, the other films contain both anatase and rutile phases. Furthermore, AFM images show that the regular structures are observed on the surface of all the films studied. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Luminescence of crystals of divalent tungstates

Crystals of divalent tungstates are characterized by two main luminescence spectral ranges: a short-wavelength (blue) luminescence band in the range 390–420 nm and a group (often two groups) of longer wavelength (green) bands in the range 480–520 nm. For crystals of calcium, strontium, barium, cadmium, magnesium, zinc, and lead tungstates, it is shown that the wavelength corresponding to the maximum of the blue luminescence band (λ_max) correlates with the melting temperature (T_m) of these compounds. The position of the blue luminescence band is the same (in the range 510–530 nm) for crystals with different divalent cations. Annealing in vacuum and electron irradiation decrease the intensity of both blue and green luminescence bands but do not change the ratio of their maximum intensities. This circumstance suggests that vacancies serve as luminescence quenchers to a greater extent rather than facilitate the formation of emission centers responsible for a particular luminescence band.     

射频溅射功率对Mn-Co-Ni-O薄膜结构与性能的影响

采用射频磁控溅射技术在硅衬底上制备了锰钴镍氧(Mn-Co-Ni-O, MCNO)薄膜并进行了后退火处理。利用X射线衍射、扫描电子显微镜、光学测试仪器等测试手段对晶体结构、表面形貌及光学性能进行表征。分析了不同射频溅射功率(60~100 W)对MCNO薄膜表面微观形貌、晶体结构和光学性能的影响。结果表明,在60~90 W下获得的薄膜表面致密且均匀,但在100 W下获得的MCNO薄膜表面晶粒尺寸显著增大。物相分析表明,采用射频磁控溅射沉积的MCNO薄膜主要为尖晶石结构,溅射功率对薄膜结晶质量和择优取向具有显著影响,在80 W下获得的MCNO薄膜结晶质量最佳。同时,拉曼光谱测试也表明该MCNO薄膜表现出最强的Mn⁴⁺—O对称弯曲振动和最小的压应力。紫外-可见-近红外光谱分析表明,MCNO薄膜的吸光范围主要在可见光-近红外波段,在80~90 W溅射功率下获得的MCNO薄膜在近红外波段表现出更强的吸收峰。射频溅射功率的改变会影响薄膜的厚度和结晶质量,从而对薄膜的光学带隙起到调控作用。光致发光光谱测试不同溅射功率下薄膜的缺陷峰发光强度,且在功率为80 W时沉积的薄膜具有最强紫外发射峰,表明改变溅射功率能够有效改善薄膜缺陷及提高晶体质量。     

ZnO薄膜结构缺陷与发光性能研究(一)

在ZnO发光材料中存在的各种结构缺陷是制约ZnO发光性能的一个关键因素。本文总结了ZnO薄膜材料中可能存在的缺陷类型,并就点缺陷的性质及其对发光性能影响的研究现状做了重点评述。对ZnO薄膜发光光谱常见的三个发光带,即紫外、绿光和黄光而言,紫外发光普遍被认为是带-带直接辐射复合发光或激子发光;而对可见光,尤其是绿光的发光机理却有着不同的说法,人们早期认为是铜杂质,近年来普遍认为是氧空位、锌空位等点缺陷所致,确切机理仍有争论。此外,点缺陷作为非辐射中心对ZnO薄膜的发光寿命有一定的影响。     

Electrochemical deposition of ZnO film and its photoluminescence properties

ZnO thin films were prepared by the electrochemical deposition method on conductive substrates. The as-deposited film was ZnO crystallites of the wurzite structure highly oriented along the (0 0 2) plane. The specific crystalline morphology may be attributed to the growth mechanism through the orientation attachment mode, which is one of the characteristics peculiar for the present process, because the terrace has been clearly observed in high-resolution AFM images. The film shows high transmittance and an optical band gap energy of 3.3 eV. After annealing in N₂ or Ar, strong green emission was observed, which should be related to the generation of singly ionized oxygen defects. Improving emission intensity further by optimizing the annealing conditions, this method may be promising to replace the traditional method for preparation of ZnO green phosphor.     

Structure and properties of hydrogenated amorphous silicon carbide thin films deposited by PECVD

a-Si_1?xC_x:H films are deposited by RF plasma enhanced chemical vapor deposition (PECVD) at different RF powers with hydrogen-diluted silane and methane mixture as reactive gases. The structure and properties of the thin films are measured by infrared spectroscope (IR), Raman scattering spectroscope and ultra violet–visible transmission spectroscope (UV–vis), respectively. Results show that the optical band gap of the a-Si_1?xC_x:H thin films increases with increasing Si–C bond fraction. It can be easily controlled through controlling Si–C bond formed by modulating deposition power. At low deposition power, the bond configuration of the a-Si_1?xC_x:H thin film is more disordered owing to the distinct different bond lengths and bond strengths between Si and C atoms. At a too high deposition power, it becomes still high disordered due to dangling bonds appearing in the a-Si_1?xC_x:H thin film. The low disordered bond configuration appears in the thin film deposited with moderate deposition power density of about 2.5 W/cm².     

脉冲式退火法对AZO薄膜性能的研究

用磁控溅射法在玻璃衬底上制备了掺铝氧化锌(AZO)薄膜,然后用脉冲式快速光热处火(PRTP)法对样品进行了600～800℃的退火处理.采用X射线衍射仪(XRD)、分光光度计、四探针等测试手段对AZO薄膜的结晶性能、透光率和导电性能进行了表征.结果表明:(1)薄膜退火后透光率基本维持在退火前(82～92;)的水平,而电阻率则由10-4Ω·cm 上升了1到6个数量级,已丧失了"导电膜"意义;(2)样品具有好的结构性能有利于提高样品的导电性能.对此现象进行了理论分析.     

Role of annealing environment and partial pressure on structure and optical performance of TiO2 thin films fabricated by rf sputter method

Influences of the different annealing ambient (in air, 1 bar, 2 bar, 3 bar and 4 bar oxygen partial pressure) on the titanium dioxide (TiO₂) thin films deposited on soda lime glass by standard radio frequency (rf) magnetron reactive sputtering method at 100 watt were investigated by means of X–ray diffractometer (XRD), ultra violet spectrometer (UV–vis), and Scanning Electron Microscopy (SEM). It was found that either optical properties or energy band gaps of the films enhanced with increase in the oxygen partial pressure up to 3 bar. The energy band gaps of the films (except for the film annealed in 4 bar oxygen partial pressure) became larger than the film annealed in atmospheric pressure. The best transmission was observed for the thin film annealed in 3 bar oxygen partial pressure. Moreover, not only was grain–like structure found to be more dominant than dot–like structure but also growth of anatase phase was observed instead of that of the rutile phase with increasing oxygen partial pressure up to 3 bar. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Dependence of photoluminescence properties on excitation power in ZnO and ZnCdO microrods

ZnO and ZnCdO microrods have been prepared through a chemical bath deposition method. The structure of microrods has been characterized using X‐ray diffraction (XRD) and transmission electron microscopy (TEM). Photoluminescence spectra were recorded for ZnO and ZnCdO microrods at different excitation powers. The intensity of UV emission is enhanced with increasing excitation power. The width of UV emission increases for spectra at higher excitation powers. In particular, the paper shows that the influence of excitation power on the shift of emission band for ZnCdO microrods is more remarkable than that of ZnO microrods with the increase of excitation power. The definite experimental evidence demonstrated that the temperature coefficient β of ZnCdO microrods is much larger than the temperature coefficient of ZnO microrods. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

表面补偿的高雾度ZnO∶Al及其在硅薄膜太阳电池中的应用

采用稀盐酸对磁控溅射法制备的平面掺铝氧化锌(ZnO∶Al,AZO)薄膜表面进行湿法刻蚀制绒,分析了盐酸浓度和刻蚀时间对AZO薄膜表面的形貌特征和光电特性的影响。研究发现,湿法刻蚀导致AZO薄膜表面呈现大尺度的陨石坑形貌特征,随刻蚀时间增加,薄膜在大于500 nm的长波范围内光学透过率可维持在70%~75%,且800nm处雾度值可高达48%,陷光能力快速增加,而面电阻率呈现逐渐增加趋势。高的盐酸浓度可以导致薄膜表面呈现较快凹型形貌特征,并可给出较高的雾度值。为了在保持高雾度值的条件下改善薄膜导电性,在2%盐酸刻蚀30 s所制备绒面沉积300 nm AZO薄膜进行厚度补偿,所获得薄膜的表面方块电阻小于10Ω/sq,以其作为前电极所制成的单结薄膜电池转换效率达到9.24%。结果表明,采用酸性刻蚀+厚度补偿方法所制备的绒面AZO薄膜可兼顾高雾度和低电阻的性能要求,是用作硅基薄膜太阳电池前电极的理想材料。     

Optical properties and synthesis of CuInSe2 thin films by selenization of Cu/In layers

In this paper, we report the effect of annealing temperature on the properties of copper indium diselenide (CuInSe₂) thin films. The CuInSe₂ thin films were fabricated at 500 °C for 2 h by annealing Cu‐In layers (as precursors) selenized in a glass tube with pure selenium powder. The structural and morphological properties of the CuInSe₂ thin films were characterized respectively by means of x‐ray diffraction (XRD) and field‐emission scanning electron microscope (FE‐SEM). The type of CuInSe₂ thin film has been identified as direct allowed and the band gap value was determined. The study of UV/Visible/NIR absorption shows that the band gap value of CuInSe₂ thin film is about 1.07 eV, which is within an optimal range for harvesting solar radiation energy. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Structural and optical properties of Mg‐doped ZnO thin films prepared by a modified Pechini method

ZnO thin films with different Mg doping contents (0%, 3%, 5%, 8%, 10%, respectively) were prepared on quartz glass substrates by a modified Pechini method. XRD patterns reveal that all the thin films possess a polycrystalline hexagonal wurtzite structure. The peak position of (002) plane for Mg‐doped ZnO thin films shifts toward higher angle due to the Mg doping. The crystallite size calculated by Debey‐Scherrer formula is in the range of 32.95–48.92 nm. The SEM images show that Mg‐doped ZnO thin films are composed of dense nanoparticles, and the thickness of Mg‐doped ZnO thin films with Mg doped at 8% is around 140 nm. The transmittance spectra indicate that Mg doping can increase the optical bandgap of ZnO thin films. The band gap is tailored from 3.36 eV to 3.66 eV by changing Mg doping concentration between 3% and 10%. The photoluminescence spectra show that the ultraviolet emission peak of Mg‐doped ZnO thin films shifts toward lower wavelength as Mg doping content increases from 3% to 8%. The green emission peak of Mg‐doped ZnO thin films with Mg doping contents were 3%, 8%, and 10% is attributed to the oxygen vacancies or donor‐acceptor pair. These results prove that Mg‐doped ZnO thin films based on a modified Pechini method have the potential applications in the optoelectronic devices.     

Cathodoluminescence of Ge, Si, and O implanted SiO2 layers and the role of mobile oxygen in defect transformations

Thermally grown SiO₂ layers of thickness d=500 nm have been implanted by Ge⁺, Si⁺, and O⁺ ions of energy 350, 150, and 100 keV, respectively, and a uniform implantation dose of D_i=5×10¹⁶ ions/cm². Thus the implantation profiles are expected with a concentration maximum of nearly 4 at.% at the half-depth d_m≅250 nm of the SiO₂ layers. After thermal annealing to 900 °C for 1 h in dry nitrogen or vacuum the typical violet luminescence band (λ=400 nm) of the Ge⁺ implanted centers is increased more than 200-fold and the Ge luminescent center depth profile is shifted from about 250 to 170 nm towards the surface as determined by cathodoluminescence (CL) depth profiling. Implanting oxygen increases the red band (λ=650 nm) but does not affect the blue band (λ=460 nm). Silicon surplus increases the amplitude of the blue (B) luminescence, but reduces the amplitude of the red (R) one. Studying the irradiation dose dependence of these blue and red bands we have established defect kinetics in SiO₂ including six main defects and precursors, including the non-bridging oxygen hole center for the red luminescence, the twofold-coordinated silicon as the oxygen deficient center ODC(2) for the blue luminescence and the mobile oxygen as the main transmitter between precursors and the radiation induced defects. The kinetics are described by a set of eight differential equations which predict the dose dependence of the CL.     

Optical properties of thermally evaporated CdS thin films

CdS thin films of varying thicknesses were deposited on cleaned glass substrates at room temperature by thermal evaporation technique in a vacuum of about 2 x 10^‐5 torr. UV‐VIS spectra of the films were studied using the optical transmittance measurements which were taken in the spectral region from 300 nm to 1100 nm. The absorbance and reflectance spectra of the films in the UV‐VIS region were also studied. Optical constants such as optical band gap, extinction coefficient, refractive index, optical conductivity and complex dielectric constant were evaluated from these spectra. All the films were found to exhibit high transmittance (∼ 60 ‐ 93 %), low absorbance and low reflectance in the visible/near infrared region from ∼ 500 nm to 1100 nm. The optical band gap energy was found to be in the range 2.28 – 2.53 eV. All the films annealed at 300°C for 4 hours in vacuum (∼ 10^‐2 torr) showed a decrease in the optical transmittance with its absorption edge shifted towards the longer wavelength, leading to the result that the optical band gap decreases on annealing the films. Also, on annealing crystallinity of the films improves, resulting in decrease in the optical transmittance. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Nature of luminescence and strain in gallium nitride nanowires

Photo- and cathodo-luminescence measurements of a variable-diameter ensemble of GaN nanowires revealed a diameter-dependent, spectral emission distribution between 350 nm and 850 nm. Spectral analysis indicated that wires with a diameter less than 400 nm were dominated by a yellow luminescence with a weaker near UV/violet emission also present. Examination of this ensemble showed that there was a general trend in the ratio of near-UV-to-yellow emission intensities with increasing nanowire diameter. Additionally, a broad green emission appears in the nanowires with a diameter above approximately 200 nm. A calculation based on the nanoheteroepitaxy model indicates that this diameter represents a transitional thickness where strain is relieved by defect formation mechanisms with a characteristic green emission.     

Optical and structural properties of lead iodide thin films prepared by vacuum evaporation method

Thermally processed lead iodide (PbI₂) thin films were prepared by the vacuum evaporation method in a constant ambient. Measured thickness of the film was verified analytically from the optical transmittance data in a wavelength range between 300 and 1600 nm. From the Tauc relation for the non‐direct inter band transition, the optical band gap of the film was found to be 2.58 eV for film thickness 300 nm. X‐ray diffraction analysis confirmed that PbI₂ films are polycrystalline, having hexagonal structure. The low fluctuation in Urbach energy indicates that the grain size is quite small. The present findings are in agreement with the other results. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Synthesis and optical properties of CuInS2 thin films prepared by sulfurization of electrodeposited Cu‐In layers

The chalcopyrite CuInS₂ thin film was fabricated at 500 °C for 2 h by sulfurization of Cu‐In layers (as precursors) that were sulfurized in a glass tube with pure sulfur powder. The structural, morphological, and optical properties of CuInS₂ thin films are characterized using X‐ray diffraction (XRD), field‐emission scanning electron microscope (FE‐SEM), and UV/Visible/NIR spectrophotometer. The study of UV/Visible/NIR absorption shows the band gap energy value of CuInS₂ thin films is 1.5 eV. The XRD pattern shows the film is pure CuInS₂; no other peaks, such as CuS or CuIn₅S₈ were observed. Furthermore, the surface of the CuInS₂ film is compact characterized by FE‐SEM, which also shows the disappearance of CuS on the surface at 500 °C.