A genetic optical interferometric inspection on micro-deformation

This paper describes a feasibility study of an optical method for measuring nanoscale deformation of micro-components that are commonly employed in the field of microelectromechanical systems (MEMS). Both theoretical and experimental results demonstrate that an optical interference fringe pattern resulted from an air gap consisting of two surfaces (object and reference surfaces) is a simple function of the deformation of the micro-component. A microscopic system incorporating a coaxial monochromatic light illumination and a high resolution CCD sensor is utilized to record the interference fringe pattern. The experimental results on different micro-components show that the proposed technique is applicable to the deformation measurement on micro-components of MEMS devices.     

Analysis of phase distortion in phase-shifted fringe projection

This paper describes the analysis of phase distortion in phase-shifted fringe projection method. A phase distortion occurs when the phase shifting technique is applied to extract the phase values from projected fringe patterns in surface contouring. The phase distortion will induce measurement errors especially in the measurement of micro-components. The cause of such phase distortion is investigated and the influence of phase distortion on the measurement of micro-components is discussed. To eliminate the phase distortion, a continuous wavelet transform (CWT) is employed to extract phase values from object surface modulated fringe patterns. Principle of the proposed CWT phase extraction method is described and experiments are conducted to verify the proposed method. It is shown that by the use of CWT phase extraction method phase distortion induced in conventional phase-shifting technique can be completely eliminated.     

Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry

This study extends the use of holographic interferometry to measure the nanoscale out-of-plane displacement with high surface resolution. It is noted that if the deformation is less than half of the optical wavelength, it is hard to find an obvious fringe pattern. Under such a situation, in general, the phase shift method is used. However, it needs to take more than 3 images for phase shifting and phase reconstruction In this paper, a more simple hybrid method of gray-level and holographic interferometry is used to extract fringe skeletons, in which it just needs to take one or two images for the normal deformation measurement directly, even if there exists no obvious fringe pattern. The displacement field with high surface resolution can also be obtained. The proposed method yielded a theoretical precision of 0.15 nm for out-of-plane displacement with a monochromatic CCD camera of 10-bit gray scale (1024 gray scales) sensitivity and microscale surface resolution for millimeter scale object with 640×480 pixels image resolution by an He–Ne LASER (632.8 nm wavelength) light source. The gray-level method is proposed to calculate the non-obvious interferometry fringe by traditional holographic interferometry hologram, and the result showed that this method works for this purpose.     

Fast full-field out-of-plane deformation measurement using fringe reflectometry

Full-field out-of-plane deformation measurement of specular surfaces can be implemented quickly and conveniently using fringe reflectometry. The system configuration is simple and processing is fast. With the assistance of an advanced fringe pattern processing technique, the windowed Fourier ridges method, only a single two-directional fringe pattern is necessary for determination of the deformed surface profile. Thus, the whole measurement only requires a single image with the potential for high speed or even real time measurement.     

A flexible 3D profilometry based on fringe contrast analysis

This paper proposed a flexible 3D profilometry based on fringe contrast analysis. A series of sinusoidal fringes are projected on the surface of the testing object that is laid in front of the imaging plane of the fringes, and captured through a beam splitter by a CCD camera in the same direction as the axis of the projection. After the fringe contrast obtained using phase-shifting technique, the height of the object can be restored through searching the look-up table of the contrast and the height. In the measurement process, we only need to capture fringe patterns in one position, without changing the imaging plane of the fringes, so it is faster and more convenient than the existing method based on fringe contrast analysis. Our system is simple and flexible by reason of no special devices used. In this paper, the principle of this method, the setup of the measurement system and primary experiment results are given. The experimental results prove this method can restore the height of the complex object accurately and effectively.     

A windowing technique for the automated analysis of holo-interferograms

A systematic method for measuring surface deformations is described which includes the use of real-time holographic interferometry, the incorporation of a carrier fringe pattern to achieve fringe linearization, and the application of image digitization and automated computer analysis for rapid quantitative interpretation. In this method, regions of interest can be selected by the use of a windowing technique in which the operator specifies the desired subregion. The problem of correctly numbering fringes which originate or vanish at the boundary where the scanning begins is solved by an algorithm which ensures correct identification of the fringe orders. The output includes a perspective plot of the out-of-plane deformation field.This method is demonstrated by its application to a measurement of the out-of-plane deformation of a hermetically sealed plastic housing loaded by internal pressurization.     

Improved evaluation of electronic speckle pattern interferograms by photogrammetric image analysis

Electronic speckle pattern interferometry (ESPI) is a well-established tool for non-destructive testing. It allows the quantitative determination of surface deformations and micro-movements with a sub-micrometer resolution. In the case of objects which are extended in depth, however, the evaluation and interpretation of the resulting correlation fringe patterns can be affected by perspective image distortions as well as by a varying image size. In this paper a method for combination of ESPI with a photogrammetric 3D coordinate measurement is presented. In this way, interferogram data are precisely allocated in 3D-space. Furthermore, it is possible to take into account a spatially varying sensitivity vector. The utilizability of the method is demonstrated by a deformation measurement on a stone sculpture.     

形貌与微变形全场光学同时测量方法

在实际工程应用中,对材料形貌和结构变形等参量的检测是必不可少的,而且往往需要进行多参量同时测量。针对该背景,采用数字散斑干涉与数字条纹投影相结合的测量方法, 设计了一种集成光路,通过在数字散斑干涉实验光路中引入一个投影设备,实现物体表面形貌和微变形的同时测量。所提出的方法具有全场非接触测量的优点,且测量光路简单、操作方便、效率高、可靠性强。该方法的形貌测量分辨率优于10 μm,形变测量分辨率优于30 nm。     

Using coloured structured light in 3-D surface measurement

The widest used algorithms for 3-D surface measurement using structured fringe patterns are phase stepping and Fourier fringe analysis. The techniques currently employed use mostly monochrome fringe patterns as a tool for phase information measurement and further surface reconstruction. However, the information contained in colour images is much more than that of monochrome, in this case, a new colour technique can be employed to analyse a measured scene with colour fringe patterns.This paper presents a new method for improving the measurement of 3-D shapes by using colour information of the measured scene as an additional parameter. The new method is based on primary colours (red, green and blue) to increase the number of the illuminated fringe patterns, which will remove or significantly reduce the common drawbacks of existing methods. The proposed technique produces a number of coloured structured lighting patterns, which are projected from different angles onto the scene. These patterns are analysed using masking algorithms, a specially adapted multi-colour version of the standard Fourier fringe analysis method and calibration routines. In this way a number of the standard difficulties are overcome.     

Three-dimensional profile measurement of the blade based on surface structured light

As the blade must have precise size and accurate shape, three-dimensional profile measurement of the blade is very important. In this paper, three-dimensional profile measurement method of the blade based on surface structured light is proposed. A new phase unwrapping method is also proposed. This encoding method combined coding fringe pattern with the four-step phase-shifting method, the coding information is embedded into the phase, which can be used to determine fringe order for absolute phase retrieval. The encoding method is simple and easy to implement, so the phase unwrapping of the blade can be quickly perform. The experimental and simulation results show that the method can achieve a high precision, high speed and low cost three-dimensional profile measurement of the blade.     

Phase shifting nano-moiré method with scanning tunneling microscope

In this paper, a new nano-moiré method using scanning tunneling microscope (STM) is proposed. This method is capable of measuring nanoscopic deformation of matter. The formation mechanism of the STM moiré fringe and the phase shifting technique used in STM moiré fringes are explained in details. Typical experiments are conducted with the crystal lattices of freshly cleaved highly oriented pyrolytic graphite, are used as specimen grating, to generate STM moiré fringe patterns. Phase shifting is realized in four steps from 0 to 2π by controlling the PZT in the STM system to shift the specimen in the vertical direction. This method provides a new way for disposal of moiré fringes pattern in the nano-moiré measurement.     

Radial metrology application to whole-body measurement on hyperelastic tubular samples

This paper focuses on a one-camera/one-shot procedure able to get the whole deformation map of hyperelastic tubular samples. A challenging application of this approach is the investigation of the highly anisotropic and inhomogeneous arterial tissue mechanical response during inflation/extension tests. To address this issue, full field optical methods based on digital correlation (DIC), fringe projection (FP) and stereo-photogrammetry (SP) have been already proposed in literature to overcome limitations of the most widely adopted 2-D video dimension analyzer (VDA) systems.In this paper, the feasibility of a very straightforward full-field procedure that uses radial metrology concepts has been studied. The rationale behind the proposed method relies on the relation existing between image deformation of a world point reflected by a 45° concave conical mirror and the relative position of this point with respect to the specular surface. Under certain assumptions reasonably true for the application of interest, by using simple relationships, it is possible to retrieve the position of markers applied onto the sample surface with great precision. This procedure has several advantages such as the retrieval of the whole 360° surface map in one shot, the ease of application, the use of one single camera, the real-time measurement capability. Conversely, the proposed approach is suitable only for geometries with smooth transversal sections, needs sample preparation and its spatial resolution is limited by the sparsity of the surface control points.The paper describes first the theoretical basis of the procedure; then results of experimental tests on calibration samples and latex tubular specimens are presented and discussed. Further set-up improvements will allow the present procedure to be implemented for in-vitro inflation/extension tests on vascular segments.     

Deformation and profile measurement using the digital projection grating method

This paper presents a digital projection grating method for full field measurement of out-of-plane deformation and shape of an object. Two grating patterns on an object before and after deformation are captured by a CCD camera and stored in a computer. With the aid of Fast Fourier Transform (FFT) and signal demodulating techniques, a wrapped phase map is generated. The phases are expanded in the range of 0–2π and compared with the resulting moiré pattern. An unwrapping procedure is used to obtain a continuous phase. In addition, a digital method for fractional fringe multiplication is also developed. Results on deformation and object profile measurements are presented.     

一种分析薄膜振动模式的结构光条纹时间平均法

提出了一种用于振动物体表面快速测量的光学测试系统和方法。该系统采用结构光三维传感技术,利用时间平均法来实现对振动表面的测量和振动模式分析。用低帧频商用CCD相机记录由光栅投影到振动物体表面上形成的一系列变形正弦条纹,对获取的一帧变形条纹经过二维傅里叶变换、频谱滤波、逆傅里叶变换等处理得到调制物体振幅的零级贝塞尔函数分布。给出了该方法的理论分析,推导了相应的计算公式。计算机模拟和实验验证了该方法的可行性。实验证明,该方法具有数据获取速度快,全场非接触测量以及实验装置简单等优点。     

非平行光干涉照明显微镜三维形貌检测研究

为实现表面微观形貌快速而较简单的检测, 一种使用非平行光干涉照明的光学显微三维形貌检测方法被提出。该方法使用空间光调制器对激光光束进行衍射, 选取光强相近的2个衍射级通过显微物镜, 双光束干涉可得到周期接近图像分辨率、相位可精确调节的照明条纹, 被测样本的三维形貌可通过拍摄4帧等相位差的条纹照明图像来计算得到。该方法不需借助干涉物镜产生条纹, 不需要轴向扫描装置记录条纹变化, 相位调节精确, 成像直观。此外, 该方法所产生干涉条纹的相位随坐标线性变化, 不需对条纹周期进行修正。因为照明条纹参数调节光路独立于显微成像光路, 系统装置具有光路简洁、易于调节的优点。为验证所提出三维检测精度, 以粗糙度100 nm的粗糙度对比模块和硅片为被测样品进行了三维轮廓重建实验, 实验结果显示, 所提出方法轴向重复性测量精度为8.6 nm(2σ)。     

Lens distortion elimination for improving measurement accuracy of fringe projection profilometry

Fringe projection profilometry (FPP) is a powerful method for three-dimensional (3D) shape measurement. However, the measurement accuracy of the existing FPP is often hindered by the distortion of the lens used in FPP. In this paper, a simple and efficient method is presented to overcome this problem. First, the FPP system is calibrated as a stereovision system. Then, the camera lens distortion is eliminated by correcting the captured images. For the projector lens distortion, distorted fringe patterns are generated according to the lens distortion model. With these distorted fringe patterns, the projector can project undistorted fringe patterns, which means that the projector lens distortion is eliminated. Experimental results show that the proposed method can successfully eliminate the lens distortions of FPP and therefore improves its measurement accuracy.     

Measurement of surface topography by RGB Shadow-Moiré with direct phase demodulation

In this paper we present the application of a direct demodulation method for the measurement of surface topography by means of Shadow-Moiré. In our set-up, we use three LEDs (with green, red and blue peak wavelengths) to illuminate the grating. Due to the different position of these light sources, a polychromatic Shadow-Moiré fringe pattern is produced, which can be described as the superposition of three monochromatic (red, green and blue) fringe patterns. Taking the image of this polychromatic fringe pattern with a RGB CCD camera, we get a monochromatic fringe pattern stored at each RGB channel of the CCD. The direct demodulation algorithm employed uses these fringe patterns to calculate the wrapped phase map. After unwrapping the phase map using a standard multi-grid technique, we implemented an automatic procedure to detect the area of interest of the phase map by removing low modulation zones and to calculate the absolute value of the phase. In this way it is possible to determine the topography of a surface with a single RGB snapshot maintaining a simple experimental set-up, which is an important feature, especially for the study of dynamic phenomena such as deformations. We present the experimental results obtained after measuring different objects with both smooth and rough surface textures.     

平行式向列液晶实现相移剪切电子散斑干涉术的研究

研究了向列型液晶的相位调制特性，采用平行式向列液昌作为相移器建立了相移剪切电子散斑干涉计量系统。该方法将相移技术引入到剪切电子散斑干涉术中，提高了检测精度，采用了相关条纹法求解相位，简化了计算；相移方法简单，可靠。用该系统进行应变场的测量实验，取得了满意的效果。     

Fringe contrast-based 3D profilometry using fringe projection

Quality-guided algorithm is a widely used method in phase unwrapping. This paper shows an accurate quality map based on fringe contrast for 3D shape measurement. Phase-shifted fringe patterns are projected onto an object surface by a programmable liquid crystal projector and recorded by a CCD camera. A wrapped phase map and a fringe contrast map are extracted from the deformed fringe patterns by the phase-shifting technique. Guided by the contrast map, the quality-guided unwrapping algorithm minimizes unwanted shadow and non-uniform surface reflectance effects and is able to retrieve a correct surface profile. Validity of the proposed method is tested on a fish model and a cutting tool specimen.     

基于液晶显示投影技术的数字影栅云纹相移实现方法

影栅云纹是物体离面变形和表面形貌测量常用的一种比较简单的方法,用单纯的影栅云纹法即便在最好的光学系统配置情况下测量精度也只有1~100μm左右,在影栅云纹测试方法中引进相移技术是提高测量精度的主要手段。采用液晶投影仪和数字图像处理技术实现数字影栅云纹测量的准确数字相移,避免了在影栅云纹法中使用结构比较复杂或特制的相移机构。由计算机产生相移条纹图经液晶显示投影,应用实时图像灰度算术相减技术得到数字相移影栅云纹条纹图。该方法具有“基准栅”的栅距和相移步长实时可调,配置高速图像采集系统和图像后处理软件,可将相移技术引入动态测量中,从而提高动态测量的精度的优点。最后的悬臂梁实验结果证实了该方法的有效性。