基于杂散光抑制要求的光学表面粗糙度控制方法研究

光学表面加工误差引起的散射是影响光学系统成像性能的重要因素.描述表面总散射能量的均方根粗糙度是评定光学表面粗糙度的通用指标,但因其未能体现散射能量的空间分布,在表征光学表面散射对具体光学系统杂散光性能影响时存在准确度不足的局限.本文基于全积分散射及双向散射分布函数理论,针对杂散光抑制要求提出一种光学表面粗糙度控制的新方法.首先通过分析确定光学表面纹理中影响系统杂散光的空间频率范围,然后度量该频率带限范围内的表面均方根粗糙度,作为控制光学表面粗糙度的指标.以太阳磁场望远镜(MFT)为例进行方法验证,确定主镜表面纹理有效频率范围为0—18 mm~(-1),分析了主镜表面带限均方根粗糙度对MFT杂散光性能的影响.结果表明,带限均方根粗糙度与MFT杂散光性能之间的关系稳定性能大幅提高,由此验证了采用带限均方根粗糙度描述光学表面粗糙度,能更为准确地控制其对具体光学系统杂散光性能的影响.     

基于散射模型设计外遮光罩

通过对粗糙表面散射情况的分析发现,普通金属材料的表面散射能量主要集中在10°散射角内。针对这种现象,提出了基于该散射特性的光学系统外遮光罩设计方法,该遮光罩的杂散光抑制角比基于反射理论计算的大5°,具有良好的散射杂散光的抑制作用。最后以Ritchey-Chirtien(R-C)光学系统为例,为其设计了合适的遮光罩,并在TracePro软件中对比性地建模、分析。结果证明了该模型的正确性,且该遮光罩对抑制杂散光起到了很好的效果,点源透射比(PST)相对较低。     

超声波震荡法及润湿性增强法对单晶硅阶梯光栅闪耀面粗糙度的影响

单晶硅阶梯光栅闪耀面表面粗糙度会引起入射光的散射形成杂散光,为获得低杂散光的阶梯光栅槽形,减小单晶硅阶梯光栅闪耀面表面粗糙度显得尤为重要。在单晶硅湿法刻蚀工艺中,阶梯光栅闪耀面表面粗糙度较大的原因是反应生成的氢气易在硅片表面停留,形成虚掩模,阻碍反应的进一步进行。基于超声波空化作用及异丙醇(IPA)增加单晶硅表面润湿性的原理,在单晶硅湿法刻蚀制作阶梯光栅工艺过程中分别利用超声波震荡法及润湿性增强法对所制阶梯光栅闪耀面表面粗糙度进行改善。利用超声波震荡法所制阶梯光栅闪耀面表面粗糙度小于15nm,利用润湿性增强法所制阶梯光栅闪耀面表面粗糙度小于7nm。同时施以超声波震荡法和润湿性增强法,在异丙醇质量分数范围为5%~20%,超声波频率为100kHz,功率范围为30~50 W时,所制阶梯光栅闪耀面表面粗糙度小于2nm,而且当异丙醇质量分数为20%、超声波频率为100kHz以及超声波功率为50W时,所制中阶梯光栅闪耀面表面粗糙度达到1nm。实验结果表明,同时施以超声波震荡法及润湿性增强法,并优化实验参数可以制备更低粗糙度的阶梯光栅。     

遮光罩内壁蜂窝结构单元的双向反射特性

内壁蜂窝结构是决定遮光罩杂散光抑制性能的主要因素,掌握其各向异性辐射传输特性对遮光罩的杂散光分析和优化设计具有重要意义.针对蜂窝结构单元,建立辐射传输模型,导出了表面双向反射分布函数的离散表达式;通过蒙特卡罗法模拟蜂窝结构单元的辐射传输过程,分析了几何参量和涂层反射率对等效面反射特性的影响;根据模拟所得双向反射分布函数数据库,建立了用于遮光罩杂散光分析的蜂窝结构等效面的反射特性概率模型.分析结果表明,蜂窝结构对杂散光呈现很强的后向散射特征,等效面的反射特性概率模型与直接模拟结果符合很好,可用于遮光罩杂散光分析和设计.     

遮光罩内壁蜂窝结构单元的双向反射特性

内壁蜂窝结构是决定遮光罩杂散光抑制性能的主要因素,掌握其各向异性辐射传输特性对遮光罩的杂散光分析和优化设计具有重要意义.针对蜂窝结构单元,建立辐射传输模型,导出了表面双向反射分布函数的离散表达式;通过蒙特卡罗法模拟蜂窝结构单元的辐射传输过程,分析了几何参量和涂层反射率对等效面反射特性的影响;根据模拟所得双向反射分布函数数据库,建立了用于遮光罩杂散光分析的蜂窝结构等效面的反射特性概率模型.分析结果表明,蜂窝结构对杂散光呈现很强的后向散射特征,等效面的反射特性概率模型与直接模拟结果符合很好,可用于遮光罩杂散光分析和设计.     

神光Ⅲ原型装置的全孔径背向散射诊断技术

为了更好地研究神光Ⅲ原型实验中激光与等离子体相互作用产生的散射光,研制了新的全孔径背向散射诊断系统。该系统根据布里渊散射与拉曼散射的性质区别,使用二向色镜对散射光进行分光提纯,采用真空滤波器、挡光板、高反滤波片以及改变倍频晶体角度等进行消杂光处理,进而减少杂散光对测量结果的影响。同时,该系统采用特制的全口径大光斑激光器模拟打靶散射光对光路透过率进行标定。实验结果表明:新的全孔径背向散射诊断系统工作状态稳定,明显减少了杂散光的影响,所测数据更加真实可靠。     

基于区域分解和逐级光线分裂的杂散光分析

针对蒙特卡罗法运算量大的问题,通过引入区域分解和逐级光线分裂技术,减少杂散光线与表面交点求解时所涉及的表面数及跟踪光线数,降低计算量.区域分解时,考虑子区域与表面数的匹配关系;并基于杂散光传播过程的模拟信息,逐级确定光线分裂倍数.以大衰减比抑制结构和多传感器系统为例,进行杂散光分析.结果表明,对复杂系统杂散光传播的蒙特卡罗法模拟,应用区域分解和逐级光线分裂技术,可以在保持计算精度的前提下,有效地提高计算效率.     

平面光栅杂散光测试仪模型设计及消杂光技术研究

杂散光是平面光栅的重要性能指标,光栅杂散光的测量一直是光栅研制领域的难题。为实现仪器自身杂光低于10-8量级,以满足对平面光栅杂散光10-7量级的精确测量要求,基于标量衍射理论和经典Fresnel-Kirchhoff衍射理论,对光谱仪器中的光栅杂散光进行了理论分析,设计了平行光照射条件下光栅杂散光测试仪的光机模型。利用杂散光分析软件ASAP建立紫外单色光入射下光栅杂散光测试仪的散射模型并对其进行仿真计算,分析仪器杂光的主要来源及散射路径,据此提出了用于降低仪器散射光和光栅多次衍射光的挡光环、叶片、光阑、光学陷阱等四种杂光抑制结构。最后,采用ASAP软件对增加抑制结构前后的仪器杂光相对强度进行了对照分析。仿真及分析结果表明,仪器杂光在测试波长±100 nm范围内的最大值由采用杂光抑制结构前的10-6量级以上降低至10-8量级以下,已满足光栅杂散光测试仪的设计需求,即可实现刻线密度为300～3 600 gr·mm-1的光栅杂散光10-7量级精确测量。该研究方法及结果将为平面光栅杂散光测试仪研制提供理论依据。     

不同线宽结构杂散光Kirk模型分析

采用Kirk测量法的杂散光模型研究了杂散光在不同线宽结构上杂散光的光强变化,通过图像对比度分析了杂散光对不同线宽结构的影响。基于Matlab软件仿真分析表明:线宽一定时,线条越稀疏,图像对比度越低,杂散光对成像图形分辨力的影响越大;线条线间比一定时,线宽尺寸越小,图像对比度越低,杂散光对成像图形分辨力的影响也越大。所以杂散光对线宽较小并且线条稀疏空间结构所成的图形造成的影响较大。光刻; Kirk测量法; 杂散光; 点扩散函数; 图像对比度     

Analyzing stray light on line structures of different critical dimensions based on Kirk test

采用Kirk测量法的杂散光模型研究了杂散光在不同线宽结构上杂散光的光强变化,通过图像对比度分析了杂散光对不同线宽结构的影响.基于Matlab软件仿真分析表明:线宽一定时,线条越稀疏,图像对比度越低,杂散光对成像图形分辨力的影响越大;线条线间比一定时,线宽尺寸越小,图像对比度越低,杂散光对成像图形分辨力的影响也越大.所以杂散光对线宽较小并且线条稀疏空间结构所成的图形造成的影响较大.     

Use of neighborhood unhomogeneity to detect the edge of hyperspectral spatial stray light region

Since hyperspectral images contain fine spectral information of the target objects, there is continuous demand for the detailed analysis about such images. A somewhat neglected but critically important challenge regarding hyperspectral image is the presence of “spatial stray light” – a phenomenon caused by scattering of photons from target objects. In this study, neighborhood unhomogeneity method is used to detect the edge of spatial stray light region in hyperspectral images. Analyses were conducted on reflectance datasets of standard card, potato leaf, and corn kernels from three inbred lines. By using neighborhood unhomogeneity method, the edge of spatial stray light region could be detected obviously and experimental results show the effectiveness of the proposed method.     

Use of local fuzzy variance to extract the scattered regions of spatial stray light influence in hyperspectral images

Spatial stray light is a phenomenon caused by scattering of photons from target objects, and it is generated within and among adjacent objects. The intensity and radiometric composition of spatial stray light depends on the light source properties and chemical and physical properties of the objects being imaged. A special kind of region exists in hyperspectral images, referred to as the “scattered region” of spatial stray light, which can be regarded as a boundary between different objects or between an object and background. In this study, local fuzzy variance was used to extract the regions, in which spatial stray light may have significant influence. The proposed method was applied to three data sets: synthetic array data and two hyperspectral imaging datasets (1: plastic card and 2: maize kernels from three inbred lines). Using local fuzzy variance method, scattered regions of spatial stray light could be extracted and visual inspection of data sets demonstrated the effectiveness and sensitivity of the proposed method.     

具有蜂窝内壁的遮光罩杂散光抑制特性分析

将具有蜂窝内壁结构的遮光罩内的杂散光传播分解为蜂窝结构的散射、内壁等效面传播两个层次的行为。通过建立蜂窝结构的等效面各向异性反射模型,采用蒙特卡罗法模拟获得内壁等效面的双向反射分布函数(BRDF)。以此为基础,再次采用蒙特卡罗法模拟遮光罩内壁等效面的杂散光传播过程,分析了该类遮光罩的杂散光抑制特性,并讨论了蜂窝高度和涂层反射率的影响。结果表明,遮光罩内壁蜂窝结构有很好的杂散光抑制作用;蜂窝高度与边长之比δ≥1时,遮光罩的抑制能力不再变化,降低涂层反射率能够有效地增强抑制效果。     

Simulation and assessment of stray light effects in infrared cameras using non-sequential ray tracing

In this article, we have evaluated the stray light effects in infrared cameras operating in the 3–5 μm waveband having cooled focal plane array detectors. A non-sequential ray tracing method is used to model the multiple reflections from polished lens surfaces as well as diffused scattering from rough mechanical surfaces inside the camera housing. The flux signature on the detector surface due to the self-emission of in-band radiation from the lenses and camera housing is calculated. The flux signature due to sources beyond the nominal field-of-view of the camera is also calculated. Light splitting into multiple diffraction orders from diffractive lens surfaces is taken into account both in the transmission and the reflection paths. The wavelength and angle dependent reflection coefficient of the anti-reflection coatings on the polished lens surfaces is taken into account. The effect of local heating of camera mounts on the stray light signature on the detector surface is also evaluated. The results show that using the non-sequential ray tracing method, useful predictions can be made for the stray light signature in the infrared cameras. Such calculations can be used to identify areas in the camera housing which need to be temperature stabilized to reduce their detrimental stray-light signature.     

Measurements of ion acoustic fluctuations in a low density plasma by scattering of pulsed CO2 laser light

Measurements of ion acoustic waves in a low density plasma have been made by 1° scattering of pulsed CO₂ laser light. The heterodyne detection system uses stray light as local oscillator.     

Surface wave effect on light scattering from one-dimensional photonic crystals

Light scattering and reflection measurements using attenuated total reflection technique for s polarization of the incident light on a finite one-dimensional photonic crystal are reported. Angular specular reflection was measured experimentally to determine, the optimum thickness, the angular position of the surface mode, and the number of bi-layers of the system. It was demonstrated that the position of the surface mode inside the last film is close to the asymptotic value when the number of periods is increased. Spectral reflection measurements were made to determine experimentally the band gap width and measure the dispersion relation of the surface mode inside this band. The corresponding field amplitude was calculated (∣E∣²) showing that in resonant conditions it has a maximum near the surface. The angular dependence of the scattered light measured displays a peak caused by singles cattering and located approximately at the excitation angle of the surface electromagnetic mode. When the incident light is in resonance with the surface electromagnetic wave, it is found experimentally that the scattering of light is enhanced overall by approximately one order of magnitude in comparison with the off-resonance case.     

Surface enhanced Raman scattering of light by ZnO nanostructures

Raman scattering (including nonresonant, resonant, and surface enhanced scattering) of light by optical and surface phonons of ZnO nanocrystals and nanorods has been investigated. It has been found that the nonresonant and resonant Raman scattering spectra of the nanostructures exhibit typical vibrational modes, E ₂(high) and A ₁(LO), respectively, which are allowed by the selection rules. The deposition of silver nanoclusters on the surface of nanostructures leads either to an abrupt increase in the intensity (by a factor of 10³) of Raman scattering of light by surface optical phonons or to the appearance of new surface modes, which indicates the observation of the phenomenon of surface enhanced Raman light scattering. It has been demonstrated that the frequencies of surface optical phonon modes of the studied nanostructures are in good agreement with the theoretical values obtained from calculations performed within the effective dielectric function model.