N2微空心阴极放电特性及其阴极溅射的PIC/MC模拟

采用两维PIC/MCC模型模拟了氮气微空心阴极放电以及轰击离子 (N₂⁺,N⁺) 的钛阴极溅射. 主要计算了氮气微空心阴极放电离子 (N₂⁺,N⁺) 及溅射原子Ti的行为分布, 并研究了溅射Ti 原子的热化过程. 结果表明: 在模拟条件下, 空心阴极效应是负辉区叠加的电子震荡; 在对应条件下, 微空心较传统空心放电两种离子 (N₂⁺,N⁺) 密度均大两个量级, 两种离子的平均能量的分布及大小几乎相同; 在放电空间N⁺的密度约为N₂⁺的1/6, 最大能量约大2倍; 在不同参数 (P, T, V)下, 轰击阴极内表面的氮离子(N₂⁺,N⁺)的密度近似均匀, 其平均能量几乎相等; 从阴极溅射出的Ti原子的初始平均能量约6.8 eV, 离开阴极约0.15 mm处几乎完全被热化. 模拟结果为N₂微空心阴极放电等离子体特性的认识提供了参考依据. 关键词： 微空心阴极放电 PIC/MC模拟 2等离子体')" href="#">N₂等离子体     

氮气辉光放电阴极鞘层重粒子输运过程研究

采用蒙特卡罗模拟对氮气辉光放电等离子体阴极鞘层内离子(N₂⁺,N⁺)和快中性分子(N_2f)的输运过程进行了研究,计算了阴极鞘层中离子(N₂⁺,N⁺)和快中性分子的能量及角分布的空间变化,较好地解释了实验结果.得到了氮气辉光放电等离子体阴极附近主要存在着能量较低的荷能分子、密度较低的高能原子离子及密度和能量居中的分子离子.诸粒子状态随放电条件而变化.模拟结 关键词：     

宏观放电参数对快原子态氮(N+,Nf)的影响

采用氮直流辉光放电等离子体中快电子和重粒子(N₂⁺,N⁺,N_f)混合的蒙特卡罗方法,模拟研究了快原子态粒子(N⁺,N_f)的产生率及轰击阴极的能量分布随宏观放电参数(P,V)的变化规律.结果表明,存在一最佳放电条件,使阴极壁处粒子(N⁺,N_f)的粒子数密度大且能量高;当电压大于800V时,轰击阴极的活性粒子(N⁺,N_f),主要由N₂⁺-N₂离解过程产生,电压小于300V时,主要由e^--N₂离解过程产生,模拟结果与实验结果相符合.     

大气等离子体中氮氧化物粒子行为的数值模拟

利用一个空间零维大气等离子体模型对其中的氮氧化物在不同电离度情况下的变化规律进行了数值模拟,得到了放电后不同初始电子密度下的氮氧化物(包括NO,NO⁺,NO₂,NO₂⁺,N₂O,N₂O⁺,NO₃和N₂O₅)及影响其产消的主要反应物N和O₃的密度随时间的演化规律.结果表明,电子初始密度n_e0=10⁹ cm^-3时,NO和NO₂的去除率较高,氮氧化物总密度较小,最适合消除氮氧化物污染.同时,还对N和O₃随电离度变化的行为进行了分析. 关键词： 大气等离子体 氮氧化物 电离度 数值模拟     

等离子体金属表面氮化中放电温度对氮原子态粒子的影响

采用快电子和重粒子(N₂⁺,N⁺,N_f)混合的Monte Carlo模型,研究了氮直流辉光放电等离子体金属表面氮化过程中.e-N_2s及N₂⁺-N_2s两种碰撞离解过程产生的原子态粒子(N⁺,N)的产生率和氮化粒子(N⁺,N_f)轰击靶表面的能量、粒子数密度及入射角分布随气体温度的变化规律.结果表明,使阴极靶处活性粒子(N⁺,N_f)的能量高且粒子数密度大,存在一个最佳放电温度;粒子(N⁺,N)的产生率及在靶表面的密度数都随着放电气体温度的升高而减少;有大量中性快原子N_f在工件表面小角入射,且粒子(N⁺,N_f)角分布受温度的影响很小.     

介质阻挡均匀大气压氮气放电特性研究

基于一维流体力学模型，对介质阻挡均匀大气压氮气放电特性进行了数值计算研究.模型中考虑了氮气中主要的电离、激发过程，所包含的粒子种类为e，N₂，N⁺₂，N⁺₄，N₂(a¹∑^-_u)，N₂(A³∑⁺_u).模拟结果显示，氮中的放电具有低气压下汤生放电的特性.放电电流幅度较小，放电过程中气体电压变化缓慢，电子密度远低于离子密度，而且最大值出现在阳极，电子不能在放电间隙中被俘获，不存在中性等离子体区，气体中的电场趋于线性变化.亚稳态N₂(A³∑⁺_u)和N₂(a¹∑⁺_u)在整个放电空间都具有非常高的密度，比电子密度高三个量级以上，亚稳态密度的最大值出现在阳极，这样的分布决定了放电的空间结构.放电所需的种子电子主要由亚稳态之间潘宁电离提供，这种机理使放电的电离水平较低，导致氮气中的放电只能是汤生放电.随着放电参数的变化，多电流峰放电也可在氮气中获得. 关键词： 大气压均匀放电 介质阻挡放电 数值模拟 氮气     

氮气射频放电与直流放电PIC/MC模拟的比较

建立氮气容性射频等离子体过程的PIC/MC模型,将模拟结果与直流放电进行比较.结果表明:射频等离子体粒子(e,N₂⁺,N⁺)的平均密度较直流放电约大-个量级,在射频电极附近粒子(e,N₂⁺,N⁺)的平均能量比直流放电阴极附近的能量低3倍左右;密度偏低的原子离子N⁺在两电极附近具较高的能量,能量较低的分子离子N₂⁺在放电空间具较高密度,N₂⁺的密度大约是N⁺的6倍;计算的电子能量几率分布与测量结果-致.     

H2对N2直流辉光放电电子行为的影响

通过用Monte Carlo方法模拟N₂-H₂ 混合气体直流辉光放电等离子体快电子行为，从不同H₂浓度的电子能量分布函数，电子密度以及e_f-N₂碰撞率等方面，研究了加H₂对氮辉光放电等离子体过程的影响. 研究结果表明: 随着H₂浓度的升高，电子的平均能量增加, 电子密度及e_f-N₂的各种非弹性碰撞率减小; 但在 关键词： 2-H₂辉光放电')" href="#">N₂-H₂辉光放电 Monte Carlo模拟 2碰撞率')" href="#">e-N₂碰撞率     

氧气空心阴极放电模拟

本文利用流体模型对气压为266 Pa的氧气环境下空心阴极放电的放电特性及不同粒子的生成损耗机制进行了模拟研究.模型中包含11种粒子和48个反应.在该模拟条件下,周围阴极所对应的负辉区产生重叠,表明放电中存在较强的空心阴极效应.计算得到了不同带电粒子与活性粒子的密度分布.带电粒子密度主要位于放电单元中心区域,电子和负氧离子O~-是放电体系中主要的负电荷,其密度峰值分别达到5.0×10¹¹ cm^-3和1.6×10¹¹ cm^-3;O₂~+是放电体系中主要的正电荷,其密度峰值为6.5×10¹¹ cm^-3.放电体系中同时存在丰富的活性氧粒子,并且其密度远高于带电粒子,按其密度高低依次为基态氧原子O、单重激发态氧分子O₂(a~1Δ_g)、激发态氧原子O(~1D)、臭氧分子O₃.对电子、O~-和O₂~+的生成和损耗的反应动力学过程进行了深入分析,同时给出了不同活性...     

正弦交流电压驱动低气压CO2放电特性的对比:DBD结构与裸电极结构

火星大气富含CO₂(～95%),对其原位利用具有重要的科学和经济价值.高压放电转化CO₂具有绿色环保、可控程度高、使用寿命长等优势,在火星CO₂资源原位转化利用方面具有应用潜力.本文模拟火星低气压条件下CO₂氛围,针对kHz交流电压驱动两种典型电极结构(有/无阻挡介质)的放电特性开展对比实验研究,并辅以数值仿真分析两种电极结构下CO₂放电产物及其转化途径.结果表明,引入阻挡介质后,由于介质表面累积电荷和空间电荷畸变电场导致放电从半周期单次放电转变为多脉冲放电,不同放电脉冲对应的放电通道随机产生.主要放电产物中,CO依赖阴极位降区边界处电子与CO₂附着分解反应产生,O₂大部分产生于瞬时阳极表面或瞬时阳极侧介质表面电子与CO₂~+复合分解反应.进一步发现,介质引入不改变二者产生位置和主导反应路径,但会降低阴极位降区边界处电子密度和电子温度,使CO产量有所减少;并降低放电功率,使到达瞬时阳极表面和瞬时阳极侧介质表面的C...     

Total Variation Diminishing technique in numerical simulation of Trichel corona in air

This paper deals with the numerical simulation of the Trichel pulse corona discharge in air under the room temperature and atmospheric pressure in the pin-plane configuration. A simplified drift-diffusion model of the discharge is considered with three species: electrons, positive and negative ions. The Total Variation Diminishing algorithm is used to stabilize the charge transport equations. The effect of the voltage level and the external circuit parameters on the average corona current, pulse frequency and pulse parameters are presented. The results of numerical predictions are compared with the experimental data.     

Review on ionization and quenching mechanisms of Trichel pulse

Trichel pulse is a kind of pulsed mode in negative DC corona discharge, which has attracted significant attention because of its considerable applications in industry. Over eighty years, plenty of effort including simulations and experiments has been spent to reveal the ionization and quenching mechanisms of Trichel pulse. By revisiting and summarizing the basic characteristics and well-accepted ionization and quenching mechanisms, this review provides a basic understanding and the current status of Trichel pulse.     

Numerical simulation and experimental validation of direct current air corona discharge under atmospheric pressure

Air corona discharge is one of the critical problems associated with high-voltage equipment. Investigating the corona mechanism plays a key role in enhancing the electrical insulation performance. An improved self-consistent multi-component two-dimensional plasma hybrid model is presented for the simulation of a direct current atmospheric pressure corona discharge in air. The model is based on plasma hydrodynamic and chemical models, and includes 12 species and 26 reactions. In addition, the photoionization effect is introduced into the model. The simulation on a bar-plate electrode configuration with an inter-electrode gap of 5.0 mm is carried out. The discharge voltage– current characteristics and the current density distribution predicted by the hybrid model agree with the experimental measurements. In addition, the dynamics of volume charged species generation, discharge current waveform, current density distribution at an electrode, charge density, electron temperature, and electric field variations are investigated in detail based on the model. The results indicate that the model can contribute valuable insights into the physics of an air plasma discharge.     

Numerical simulation and experimental validation of a direct current air corona discharge under atmospheric pressure

Air corona discharge is one of the critical problems associated with high-voltage equipment. Investigating the corona mechanism plays a key role in enhancing the electrical insulation performance. An improved self-consistent multi-component two-dimensional plasma hybrid model is presented for the simulation of a direct current atmospheric pressure corona discharge in air. The model is based on plasma hydrodynamic and chemical models, and includes 12 species and 26 reactions. In addition, the photoionization effect is introduced into the model. The simulation on a bar-plate electrode configuration with an inter-electrode gap of 5.0 mm is carried out. The discharge voltage-current characteristics and the current density distribution predicted by the hybrid model agree with the experimental measurements. In addition, the dynamics of volume charged species generation, discharge current waveform, current density distribution at an electrode, charge density, electron temperature, and electric field variations are investigated in detail based on the model. The results indicate that the model can contribute valuable insights into the physics of an air plasma discharge.     

Negative coronas: Low current mode – pulse mode transition

In the paper the results of experimental study of negative corona in a point – plane gap in a dust-free air flow at atmospheric pressure are presented. Both the low current mode (LCM) of the discharge and Trichel pulses are externally triggered by UV light. Close to the inception voltage of Trichel pulses short-duration current spikes appear besides the steady component of the LCM which indicates to the switch-on of Fowler-Nordheim type emission mechanism. At the inception voltage spike – Trichel pulse transition is recorded. The influence of dielectric layers at the cathode on the discharge parameters is discussed.     

多针电晕增强大气压辉光放电稳定性研究

利用多针电晕增强放电装置，在无气流和存在高速气流的情况下都得到了稳定的大气压辉光.通过纪录发光图片、电流-电压波形和伏安特性曲线的方法对影响放电稳定性的因素做了细致地研究，发现了在从电晕放电到辉光放电的过程中存在着过渡阶段，表现为出现带有直流成分的Trichel脉冲.气流速度、极板间距以及针尖锥度和凹坑曲率半径的匹配程度都对放电的稳定性和电流密度有着重要的影响. 关键词： 大气压辉光放电 多针电晕 等离子体     

Investigation of a single barrier discharge in submillimeter air gaps. Nonuniform field

Pulse characteristics of single barrier discharges as well as parameters of charges accumulated on the surface of a dielectric under the atmospheric pressure in the “needle-(0.1–2.0)-mm air gap-polymer barrier-plane” system are investigated. It is found experimentally that for the positive polarity of the needle, the voltage for the discharge initiation is higher than in the case of the negative polarity by ～25–35%. The reversal of the needle polarity from negative to positive increases the amplitude of the discharge current and the accumulated surface charge by ～1.5–3 times. For the positive polarity of the needle, the discharge is governed by a streamer mechanism, while for the negative polarity, the discharge is initiated by the formation of a single Trichel pulse. The single pulse regime is observed for the discharge current up to a certain electrode gap d _CR. For the positive needle and for air gap width d _air > d _CR ≈ 1.5 mm, a multipulse burst corona is formed, while for the negative needle and d _air > d _CR ≈ 0.9 mm, a damped sequence of Trichel pulses evolves in the system.     

针-板DBD微流注与微辉光交替生成的机理研究

在介质阻挡放电体系中产生辉光放电可以有效的提高放电体系产生高能电子的性能, 为等离子体化学反应提供更加丰富的活性粒子.本文对针-板介质阻挡放电体系下的放电模式进行了研究,实验发现放电正负半周期表现出不同的放电模式, 激励电压为3 kV时放电正负半周期分别为微流注放电和电晕放电(或者Trichel脉冲放电),激励电压为6 kV时放电正负半周期分别为微流注放电和微辉光放电.微辉光放电形貌具有与典型辉光放电相同的分层次放电结构, 分析了激励电压6 kV时的放电过程,认为足够强的阴极电场强度和裸露针状电极形成的有效的二次电子发射过程是形成微辉光放电的主要因素,绝缘介质层的存在避免了微辉光放电向弧光放电过渡.     

Parametric study of the characteristics of Trichel pulses in the needle-plane negative corona discharge in atmospheric air

A numerical study of the impact of different model coefficients on the frequency, DC current, and the rise time of the Trichel pulses in a needle-plane negative corona discharge is presented here. The studied coefficients include the coefficients of the ionization and attachment reactions, the mobilities of the three charged species considered in the model (electrons and positive and negative ions), and the coefficient of the secondary emission of electrons. The characteristics of the pulses were also studied using another set of model coefficients which includes an extended number of reactions such as detachment of the electrons from negative ions.     

Frequency response characteristics of trichel pulses and the behavior of the cathode spot in a negative corona discharge

A negative corona discharge in the regime of Trichel pulses has been investigated in air at atmospheric pressure. Correlation between the behavior of the cathode spot and oscillograms of the discharge current has been revealed. The frequency response characteristics of the negative corona current have been measured as functions of voltage, tip curvature, interelectrode distance, and cathode material. It has been determined that the curvature of the tip surface in the cathode-spot localization region decisively affects the amplitude of pulses.