Ultrashort-pulse laser ablation of indium phosphide in air

Ablation of indium phosphide wafers in air was performed with low repetition rate ultrashort laser pulses (130 fs, 10 Hz) of 800 nm wavelength. The relationships between the dimensions of the craters and the ablation parameters were analyzed. The ablation threshold fluence depends on the number of pulses applied to the same spot. The single-pulse ablation threshold value was estimated to be φ_th(1)=0.16 J/cm². The dependence of the threshold fluence on the number of laser pulses indicates an incubation effect. Morphological and chemical changes of the ablated regions were characterized by means of scanning electron microscopy and Auger electron spectroscopy. Received: 30 May 2000 / Accepted: 31 May 2000 / Published online: 23 August 2000     

Controlled process for polymer micromachining using designed pulse trains of a UV solid state laser

A flexible workstation equipped with a solid state laser operating at 266 nm wavelength was used to machine holes in polyethylene terephthalate, polyimide and polycarbonate. An optical pulse picker was employed to reduce the high repetition rates of the laser, while a breakthrough sensor was used to avoid over-drilling of through holes. For each material, different repetition rates and designed pulse trains were tested to improve feature quality and process efficiency. Although the three polymers had very different reactions at this wavelength they all showed an improvement in feature quality with decreasing repetition rate due to a reduction in thermal effects. Up to 10 kHz the average depth per pulse remained unchanged and afterwards a slight increase was observed but this was accompanied by large uncertainties. Bursts of pulses at 40 kHz inserted inside the low repetition rate pulse train reduced the drilling time and the amount of debris redeposited without affecting the feature quality. It was found that a number of cleaning pulses after perforation eliminates the heat affected zone around exits. Holes with entrance diameters below 20 μm and exit diameters as small as 2 μm were obtained with high repeatability.     

Laser heating and ablation at high repetition rate in thermal confinement regime

Laser heating and ablation of materials with low absorption and thermal conductivity (paint and cement) were under experimental and theoretical investigations. The experiments were made with a high repetition rate Q-switched Nd:YAG laser (10 kHz, 90 ns pulse duration and λ = 532 nm). High repetition rate laser heating resulted in pulse per pulse heat accumulation. A theoretical model of laser heating was developed and demonstrated a good agreement between the experimental temperatures measured with the infrared pyrometer and the calculated ones. With the fixed wavelength and laser pulse duration, the ablation threshold fluence of paint was found to depend on the repetition rate and the number of applied pulses. With a high repetition rate, the threshold fluence decreased significantly when the number of applied pulses was increasing. The experimentally obtained thresholds were well described by the developed theoretical model. Some specific features of paint heating and ablation with high repetition rate lasers are discussed.     

Surface ablation of lithium tantalate by femtosecond laser

We report measurements of the laser induced breakdown threshold in lithium tantalate with different number of pulses delivered from a chirped pulse amplification Ti: sapphire system. The threshold fluences were determined from the relation between the diameter D² of the ablated area and the laser fluence F₀. The threshold of lithium tantalite under single-shot is found to be 1.84 J/cm², and the avalanche rate was determined to be 1.01 cm²/J by calculation. We found that avalanche dominates the ablation process, while photoionization serves as a free electron provider.     

Crater geometry characterization of Al targets irradiated by single pulse and pulse trains of Nd:YAG laser in ambient air and water

High intensities laser pulses are capable to generate a crater when irradiating metal targets. In such condition, after each irradiation significant ablation occurs on the target surface and as a result a crater is formed. The crater characterization is very important specifically for some applications such as micromachining. In this paper, the crater formation in metal targets was studied experimentally. The planar aluminum 5052 targets were irradiated by frequency doubled (532 nm), Q-switched Nd:YAG (∼6 ns) laser beam in ambient air and distilled water. A crater was produced after each irradiation and it was characterized by an optical microscope. Different laser intensities as well as pulse trains were applied for crater formation. The effects of laser characteristics in crater geometry were examined. The depth of the craters was measured by optical microscope and the diameter (width) was characterized by processing of the crater image. The results were explained in terms of ablation threshold and plasma shielding. The results show that the crater geometry extremely depends on the laser pulse intensity, the number of laser pulses, and ambient.     

Synthesis of cation-exchanged laponite suspensions by laser ablation of microsized-metal particles in liquid

Laser ablation in the liquid technique has been used to synthesize cation-exchanged laponite suspensions. In summary, laser ablation of the microsize-metal powder (Co, Al, and Cu) dispersed in an aqueous solution containing deionized water laponite crystals was carried out using laser beam generated by a single-mode, Q-switched Nd-Yag laser operating at 532 nm with a pulse duration of 5.5 ns and 10 Hz repetition rate. Laser fluence was 0.265 J/cm² for all tests. For all samples, the mass fraction of laponite was 1%. General observations of the prepared samples indicated that an aqueous suspension of 1 wt% laponite retained its free flowing liquid phase characteristics even after aging for several weeks. When bivalent cationic metals (Cu, Co, Al) were ablated in it for about 1 h, even with a small amount of the metal (0.025% and 0.050%) were generated, the suspension became highly viscous and behaved as a shear-thinning and thixotropic material. That is, the suspension gelled strongly when it was allowed to rest. The gels, however, could easily be reverted to a low viscosity liquid with simple shaking. Information from TEM and XRD analysis indicated that such a sol-gel transformation might be due to the charge exchange between the cationic species produced during the laser ablation and the sodium ions in the interlayers of the clay sheets.     

Measurements of nanoparticle size distribution produced by laser ablation of tungsten and boron-carbide in N2 ambient

Nanoparticles (NPs) were produced by ablating tungsten and boron-carbide (B₄C) target materials in atmospheric pressure nitrogen ambient using ArF excimer laser pulses. The size distributions of the NPs formed during the ablation were monitored—within a 7-133 nm size window—by a condensation particle counter connected to a differential mobility analyzer. The laser repetition rate was varied between 1-50 Hz, and the fluence was systematically changed in the range of 0.5-15 J/cm², for both materials, allowing a comparative study in an extended laser parameter regime. The multishot ablation threshold (Φ_th) of B₄C was determined to be ∼1.9 J/cm² for the laser used (ArF excimer, λ = 193 nm). Similarly to earlier studies, it was shown that the size distributions consist of mainly small nanoparticles (<∼20 nm) attributed to a non-thermal ablation mechanism below Φ_th. An additional broad peak appears (between 20 and 40 nm) above Φ_th as a consequence of the thermally induced macroscopic ablation. Chemical composition of deposited polydisperse nanoparticles was studied by X-ray photoelectron spectroscopy showing nitrogen incorporation into the boron-carbide.     

UV laser irradiation of IR laser generated particles ablated from nitrobenzyl alcohol

Particles generated by 2.94 μm pulsed IR laser ablation of liquid 3-nitrobenzyl alcohol were irradiated with a 351 nm UV laser 3.5 mm above and parallel to the sample target. The size and concentration of the ablated particles were measured with a light scattering particle sizer. The application of the UV laser resulted in a reduction in the average particle size by one-half and an increase in the total particle concentration by a factor of nine. The optimum delay between the IR and UV lasers was between 16 and 26 μs and was dependent on the fluence of the IR laser: higher fluence led to a more rapid appearance of particulate. The ejection velocity of the particle plume, as determined by the delay time corresponding to the maximum two-laser particle concentration signal, was 130 m/s at 1600 J/m² IR laser fluence and increased to 220 m/s at 2700 J/m². The emission of particles extended for several ms. The observations are consistent with a rapid phase change and emission of particulate, followed by an extended emission of particles ablated from the target surface.     

Efficient lasing action from Rhodamine-110 (Rh-110) impregnated sol-gel silica samples prepared by dip method

Rhodamine-110/sol-gel samples are prepared by sol-gel technique using dip method. Concentration dependent photophysical studies of these samples have indicated about the least possibility of aggregate formation. The lasing action of Rh-110 in silica samples is studied as a function of dye concentration. An efficient laser emission is observed when the samples are transversely pumped at 337.1 nm and 1.5 Hz repetition rate using a nitrogen laser (400 μJ energy/pulse and 4 ns pulse duration). The maximum of 166% laser efficiency of dye doped sol-gel samples compared to Rhodamine-6G (Rh-6G) in methanol is achieved. The photostability is also measured by using N₂ laser at 1 Hz and it is found nearly 165 pulses. The possible reasons for the photodegradation of the dye molecules are discussed in detail.     

Femtosecond pulsed laser ablation of diamond-like carbon films on silicon

Femtosecond pulsed laser ablation (τ = 120 fs, λ = 800 nm, repetition rate = 1 kHz) of thin diamond-like carbon (DLC) films on silicon was conducted in air using a direct focusing technique for estimating ablation threshold and investigating the influence of ablation parameter on the morphological features of ablated regions. The single-pulse ablation threshold estimated by two different methods were ?_th(1) = 2.43 and 2.51 J/cm². The morphological changes were evaluated by means of scanning electron microscopy. A comparison with picosecond pulsed laser ablation shows lower threshold and reduced collateral thermal damage.     

Laser-induced ablation and crater formation at high laser flux

Laser ablation and crater formation have been studied on a copper target using a 10 Hz Nd:YAG laser system delivering pulses up to 100 mJ in 40 ps with a flux on target F?≤?5000 J/cm². Crater dimensions were measured using optical microscope or scanning electron microscope. In order to understand the process of crater formation, we considered various theoretical models present in the literature and revised them taking into account the occurrence of plasma phenomena, which are important at the intensities used in this experiment. We also compared our experimental results with other results obtained at the PALS laboratory, using a 0.44 μm wavelength laser and much higher laser intensities. Finally, we explore the possibility of extending the information derived from laser-produced craters to other types of craters.     

Laser fluence, repetition rate and pulse duration effects on paint ablation

The efficiency (mm³/(J pulse)) of laser ablation of paint was investigated with nanosecond pulsed Nd:YAG lasers (λ = 532 nm) as a function of the following laser beam parameters: pulse repetition rate (1-10,000 Hz), laser fluence (0.1-5 J/cm²) and pulse duration (5 ns and 100 ns). In our study, the best ablation efficiency (η ≅ 0.3 mm³/J) was obtained with the highest repetition rate (10 kHz) at the fluence F = 1.5 J/cm². This ablation efficiency can be associated with heat accumulation at high repetition rate, which leads to the ablation threshold decrease. Despite the low thermal diffusivity and the low optical absorption of the paint (thermal confinement regime), the ablation threshold fluence was found to depend on the pulse duration. At high laser fluence, the ablation efficiency was lower for 5 ns pulse duration than for the one of 100 ns. This difference in efficiency is probably due to a high absorption of the laser beam by the ejected matter or the plasma at high laser intensity. Accumulation of particles at high repetition rate laser ablation and surface shielding was studied by high speed imaging.     

Investigation of plumes produced by material ablation with two time-delayed femtosecond laser pulses

We experimentally investigated and herewith reported the results of laser ablation of copper and gold with two time-delayed femtosecond laser pulses at 800 nm in vacuum. The ablation plume dynamic was monitored by fast plume imaging and time- and space-resolved optical emission spectroscopy. Optical microscopy was used to follow the ablation depth as a function of the delay between the two laser pulses. Nanoparticles deposition on mica substrates was analysed by atomic force microscopy.We estimate roughly the plume's atomization degree - that is the mass fraction of atomized material over the total ablated mass - from the relative intensities of radiation emitted from atoms and nanoparticles. It is shown that the atomization degree depends critically on the time delay between both laser pulses and on the characteristic time of electron-lattice relaxation. The increase of the atomization degree is accompanied by the decrease of the ablation depth. Atomic force microscopy measurements confirm the partial atomization of nanoparticles, as the analyses of particle deposition on mica substrates show a large decrease of the number of nanoparticles for large delay between the two pulses.     

Elimination of cracking during UV laser ablation of SrTiO3 single crystals by employing a femtosecond laser

We have performed a comparative study of UV laser ablation of SrTiO₃ with nanosecond- and sub-picosecond sources, respectively. The experiments were performed with lasers at a wavelength of 248 nm and pulse durations of 34 ns and 500 fs. Femtosecond ablation turns out to be more efficient by one order of magnitude and eliminated the known problem of cracking of SrTiO₃ during laser machining with longer pulses. In addition, the cavities ablated with femtosecond pulses display a smoother surface with no indication of melting and well-defined, sharp edges. These effects can be explained by the reduced thermal shock effect on the material by using ultrashort pulses.     

Effect of low-threshold air breakdown on material ablation by short laser pulses

Ablative formation of channels in steel by picosecond and nanosecond pulses of Nd lasers was studied. It was found that significant screening of the incident energy (up to 80–90%) in this pulse duration range is caused by breakdown of air contaminated with ablated microparticles. The breakdown threshold, size of particles, and time of their settling down were estimated. It was shown that this kind of plasma screening results in a decrease in the ablation rate and significant channel widening. Practical approaches to eliminate the low-threshold breakdown induced by microparticles were proposed and implemented. These approaches are based on experimental results of the study of the dependences of laser ablation on the pressure and repetition rate. It was shown that a moderate decrease in the pressure below 300–400 mbar makes it possible to avoid screening. In high-repetition-rate ablation, it was found that values above several kilohertz correspond to quasi-vacuum conditions in the ablation spot.     

Q-switched fiber laser by all-fiber piezoelectric modulation and pulsed pump

We have demonstrated a Q-switched fiber laser based on a mechanical all-fiber Q-switching module and pulsed-pump configuration. A piezoelectric actuator was utilized in the module to change the round-trip loss of the fiber laser cavity, and exploited the pulsed pump to prevent the multiple pulsing phenomena. Q-switching pulses were successfully achieved at the repetition rates from 1 Hz to 2 kHz, and the average output power was 11 mW. The peak power in excess of 114 W with associated pulse width of 193 ns was obtained at the repetition rate of 500 Hz. Besides preventing multiple pulsing phenomena, pulsed-pump configuration can also suppress amplified spontaneous emission and increase pulse stability and peak power simultaneously.     

Comparison of the laser ablation process on Zn and Ti using pulsed digital holographic interferometry

Pulsed digital holographic interferometry has been used to compare the laser ablation process of a Q-switched Nd-YAG laser pulse (wavelength 1064 nm, pulse duration 12 ns) on two different metals (Zn and Ti) under atmospheric air pressure. Digital holograms were recorded for different time delays using collimated laser light (532 nm) passed through the volume along the target. Numerical data of the integrated refractive index field were calculated and presented as phase maps. Intensity maps were calculated from the recorded digital holograms and are used to calculate the attenuation of the probing laser beam by the ablated plume. The different structures of the plume, namely streaks normal to the surface for Zn in contrast to absorbing regions for Ti, indicates that different mechanisms of laser ablation could happen for different metals for the same laser settings and surrounding gas. At a laser fluence of 5 J/cm², phase explosion appears to be the ablation mechanism in case of Zn, while for Ti normal vaporization seems to be the dominant mechanism.     

Synthesis of nanosized particles during laser ablation of gold in water

In this paper we report the formation of gold nanoparticles during laser ablation of gold target in water in the absence of any additives. The experiments were carried out by using the radiation of the pulsed Nd:YAG laser, operating at the second (532 nm, 10 ns, 10 Hz), or the fourth harmonic (266 nm) wavelengths. The properties of the nanoparticles were found to be susceptible to the additional 532 and 266 nm laser irradiation. It has been established that both the mean size of the nanoparticles and their stability could be varied by proper selection of the parameters of laser ablation and postirradiation such as laser fluence and wavelength combinations.     

Graphene-based passively Q-switched 2 μm thulium-doped fiber laser

We demonstrated stable pulses generation at 2 μm in a passively Q-switched thulium-doped fiber laser using a few layer graphene thin film. The maximum output power was 4.5 mW and the single pulse energy was 85 nJ at 53 kHz repetition rate, and the pulse width was about 1.4 μs. The pulse width and the repetition rate of the Q-switched fiber laser can be changed along with the pump power. To the best of our knowledge, this is the first report of graphene saturable absorber for passively Q-switched 2 μm fiber lasers.