Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region

The efficiency of an ion-etched laminar holographic grating was measured at near-normal incidence in the 14.5-16.0-nm wavelength range. The grating had an electron-beam-evaporated Mo/Si multilayer coating matched to the grating groove depth. The efficiency peaked at 16.3% in the first inside order at 15.12 nm and 15.0% in the first outside order at 14.94 nm. These are believed to be the highest efficiencies obtained to date from a multilayer-coated laminar grating at near-normal incidence in the EUV (lambda<30.0nm) . Zero and even orders were almost completely suppressed. The grating groove efficiency in the first order approached the theoretical limit of 40.5%.     

MoRu-Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength

A MoRu-Be multilayer coating was applied to a diffraction grating to enhance the grating's normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8 nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37 nm.     

High spectroscopic qualities in blazed ion-etched holographic gratings

Blazed ion-etched holographic gratings with a high absolute diffraction efficiency, good diffracted wavefront, high resolution, and low stray light have been produced. The performances were proved to be the same as, or superior to, commercially available blazed gratings produced by a ruling technique.     

High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

We describe a simple method to fabricate blazed gratings used in the extreme ultraviolet wavelength region. The method uses an argon and oxygen mixed-gas ion beam to directly etch the grating substrate through a rectangular profile photoresist grating mask. With this method the etched grating groove profile can be well controlled. An Mo/Si multilayer-coated specimen with a blaze angle of 1.9 degrees was fabricated and measured. At an incident angle of 10 degrees and a wavelength of 13.62 nm, the diffraction efficiency of the negative second order reaches 36.2%.     

1000线/毫米软X射线自支撑闪耀透射光栅的设计与制作

基于标量衍射理论讨论了软X射线自支撑闪耀透射光栅的特性并设计了光栅的结构参数. 采用全息光刻和湿法腐蚀技术, 成功制作了周期1 μm、占空比0.1---0.2、高宽比约100、栅线厚度10 μm、 有效面积比为65%的自支撑闪耀透射光栅. 单元尺寸为15mm× 15mm的硅绝缘体上含有四个5 mm× 5 mm的自支撑闪耀透射光栅窗口. 在国家同步辐射实验室检测了该光栅在5---50 nm波长范围内的衍射效率. 波长扫描测量结果表明, 闪耀效应明显地发生在类似镜面的光栅侧壁镜面反射方向上, 闪耀级次位置及其特征与标量理论预测的一致. 衍射效率的实测结果基本与理论模拟符合, 只是因光栅结构上的缺陷致使衍射效率偏低, 峰值只有理论值的38---49%. 实验结果证明了闪耀透射光栅的概念和湿法制作工艺的可行性.     

二元光学液晶闪耀光栅的特性分析

在二元光学理论的基础上,结合波动光学理论和液晶指向矢的计算提出一种新的二元光学液晶闪耀光栅设计.对液晶光栅电极施加阶梯分布的电压使之形成相位阶梯形分布,推导出液晶闪耀光栅的衍射效率.结果表明,通过改变周期单元光栅电极数日而改变光栅常数,可以改变光衍射角度,一级衍射角度调节范围0°～10°;调节电极电压可以使特定级次衍射光效率达到90%以上,使该级次得到闪耀.     

闪耀光栅的二元近似结构

摘要利用闪耀光栅的特点可制作高效的波导耦合器。采用时域有限差分法(FDTD)方法，模拟计算了二元闪耀光栅的一阶衍射效率和衍射角随光栅不同结构参数而变化的相关特征，所得结果对实际二元闪耀光栅的制备有重要参考价值。     

Formation of blazed holographic gratings

Various methods for the recording of blazed holographic diffraction gratings are presented and the regions in the wavelength-groove density plane for which they can be used are shown. The gratings are made in the positive photoresist Shipley AZ-1350. The diffraction efficiency for s and p polarization was measured as a function of wavelength and angle of incidence. An absolute efficiency of 80% was achieved.     

大角带宽高衍射效率体全息光栅的设计和制备

高性能体全息光栅是全息波导的重要耦合元件,角带宽小、平均衍射效率不高是制约体全息光栅性能的重要因素。以不对称倾斜记录为出发点,设计并制备了大角带宽高衍射效率的体全息光栅。首先讨论在横电模式光和横磁模式光下体全息光栅的记录参数与其衍射效率的关系,找到平均衍射效率较高的记录参数范围,随后进一步分析在此范围内的记录参数与体全息光栅的角带宽的关系,从而确定获得大角带宽高衍射效率体全息光栅的最佳记录参数。实验结果表明:在参考光入射角度为25°、信号光入射角度为30°时,制备的体全息光栅的角带宽达到±14°,衍射效率为82%。     

投影系统中DMD衍射效率的研究北大核心CSCD

数字微镜阵列(DMD)作为空间调制元件常用于投影光学系统,入射光为长波红外时产生的衍射效应会影响进入系统的能量分布,该文主要讨论光源入射角度对衍射效应的影响,将DMD作为闪耀光栅模型,研究其在长波红外波段产生的衍射效应。从光程差的角度分析在主、副对角线分别处于“开态”情况下的衍射效应,发现衍射效应与入射角度有关;将DMD作为闪耀光栅模型,采用矢量衍射理论计算7.7μm~9.5μm波段下DMD处于“开态”下的衍射效率。计算结果表明:当TM偏振光以44°角照射时,1级衍射达到闪耀状态,衍射效率可达到70%。     

亚波长闪耀光栅矢量衍射效率计算

将矢量衍射数值算法—严格耦合波分析用于精确计算亚波长闪耀光栅的衍射效率,并分析其衍射特性。建立了闪耀光栅的电磁介质模型,并将楔形不规则结构简化为多层矩形光栅结构,通过电磁场的介质分布建立严格耦合波方程。根据边界条件求解出各层的电磁场分布,再通过增透矩阵方法将各层电磁场依次迭代,求解出了整个结构的衍射效率。计算分析显示,对闪耀角为11.3°、周期为500 nm的金属铝闪耀光栅可以得到高于90%的衍射效率和相应的闪耀级次。实验表明这种矢量衍射数值算法具有较高的准确性,可以推广应用于高致密刻线复杂光栅的衍射计算分析。     

利用铌酸锂晶体制作体全息光栅的设计性实验

利用双光束干涉,通过控制双光束的记录角度,在铌酸锂晶体中写入光折变体全息布拉格光栅.将该光栅应用于光通信系统中作为滤波器使用,利用ASE光源和光谱仪对其进行测试,在1 548nm波长处获得了峰值半高全宽为4nm,衍射效率为10%的滤波效果.     

Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings

We introduce a new structural cutoff beyond which subwavelength gratings cease to behave as homogeneous media and discuss its effects on the proper selection of the sampling periods of subwavelength diffractive elements. According to this analysis, a 3lambda-period blazed binary grating composed of square pillars is designed for He-Ne operation and is fabricated by etching of a TiO>(2) layer deposited upon a glass substrate. Its first-order measured diffraction efficiency is 12% larger than the theoretical efficiency of an ideal blazed échelette grating in glass with the same period.     

Diffraction efficiency of holographic blazed diffraction gratings

Holographic blazed diffraction grating is analysed as a periodic relief of an inclined sinusoidal curve in the shallow profile approximation. Under the condition that the rate of the development is a linear function of the development dose the evolution of the relief during the development is discussed. Theoretical curves of diffraction efficiency are compared with measurements on gratings made by direct holographic method for uv spectral region.     

局域体全息光栅衍射的平面波与柱面波的波前转换研究

利用一维耦合波理论研究了入射方向相互垂直的一束平面波与一束柱面波干涉形成光折变局域体全息光栅的波前转换情况。给出了透射波和衍射波振幅的解析表达式。讨论了该局域体全息光栅的几何尺寸以及全息透镜的焦距对光栅衍射效率的影响。结果表明,随着光栅横向尺寸的增加,光栅的衍射效率也逐渐增加。然而,光栅的衍射效率却随着光栅纵向尺寸的增加而减小。全息透镜的焦距越长,光栅的衍射效率也越大。此外,分析了光栅的布拉格选择特性,该光栅具有非常好的角度选择特性。在平面波与柱面波干涉形成全息透镜的设计中,为了获得最优的衍射效率,应当根据要求合理地选择记录所用柱面波和设计光栅的几何尺寸。     

高损伤阈值矩形石英闪耀光栅的设计分析

 采用模态法分析了矩形亚波长石英闪耀光栅的设计原理,给出了1.06 μm工作波长的矩形亚波长石英闪耀光栅的设计示例。研究表明,要设计性能优良的-1级透射闪耀光栅,应使0/1阶传输模的累积相位差为π的奇数倍。设计的透射闪耀光栅能够使TM偏振光和TE偏振光获得近100%的-1级衍射效率,且具有较大的加工容差,较宽的入射波长和入射角变化适应范围。     

Femtosecond laser-induced blazed periodic grooves on metals

In this Letter, we generate laser-induced periodic surface structures (LIPSSs) on platinum following femtosecond laser pulse irradiation. For the first time to our knowledge, we study the morphological profile of LIPSSs over a broad incident angular range, and find that the morphological profile of LIPSSs depends significantly on the incident angle of the laser beam. We show that LIPSS grooves become more asymmetric at a larger incident angle, and the morphological profile of LIPSSs formed at an incident angle over 55° eventually resembles that of a blazed grating. Our study suggests that the formation of the blazed groove structures is attributed to the selective ablation of grooves through the asymmetric periodic surface heating following femtosecond pulse irradiation. The blazed grooves are useful for controlling the diffraction efficiency of LIPSSs.     

共振域矩形介质光栅的逆向设计

采用模态法研究了共振域光栅分束器及闪耀光栅等光学器件的设计原理及逆向设计方法,给出了-1级非偏振闪耀光栅的典型设计示例。研究表明,自准直角入射时,光束在光栅内传输将激发产生离散模,通过调节离散模透过光栅传输时的累积相位差,可对衍射光进行调控,实现偏振(非偏振)分束、偏振(非偏振)闪耀等功能。采用严格耦合波法对基于模态法逆向设计的-1级非偏振石英闪耀光栅的几何参数进行验证,计算结果显示两者非常吻合,证明了该方法的正确性。     

High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm

We propose the use of high-index materials for the fabrication of subwavelength diffractive components operating in the visible domain. This approach yields a reduction of fabrication constraints and an improvement of theoretical performance. A blazed grating with subwavelength binary features and with a period of 5.75 wavelengths is designed and fabricated in a TiO(2) layer coated upon a glass substrate. The first-order diffraction efficiency measured with a He-Ne laser beam is 83%, which is slightly larger than that achieved theoretically by the best standard (continuous profile) blazed grating fabricated in glass with the same period.     

小角度衍射噪声光栅滤波方法研究

针对因衍射等原因引起的小角度差光噪声信号,探讨了利用闪耀光栅的2级闪耀,实现角度差放大,提高空间低通滤波器适应性的滤波新方法。理论分析和模拟仿真表明,对于小于5°的角度差,可实现3倍以上放大。放大所需闪耀光栅的频率与入射单色波长成反比,波长越长,所需光栅频率越低。与正的斜入射角相比,负斜入射角度差的放大倍数更大。当负斜入射角超过一定值时,会因为全反射角的限制而导致斜入射2级闪耀不存在,只保留了有效信号的2级闪耀,滤波效果更好。