Characteristics of laser-produced Ge ion fluxes used for modification of semiconductor materials

This paper describes the laser generation of Ge ion fluxes and their application to the modification of semiconductor materials by ion implantation. The Ge ions were produced by ablating solid targets using the PALS high-power iodine laser system at the PALS Research Centre in Prague, operating at its third harmonic frequency (438 nm wavelength) and producing 0.4 ns pulses with energy up to 0.25 kJ (intensity≤10¹⁵ W/cm²). The goal of these investigations was optimisation of the implantation of low and medium energy laser-generated Ge ion fluxes and they were carried out as part of the project PALS000929. Recently, a new repetitive pulse laser system at IPPLM in Warsaw, with a wavelength of 1.06 μm, energy of ～0.8 J in a 3.5 ns-pulse, repetition rate of up to 10 Hz, and intensity on target of up to 10¹¹ W/cm², has also been employed to produce Ge ions by irradiating solid targets. The laser-generated ions were investigated with diagnostics based on the time-of-flight method: various ion collectors and an electrostatic ion-energy analyzer. The Ge ion fluxes were implanted into Si and SiO₂ substrates located at distances of 10–30 cm from the target. The SiO₂ films were prepared on single crystal Si substrates and were implanted with Ge ions with different properties. The properties of the Ge-implanted layers, in particular, the depth distributions of implanted Ge ions, were characterised using Rutherford backscattering and other material surface diagnostic methods.     

Measurement of ablative laser propulsion parameters for aluminum, Co–Ni ferrite and polyurethane polymer

Laser ablation propulsion is a form of beam-powered propulsion in which a pulsed laser ablates a target material thus producing thrust. We report in this work the measurements of various parameters related to laser-induced micropropulsion in toluene diisocyanate-based polyurethane polymer, aluminum and Co–Ni ferrite. The targets were irradiated by a Q-switched pulsed Nd–YAG laser at 1064 nm (pulse duration 5 ns) under atmospheric conditions. A contact-free optical triangulation method was used to measure the laser ablation induced thrust in the samples. The measurements and calculations depict that Co–Ni ferrite is better in terms of critical propulsion parameters C _m and I _sp. It has been observed that the propulsion parameters depend on the energy per pulse of the incident laser beam.     

Ion and X-ray techniques used for study of laser-produced plasmas

This review article describes apparatus for ion and X-ray diagnostics, which were used in experimental studies of laser-produced plasmas performed by the IPPLM's team in collaboration with other researchers at IPPLM and PALS Research Centre in Prague (the Czech Republic). The investigations of expanding laser-produced plasma properties in dependence on laser beam parameters were done by means of ion diagnostics devices: ion collectors (ICs), cylindrical ion energy analyzer (IEA) and the mass spectrograph of the Thomson type. At IPPLM, different types of detectors have been developed for measurement of X-ray emission. Properties of laser-produced beams of ions and X-ray radiation were analysed in the cooperative experiments performed with the use of a high-energy iodine laser PALS at the PALS Research Centre ASCR in the Czech Republic and the low-energy repetitive laser at IPPLM.     

RBS analysis of ions implanted in light substrates exposed to hot plasmas laser-generated at PALS

Ge and Ta ion implantation of silicon and carbon substrates has been obtained at PALS Research Laboratory in Prague by using laser pulses of 400 ps duration, 438 nm wavelength, 10^14?16 W/cm² intensity. Substrates were exposed in vacuum at different distances from the target and at different angles with respect to the normal to the target surface. ‘On line’ measurements of ion energy were obtained with time-of-flight techniques by using an electrostatic deflector as ion energy analyzer. ‘Off line’ measurements of ion energy were obtained by Rutherford backscattering spectrometry (RBS) of 2.25 MeV He²⁺ beam at CEDAD Laboratory of Lecce University. The RBS spectra have given the depth profiles of the ion-implanted species and the implanted doses as a function of the laser intensity, angular position and target distance. A spectra deconvolution method based on the ion stopping power in the substrate matrix was applied in order to evidence the energy of the implanted ions. Measurements indicate that ions with energy ranging between 100 keV and 10 MeV and dose of the order of 10^14?16/cm² are implanted and that the process of ion implantation occurs mainly in substrates placed at little angles with respect to the normal to the target surface. Only a thin film deposition occurs for substrates placed at large angles with respect to the normal direction. Results indicate that the ion energies measured with the ‘on line’ and the ‘off line’ techniques are in good agreement.     

Correlation of highly charged ion and X-ray emissions from the laser-produced plasma in the presence of non-linear phenomena

Flux of X-ray radiation emitted from the Ta plasma, produced by the fundamental (1ω) and the third harmonic (3ω) frequencies of the high-power iodine laser PALS, was studied in dependence on the laser focus position. One or two (three) maxima, corresponding to the hard or soft component of the emitted spectrum, can appear, according to the experimental conditions. These dependencies are compared with those published by other authors, and also with our results concerning the highly charged ion generation. At laser intensities above I _L～ 10¹⁴ W/cm², the participation of non-linear processes in the pre-formed plasma was confirmed.     

Laser-induced ablation and crater formation at high laser flux

Laser ablation and crater formation have been studied on a copper target using a 10 Hz Nd:YAG laser system delivering pulses up to 100 mJ in 40 ps with a flux on target F?≤?5000 J/cm². Crater dimensions were measured using optical microscope or scanning electron microscope. In order to understand the process of crater formation, we considered various theoretical models present in the literature and revised them taking into account the occurrence of plasma phenomena, which are important at the intensities used in this experiment. We also compared our experimental results with other results obtained at the PALS laboratory, using a 0.44 μm wavelength laser and much higher laser intensities. Finally, we explore the possibility of extending the information derived from laser-produced craters to other types of craters.     

A “comb” structure measurement of a micrometer displacement in laser plasma propulsion

A “comb” structure of beam intensity distribution is achieved to measure target displacements at the micrometer level in laser plasma propulsion experiments. Compared with single-beam and double-beam detection, the “comb” structure is more suitable for a thin film targets with a velocity lower than 10^?2 m/s. Combined with a light-electric monitor, the “comb” structure can be used to measure a velocity range from 10^?3 to 1 m/s. Using this “comb” structure, the coupling coefficient of aluminum ablated by nanosecond pulse laser in air is determined and compared. The results indicate that this “comb” structure is an effective experimental approach.     

Experimental results of DPIS with a new RFQ

We have developed a new heavy ion production system which uses a combination of an RFQ and a laser ion source. Induced plasma by a laser shot is delivered to the RFQ without an extraction electrode. We named this new idea ‘direct plasma injection scheme (DPIS)’. In 2004, a new RFQ was built for demonstrating the capability of the DPIS. After a few months of commissioning period, we could obtain more than 60 mA of carbon beam from the RFQ. This new scheme could be applied to cancer therapy facilities and high energy nuclear physics accelerator complexes.     

Proton beam generation by ultra-high intensity laser–solid interaction

We report on some recent experimental results on proton production from ultra-intense laser pulse interaction with thin aluminium and plastic foil targets. These results were obtained at Laboratoire d'Optique Appliquée with the 100 TW ‘salle jaune’ laser system, delivering 35 fs laser pulses at 0.8 μm, reaching a maximum intensity on target of a few 10¹⁹ W/cm².

In such extreme interaction conditions, an intense and collimated relativistic electron current is injected from the plasma created on the laser focal spot into the cold interior of the target. Its transport through dense matter, ruled by both collisions and self-induced (electro-magnetic) field effects, is the driving mechanism for proton acceleration from the rear side of thin foils: when reaching and leaving the foil rear-side, the fast electrons create a large charge separation and a huge electrostatic field with a maximum value of few TV/m, capable of accelerating protons.

A parametric study as a function of the laser driver and target parameters indicates an optimal value for target thickness, which strongly depends on the laser prepulse duration. In our experiments, we did irradiate targets of various materials (CH, Al, Au) changing the prepulse duration by using fast Pockels cells in the laser chain. CR-39 nuclear track detectors with Al filters of different thickness and a Thomson parabola were used to detect proton generation. The best results were obtained for 2 μm Al targets, leading to the generation of proton energies with energies up to 12 MeV.     

Characteristics of laser and current pulses in a He–SrCl2 vapor laser

An experimental investigation on the characteristics of laser and current pulses in a He–SrCl₂ vapor laser is carried out. The temporal dependences of the discharge current pulse on the laser pulses at the 1.09 μm, ～3 μm and 6.45 μm lines in strontium atoms and ions are measured and analyzed under different laser output powers. It is found that all laser pulses appear at the falling edge of the current pulse and shift forward to the current pulse with increasing laser output power.     

Ion implantation induced by Cu ablation at high laser fluence

High energy laser plasma-produced Cu ions have been implanted in silicon substrates placed at different distances and angles with respect to the normal to the surface of the ablated target. The implanted samples have been produced using the iodine high power Prague Asterix Laser System (PALS) using 438 nm wavelength irradiating in vacuum a Cu target. The high laser pulse energy (up to 230 J) and the short pulse duration (400 ps) produced a non-equilibrium plasma expanding mainly along the normal to the Cu target surface. Time-of-flight (TOF) technique was employed, through an electrostatic ion energy analyzer (IEA) placed along the target normal, in order to measure the ion energy, the ion charge state, the energy distribution and the charge state distribution. Ions had a Boltzmann energy distributions with an energy increasing with the charge state. At a laser fluence of the order of 6 × 10⁶ J/cm², the maximum ion energy was about 600 keV and the maximum charge state was about 27+.In order to investigate the implantation processes, Cu depth profiles have been performed with Rutherford backscattering spectrometry (RBS) of 1.5 MeV helium ions, Auger electron spectroscopy (AES) with 3 keV electron beam and 1 keV Ar sputtering ions in combination with scanning electron microscopy (SEM). Surface analysis results indicate that Cu ions are implanted within the first surface layers and that the ion penetration ranges are in agreement with the ion energy measured with IEA analysis.     

Temperature measurements in plasmas generated by using lasers at different intensities

The temperature of laser-generated pulsed plasmas is an important property that depends on many parameters, such as the particle species and the time elapsed from the laser interaction with the matter and the surface characteristics.

Laser-generated plasmas with low intensity (<10¹⁰ W/cm²) at INFN-LNS of Catania and with high intensity (>10¹⁴ W/cm²) in PALS laboratory in Prague have been investigated in terms of temperatures relative to ions, electrons, and neutral species. Time-of-flight (ToF) measurements have been performed with an electrostatic ion energy analyzer (IEA) and with different Faraday cups, in order to measure the ion and electron average velocities. The IEA was also used to measure the ion energy, the ion charge state, and the ion energy distribution.

The Maxwell–Boltzmann function permitted to fit the experimental data and to extrapolate the ion temperature of the plasma core.

The velocity of the neutrals was measured with a special mass quadrupole spectrometer. The Nd:Yag laser operating at low intensity produced an ion temperature core of the order of 400 eV and a neutral temperature of the order of 100 eV for many ablated materials. The ToF of electrons indicates the presence of hot electron emission with an energy of ～1 keV.     

机载大气探测激光雷达人眼安全分析

 依据美国ANSI标准,模拟计算了0~12 km的高度范围内不同的激光束发散角和不同激光脉冲能量比例的532和1 064 nm激光脉冲人眼安全最大阈值能量。给出两种532和1 064 nm激光脉冲人眼安全最大阈值能量分配方案：(1)激光束发散角为0.3 mrad且532与1 064 nm的激光脉冲最大阈值能量之比为1∶2;（2）激光束发散角为0.4 mrad且532与1 064 nm的激光脉冲最大阈值能量之比为1∶1。分析了用这两种激光脉冲人眼安全最大阈值能量分配方案探测模式大气时所对应的信噪比。分析结果表明：这两种方案既能保证机载激光雷达对模式大气探测时地面人眼安全又能达到探测所要求的信噪比。     

Nanoscale laser-induced forward transfer through patterned Cr films

The resolution enhancement of laser-induced forward transfer (LIFT) is investigated through the pre-patterning of Cr on the donor substrate. 85 nm dots are first patterned on a microscope slide, and an 800 nm wavelength and 130 fs pulse laser with a beam waist of ～9 μm is used to transfer the Cr dots to an acceptor substrate. The threshold fluence is found to be ～0.15 the threshold fluence of a similar continuous film, which is thought to be due to the fact that no force is needed to tear away Cr from the film itself, unlike in a continuous film experiment. Since the volume of the material limits the transfer feature sizes instead of the laser parameters, as in a continuous film system, minimum transferable feature diameters are significantly lower compared to the continuous film case. Also, the transferred feature diameters are not dependent on the laser parameters, so the diameters are consistent across a wide range of fluences. The force per unit area generated by the laser at threshold fluence is estimated to be ～3 GPa, which is consistent with previous results in the literature. The simplified model that our pre-patterned Cr LIFT experiment represents would make it an ideal case for benchmarking molecular dynamics simulations of femtosecond laser ablation.     

Picosecond diode-pumped 1.5 μm Er,Yb:glass lasers operating at 10–100 GHz repetition rate

Stable ultrafast laser sources at multi-GHz repetition rates are important for various application areas, such as optical sampling, frequency comb metrology, or advanced high-speed return-to-zero telecom systems. We review SESAM-mode-locked Er,Yb:glass lasers operating in the 1.5 μm spectral region at multi-GHz repetition rates, discussing the key improvements that have enabled increasing the repetition rate up to 100 GHz. We also present further improved results with shorter pulse durations from a 100 GHz Er,Yb:glass laser. With an improved SESAM design we achieved 1.1 ps pulses with up to 30 mW average output power. Moreover, we discuss for the first time the importance of beam quality deteriorations arising from frequency-degenerate higher order spatial modes in such lasers.     

Tailor-made domain structures on the x- and y-face of lithium niobate crystals

Ferroelectric domains are engineered in lithium niobate crystals by scanning strongly absorbed UV laser light across the crystal surface. Focused UV laser light can not only write, but also erase previously written domains on the non-polar faces of lithium niobate, which allows tailoring of domain patterns. Such domain pattern was generated and afterward investigated by piezoresponse force microscopy and hydrofluoric acid etching. It was found that domains with dimensions down to 2 μm can be engineered, which was ～30 % of the focus beam diameter (7 μm) used for writing the domains. Additionally, it was found that an unique domain depth profile can be formed, which is inclined to the crystallographic axes and can be described as ‘half-crescent-shaped’.     

Characterization of the 46.9-nm soft X-ray laser beam from a capillary discharge

Intense lasing had been obtained from argon plasma in the soft X-ray region from a capillary discharge plasma system. Different diagnostics have been used to characterize the lasing properties by recording the temporal, spatial, and spectral profiles of the emission. The divergence measurement indicates that the soft X-ray laser beam has good directionality with a divergence of 3.5 mrad. The spectrum of the laser beam measured using a transmission grating showed intense lasing line at 46.9 nm. Diffraction orders as high as 10th orders were observed. The temporal profile recorded with a vacuum diode showed a distinct laser peak with a pulse width ~1.2 ns (FWHM). In addition, the coherence of the X-ray laser beam was also confirmed from the high-contrast interference fringes (visibility ~85 %) recorded using double slits.     

Photo-emission studies from Zn cathodes under plasma phase

In this paper, we report investigations of the electron emission from pure Zn cathodes irradiated by UV laser pulses of 23 ns (full-width at half-maximum) at a wavelength of 248 nm (5 eV). The metal cathodes were tested in a vacuum photodiode chamber at 10^?5 Pa. They were irradiated at normal incidence and the anode–cathode distance was set at 3 mm. The maximum applied accelerating voltage was 18 kV, limited by the electrical breakdown of the photodiode gap. Under the above experimental conditions, a maximum applied electric field of 6 MV/m resulted. In the saturation regime, the measured quantum efficiency value increased with the accelerating voltage due to the plasma formation. The highest output current was achieved with 14 mJ laser energy, 18 kV accelerating voltage and its value was 12 A, corresponding to a global quantum efficiency (GQE) approximately of 1×10^?4. The temporal quantum efficiency was 1.0×10^?4 at the laser pulse onset time and 1.4×10^?4 at the pulse tail. We calculated the target temperature at the maximum laser energy. Its value allowed us to obtain output pulses of the same laser temporal profile. Tests performed with a lower laser photon energy (4.02 eV) demonstrated a GQE of two orders of magnitude lower.     

19.6nm波长类氖锗X光激光光源理论模拟

 波长19.6nm的类氖锗X光激光适合作为诊断激光等离子体界面不稳定性的光源。用经过实验检验的系列程序对预-主短脉冲驱动类氖锗进行了系统的优化设计和理论分析。采用2%~3%的预脉冲强度，6~8ns的预-主脉冲时间间隔，在4×10¹³W/cm²功率密度驱动下, 波长19.6nm增益区的宽度可以超过60μm，增益区的维持时间可以达到90ps。对于16mm长的平板靶，增益系数可达11.8/cm；弯曲靶增益系数可达13.3/cm；单靶小增益长度积可达21.3，单靶就可以获得饱和增益。采用双靶对接，其小讯号增益可达38.4，可以获得深度饱和增益，能满足应用演示所需的X光激光光源。     

Femtosecond laser-induced nanostructure-covered large-scale waves on metals

Through femtosecond (fs) laser pulse irradiation (pulse duration: 65 fs, central wavelength: 800 nm, and repetition rate: 250 Hz), we investigate the morphological evolution of fs laser-induced periodic surface structure on Au and Pt, called a nanostructure-covered large-scale wave (NC-LSW) with a period of tens of microns, densely covered by iterating stripe patterns of nanostructures and microstructures. We show that the surface morphology of NC-LSW crucially depends on the fluence of the laser, the number of irradiating pulses, and the incident beam angle. Our experimental observations allow us to establish a three-step model for the NC-LSW formation: the formation of laser-induced surface unevenness, inhomogeneous energy deposition due to the interference between the incident light and the scattered field, and nonuniform energy deposition due to shielding by the peaks of LSW.