Measurements of Flow Velocity in the Plasma Generator PSI‐2

The plasma flow velocity in the Plasma Generator PSI‐2 has been investigated by using of Mach probe. PSI‐2 is a stationary high‐current arc discharge in which the quasi‐neutral plasma expands along the magnetic field lines. The low‐temperature (T_e < 20 eV), medium density (n_e ∼ 10¹⁸— 10¹⁹ m^—3 ) plasma in the discharge is similar to the plasma in the divertor region of tokamaks. From the ratio of ion saturation currents collected from opposite sides of the probe the flow velocities (Mach numbers) in argon and hydrogen discharges are obtained.     

Double‐probe measurement in recombining plasma using NAGDIS‐II

We have studied the validity of the double‐probe method in recombining plasmas. Electron temperature (T_e) measured with a double probe was quantitatively evaluated by taking into account the influences of plasma potential fluctuation, plasma resistivity, and electron density fluctuation on the current–voltage characteristics. Differential potential fluctuation and plasma resistivity between two electrodes have a minor effect on T_e especially when the inter‐distance is small (typically 1 mm). Scattering of measured T_e due to the density fluctuation was sufficiently suppressed by making the data acquisition time long (typically 4 s) and taking the average. There is a good agreement between T_e measured with the optimized double‐probe method and that with laser Thomson scattering diagnostics.     

Electron impact ionization and excitation rate coefficients in the negative glow region of a glow discharge

Some easy to use reasonable approximations for electron impact rate coefficients have been considered. The most important rate coefficients for electron collisions in noble gases are electron-neutral ionization and electron impact excitation. Electron-neutral ionization besides electron impact excitation of some states of the argon and helium atom in direct current (dc) glow discharge plasma has been calculated. The plasma parameters of electron are significant factors for computing the rate coefficients. We present first results of probe diagnostic that includes the double probe measurements of the plasma parameters, namely, electron temperature (T_e) and electron density (n_e). Electron properties obtained from the double probe characteristic curves including T_e and n_e as well as the calculated rate coefficients (ionization and excitation) were studied as a function of the axial distance from the cathode while the discharge operating parameters of voltage and pressure were varied. Two regions of the glow discharge were investigated: cathode fall region and negative glow. Particular emphasis was placed on the negative glow region.     

Anomalous plasma phenomena of hollow cathode arc discharge

Magnetically confined argon plasma produced by hollow cathode arc discharge has been studied in different experimental conditions, with discharge current from 10–50 A, vessel argon pressure between 10^–3 and 10^–4 torr (1 torr=133·32 Pa) and axial magnetic field up to 0·12 T. The plasma density measured by a cylindrical Langmuir probe is found to be 10¹⁹ to 4 × 10¹⁹ m^–3 and the electron temperatureT _e varies between 2·5 and 4·8 eV. When an external axial magnetic field is applied the plasma temperature decreases with the increase in the magnetic field intensity until it reaches a minimum value at 0·075T and then increases with the same rate. This has been interpreted as high frequency waves excitation due to electron beam-plasma interaction, which explains the electron density jumps with the magnetic field intensity. Enhanced plasma transport across the magnetic field is studied and classified as anomalous diffusion.     

Optical emission spectroscopy investigation of sputtering discharge used for SiOxNy thin films deposition and correlation with the film composition

The r.f. discharge of sputtering silicon target using argon-oxygen-nitrogen plasma was investigated by optical emission spectroscopy. Electronic temperature (T_e) and emission line intensity were measured for different plasma parameters: pressure (from 0.3 to 0.7 Pa), power density (0.6-5.7 W cm⁻²) and gas composition. At high oxygen concentration in the plasma, both T_e and the target self-bias voltage (V_b) steeply decrease. Such behaviour traduces the target poisoning phenomenon. In order to control the deposition process, emission line intensity of different species present in the plasma were compared to the ArI (λ = 696.54 nm) line intensity and then correlated to the film composition analysed by Rutherford Backscattering Spectroscopy.     

Influence of Plasma Resistance and Fluctuation on Probe Characteristics in Detached Recombining Plasmas

In order to find the causes of the strong anomaly of current‐voltage characteristics of Langmuir probe observed in detached recombining plasmas in a linear divertor plasma simulator, NAGDIS‐II, we have investigated plasma resistance along a magnetic field and potential fluctuations in the detached recombining plasmas. Simple calculation on the ratio between the plasma length, at which plasma resistance and resistance of ion sheath formed around a probe tip become equal, and an electron collection length indicates that the evaluation of electron temperature T_e becomes inaccurate at T_e of less than 0.6 eV when plasma density and neutral pressure are 1.0 × 10¹⁸ m^—3 and 10 mtorr, respectively. The potential fluctuation in detached recombining plasmas was found to be so large compared to T_e/e, which can also modify the probe characteristics.     

Langmuir probe and optical emission spectroscopy studies for RF magnetron sputtering during TiON thin film deposition

Low-pressure plasma of gas mixture of Ar, O₂ and N₂ generated by RF magnetron sputtering was characterized by Langmuir probe and optical emission spectroscopy (OES). The electron temperature (T_e), ion density (n_i) and electron energy distribution function (EEDF) in Ar-O₂-N₂ plasma atmosphere were calculated from I-V characteristic of Langmuir probe. Boltzmann plot method was applied for calculating the vibrational temperature (T_vib) of the second positive system of N₂ (N₂SPS) in Ar-O₂-N₂ plasma. The T_e, n_i, EEDF and T_vib in Ar-O₂-N₂ plasma were studied as a function of O₂ percentages. It was found, the T_vib increased from 0.47 eV to 0.55 eV as the oxygen percentage in Ar-N₂-O₂ plasma increased from 10% to 40%. Further, the T_e increased from 1.6 eV to 3 eV as the O₂ concentration increased from 10% to 40%.     

Measurement of Mach probe on plasma flow velocity in highly collisional plasma jet

A normalized plasma flow velocity in highly collisional plasma formed by a microwave plasma jet, which is dimensionless unit for plasma flow velocity/ion acoustic velocity, was measured by the parallel Mach probe. To deduce the normalized plasma flow velocity under highly collisional plasma conditions, the collisional model of a Mach probe was proposed. In addition, neutral gas flow velocity which assumed to be plasma flow velocity was calculated by the turbulent model. The results for the two different models were compared with those for the collsionless models of the Mach probe. The turbulent model produced 2–4 times reduced values than by measurements with collsionless models. The measured results with the collisional model were shown as approximately 100–250% lower than those for collsionless models. They were obtained to be in good agreement with difference rate of 10–30% when compared to those for the turbulent model.     

Electron Temperature Measurement in a Premixed Flat Flame Using the Double Probe Method

The electron temperatures T_e were measured using a double probe in a premixed methane flame produced by a calibration burner according to Hartung et al. The experiment was performed at atmospheric pressure. In contrast to other authors, we have managed to find typical nonlinearities corresponding to the retarding electron current region and to calculate electron temperatures using a suitable fit on the basis of the measured characteristics. A Pt‐Rh thermocouple was used to measure temperatures T_h corresponding to “heavy” species. Our results indicate that the flame plasma can be considered to be weakly non‐isothermic — T_e = (2400–4000) K, T_h = (1400–1600) K. On the basis of measurement of the saturated ion current, the number density of the charged particles was estimated at (0.3–3.8) · 10¹⁷ m^‐3. The trends in T_e and T_h in dependence on the positions of the probes and thermocouple in the flame differ substantially; this fact has not yet been explained (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

HT-7超导托卡马克边界等离子体参量及其涨落的实验研究

利用径向可移动朗缪尔三探针和马赫探针对HT-7超导托卡马克边界等离子体参量及其涨落进行了空时空分辨测量.给出了欧姆放电及其与低杂波电流驱动共同作用下边界等离子体电位φ_p、电子温度T_e和电子密度n_e及其涨落的径向分布.实验表明,在限制器附近,存在一由E_r×B确定的极向旋转速度剪切层.在剪切层内,T_e和n_e分布较陡,且φ_p,T_e和n_e的相对涨落水平下降明显.这说明剪切层对边界区的等离子体涨落具有抑制作用.低杂波驱动使径向电场梯度变陡,从而使剪切程度加深但对剪切层宽度无影响.此外,测量表明等离子体环向速度马赫数M_φ存在径向梯度.环向流的这种径向梯度可能是形成径向电场所需的平均极向流的一种重要驱动源 关键词： 托卡马克 边界涨落 低杂波驱动     

Effect of atmospheric pressure pulsed discharge spatial inhomogeneity on Ar I and H I lines: Electron number density study

The spatial inhomogeneity of pulsed atmospheric pressure discharge in argon is investigated using the electron number density N_e diagnostics procedure applied to asymmetrically broadened Ar I lines. A dedicated fitting procedure is used for describing Ar I 703.0 nm line shape recorded from argon gas discharge and H I (at 486.13 and 656.28 nm) lines recorded from Ar-H₂ gas mixture discharge. The results revealed the change in N_e in both axial and radial directions. The additional Ar I lines at 614.5, 710.7, 731.2, and 731.6 nm, recorded from integral spatial radiation, are analysed as well to confirm the results from the plasma column region. The possibility of using AlO (B²∑⁺–X²∑⁺) and CN (B²∑⁺–X²∑⁺) molecular bands for gas temperature T_g measurements in this type of gas discharge source is demonstrated and T_g used as an input parameter for the N_e diagnostics procedure. For the proper identification of molecular band spectral lines, the Fortrat parabolas are constructed. The results obtained from Ar I 703.0 nm line indicate three different N_e values, with N_e1 ≈ 0.6 × 10¹⁶ cm⁻³, N_e2 ≈ 3.6 × 10¹⁶ cm⁻³, and N_e3 ≈ 19 × 10¹⁶ cm⁻³ measured from the plasma column. These N_e values increase in the cathode and anode region.     

Coaxial Discharge and Transverse Magnetic Field

The study deals with the effect of an applied transverse magnetic field on the dynamics and parameters of the focused and expanded plasma in a coaxial discharge. The experimental results were found with a 3 kJ Plasma focus device of a Mather geometry. The discharge takes place in hydrogen gas with base pressure of 0.5 Torr. The experiments are conducted with a 10 kV bank voltage, which corresponds to 100 kA peak discharge current with rise time 8 μs. Helmholtz magnetic coils are placed outside the expansions chamber to produce a transverse magnetic field with intensity 280 G perpendicular to the plasma expanded from the coaxial electrodes. The investigations have shown that the plasma flow along the expansion chamber axis is restricted when applying the externally transverse magnetic field and the maximum axial velocity of the expanded plasma is decreased by 33%. X-ray probe has been used to measure the focused plasma electron temperature (T_e). The experimental results and the calculations showed that T_e is decreased from 2.2 keV to 800 eV with the application of a transverse magnetic field. The expanded plasma electron temperature and density have been measured by an electric double probe, the results cleared that the expanded plasma electron temperature is decreased by 2.6 times while its density is increased by 9 times, when a transverse magnetic field is applied.     

Measurement of electron energy and density in an H. F. electrodeless ring discharge

The electron temperatureT _e and the electron density were measured as functions of the radial distance in a 10 Mc/s electrodeless ring discharge in hydrogen in the pressure range 0.1–0.3 Torr. It was found thatT _e remains nearly constant along the radius of the cylindrical vessel. The measured values ofT _e have been compared with those observed by other workers and an estimate of the effective electric field in the discharge has been made. From this estimate it has been inferred that even after the first stage of the ring discharge is well established the longitudinal component of the electric field remains of considerable importance. The radial density distribution of the electrons was found to be different from those in an uniform electric field. This deviation in the radial density distribution has been attributed to the influence of the azimuthal electric field.     

New sonochemiluminescence involving solvated electron in Ce(III)/Ce(IV) solutions

The moving single-bubble sonoluminescence of Ce³⁺ in water and ethylene glycol solutions of CeCl₃ and (NH₄)₂Ce(NO₃)₆ was studied. As found, a significant part of intensity of the luminescence (100% with cerium concentration less than 10^–4 M) is due to the sonochemiluminescence. A key reaction of sonochemiluminescence is the Ce⁴⁺ reduction by a solvated (or hydrated in water) electron: Ce⁴⁺ + e_s (e_aq) → *Ce³⁺. Solvated electrons are formed in a solution via electrons ejection from a low-temperature plasma periodically generated in deformable moving bubble at acoustic vibrations. Reactions of heterolytic dissociation of solvents make up the source of electrons in the plasma. In aqueous CeCl₃ solutions, the Ce⁴⁺ ion is formed at the oxidation of Ce³⁺ by OH radical. The latter species originates from homolytic dissociation of water in the plasma of the bubble, also penetrating from the moving bubble into the solution. The sonochemiluminescence in cerium trichloride solutions are quenched by the Br⁻ (acceptor of OH) and H⁺ ions (acceptor of e_aq). In water and ethylene glycol solutions of (NH₄)₂Ce(NO₃)₆, the sonochemiluminescence also quenched by the H⁺ ion. The sonochemiluminescence in CeCl₃ solutions is registered at [Ce³⁺] ≥ 10^–5 M. Then the sonochemiluminescence intensity increases with the cerium ion concentration and reaches the saturation plateau at 10^–2 M. It was shown that sonophotoluminescence (re-emission of light of bubble plasma emitters by cerium ions) also contributes to the luminescence of Ce³⁺ in solutions with [Ce³⁺] ≥ 10^–4 M. If the cerium concentration is more than 10^–2 M, a third source contributes to luminescence, viz., the collisional excitation of Ce³⁺ ions penetrating into the moving bubble.     

Parametric study on excitation temperature and electron temperature in low pressure plasmas

This work aims at investigation of the validity of the electron excitation temperature (T_exc) by optical emission spectroscopy (OES) as an alternative diagnostic to the electron temperature (T_e). The excitation and the electron temperatures were measured at a wide range of gas pressures and input powers in different plasmas such as capacitively-coupled, inductively-coupled, and magnetron direct current plasmas. As a result, both temperatures were found to decrease with an increase in pressure, whereas they not very dependent on power, indicating that T_exc showed a tendency identical to that of T_e as pressure and power were varied. This result suggests that T_exc measurement can be an alternative diagnostic for T_e measurement once the ratio of the two temperatures is found in advance through a calibration experiment especially for low pressure high electron density industrial processing plasmas in which probe measurements are limited.     

Diagnosis of electron temperature in Ar/O2 mixed gas and destruction of toluene/benzene by positive dc discharge plasma

The electron temperature (T_e) of positive dc corona plasma in Ar/O₂ atmosphere was diagnosed, and plasma decomposition of toluene/benzene was studied in a razor–plate reactor. Experimental results revealed that T_e would increase with corona current until it reached a peak value, and then decrease; the volume fraction of Ar (φ_Ar) in Ar/O₂ mixed gas also influenced T_e, the higher φ_Ar, the lower T_e. Though the decomposed volume fraction of toluene/benzene was positively related to the input power, the decomposition efficiency did not monotonically increase with the specific energy density. The highest energy yield reached 3.8 g-toluene/kWh and 2.4 g-benzene/kWh, respectively.     

Mode transition in magnetic pole enhanced inductively coupled argon plasmas

The electrical probe (Langmuir probe) diagnostics of different plasma parameters and operation regimes (E/H modes) of magnetic pole enhanced, inductively coupled (MaPE-ICP) argon plasmas are investigated. It is shown that uniform, high density (n _e ∼ 10¹² cm^-3) and low electron temperature (T _e ∼ 1.5 eV) plasma can be produced in low pressure argon discharges at a low power (100 W). It is found that an MaPE-ICP reactor operates in two different modes; capacitive (E mode) and inductive (H mode). No density jump or hysteresis are reported between these modes. The effect of pressure on transition power, where the mode changes from E to H mode at 20 sccm gas flow rate are studied and it is found that for all pressures tested (∼7.5 mTorr to 75 mTorr) the transition power remains same. In the inductive mode, the above plasma parameters show a smooth variation with increasing filling gas pressure at fixed power. The intensity of the emission line at 750.4 nm due to 2p ₁ → 1s ₂ (Paschen’s notation) transition, closely follows the variation of n _e with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation mostly changes in the high-energy tail, which enlightens close similarity of the 750.4 nm argon line to electron number density (n _e ). The behaviour of the electron energy probability function (EEPF) with regard to pressure and RF power in two operational modes is presented.     

Spectroscopic study of plasma during electrolytic oxidation of magnesium- and aluminium-alloy

We present the results of an optical emission spectroscopy study of Plasma during Electrolytic Oxidation (PEO) of magnesium- and aluminum-alloy. Plasma electron number density N_e diagnostics is performed either from the H_β line shape or from the width or shift of non-hydrogenic ion lines of aluminum and magnesium. The line profile analysis of the H_β suggests presence of two PEO processes characterized by relatively low electron number densities N_e≈1.2×10¹⁵ cm^?3 and N_e≈2.3×10¹⁶  cm^?3. Apart from these two low N_e processes, there is the third one related to the ejection of evaporated anode material through micro-discharge channels. This process is characterized by larger electron density N_e=(1.2–1.6)10¹⁷ cm^?3, which is detected from the shape and shift of aluminum and magnesium singly charged ion lines. Two low N_e values detected from the H_β and large N_e measured from the widths and shift of ion lines suggest presence of three types of discharges during PEO with aluminum- and magnesium-alloy anode. On the basis of present and earlier results one can conclude that low N_e processes do not depend upon anode material or electrolyte composition.The electron temperature of 4000 K and 33,000 K are determined from relative intensities of Mg I and O II lines, respectively. The attention is drawn to the possibility of N_e application for T_e evaluation using Saha equation what is of importance for PEO metal plasma characterization. During the course of this study, difficulties in the analysis of spectral line shapes are encountered and the ways to overcome some of the obstacles are demonstrated.     

Observation of collisionless plasma heating by strong shock waves

The heating of a plasma by collisionless shock waves is investigated by measuring the variation of magnetic field (with magnetic probes), density and electron temperature (from Thomson scattering of laser light) in the shock waves. The compression waves are produced in a tube of 14 cm diameter by the fast rising magnetic field (12 kG in 0.5Μsec) of a theta pinch. For shocks with Mach numbers between 2 and 3 propagating into a hydrogen or deuterium plasma with a localΒ of about 1 (Β=ratio of particle pressure to magnetic pressure) the measured jump in density and magnetic field across the front is 2 to 4, and the electron temperature increases in the front from 3 to 50 eV with a further rise to between 100 and 250 eV in the piston region. Only about 20% of the measured electron heating can be explained by adiabatic heating and resistive heating based on binary collisions, indicating a high turbulent plasma resistance. Both the observed electron heating and the width of the shock front, which is about 0.6 ·c/Ω _p, can be accounted for using an effective collision frequency close to the ion plasma frequencyΩ _p. The ion heating in the almost stationary shock fronts can be inferred indirectly from the steady state conservation relations. For shock waves with Mach numbersM<M _crit it seems to be consistent with an adiabatic heating process, whereas forM>M _crit the calculated ion temperatures exceed those one would except for a merely adiabatic heating.