Measurement of small angle based on a (1 0 0) silicon wafer and heterodyne interferometer

In this paper, a new optical material application and a heterodyne interferometer are proposed for measuring small angles. In the proposed interferometer, the optical material is a (1 0 0) silicon wafer applied to compose a new architecture of small angle sensor. The small angle measurement used the phase difference which is dependent on the incident angle at the silicon wafer surface to deduce the angular variation. The proposed architecture is simple and uses the common path method to compare test and reference signals; thus, small angles can be easily and accurately measured by estimating the phase difference. The experimental results demonstrate the feasibility of this method. The angular resolution and sensitivity levels superior to 7 × 10^?5° (1.3 × 10^?6 rad) and 150 (deg/deg), respectively, were attainable in a dynamic range of 0.45°.     

一种步进扫描投影光刻机承片台不平度检测新技术

提出一种步进扫描投影光刻机承片台不平度检测新技术。在晶圆与承片台存在不同偏移量时,利用线性差分传感器在线测量晶圆上不同点的局部高度;通过建立临时边界条件,以递推法消除晶圆面形影响,并逐行计算出承片台的相对不平度;通过逐行计算的结果递推相邻行之间的高度差,并将该高度差叠加到每一行,以消除临时边界条件的限制,得到处于同一高度上的承片台不平度;将计算的结果作为初始值,根据最小二乘原理,以邻近的四个测量点作为参考,逐步逼近得到承片台的真实不平度。计算机仿真结果验证了该检测方法的正确性,计算结果逐步收敛并逼近真实值.实验结果表明,该方法的计算结果较好地表示了承片台的真实不平度,重复精度优于0.3 nm;同时该方法也可用于晶圆表面面形的测量。     

Nanostructure identification using interference microscope with database

Interference microscopy with complex-amplitude pattern matching between an observed image and images stored in a database can observe nanostructures beyond the diffraction limit of light. The fundamental performance was investigated from size measurement of a single rectangular convex element with a height and width less than 100 nm under illumination light with a wavelength of 400 nm, using an objective lens with a numerical aperture of 0.85. A 50 nm rectangular convex element was reconstructed with an identification error rate of less than 1% and a root-mean square error lower than 1 nm in the presence of random noise. The element height could be detected with a lower error than its width when the element size was larger than ~?50 nm. However, this tendency reversed when the size was smaller than ~?50 nm, that is, the detection of the width had a slightly lower error than that of the height. In addition to these findings, position detection showed a small dependency on the element size when the position was in the laser beam.     

单摄像机单投影仪结构光三维测量系统标定方法

系统参数的标定是结构光三维测量系统工作的基础,且参数标定的精度直接影响测量的精度,其中投影仪目前还存在标定过程复杂、精度较低等问题。为解决该问题,通过投影一组圆阵图案到一块本身带有特征圆的平板上,并由摄像机拍摄;基于二维射影变换理论,通过误差补偿法建立投影仪图像坐标和摄像机图像坐标的对应关系,利用该对应关系计算获取标定点的投影仪图像坐标;以标定点的两组图像坐标和世界坐标为初始值,使用非线性算法对系统进行全参数整体优化,完成系统的标定。实验验证了系统标定误差最大值小于0.05 mm,误差均方根小于0.03 mm,结果表明该方法标定过程简单,能够有效地提高标定精度,具有较广的适用性。     

On the use of curved slits in the concave grating grazing incidence mounting

The image formation by the concave grating in the grazing incidence mounting for the case of a selfluminous entrance slit is studied by exact ray-tracing calculations with respect to the use of long slits in high resolution investigations. It is found that both entrance and exit slits should be curved to provide optimum performance. The slit curvatures derived for one wavelength can be maintained throughout the whole wavelength region from 8 Å to 160 Å and further, if the angle of incidence is varied appropriately. The angles so chosen simultaneously provide nearly optimum diffraction efficiencies. A method to realize curved slits is described.     

数字散斑亚像素小角位移测量的曲面拟合法

与传统测量方法相比,数字散斑相关法由于其目标特征单元网格划分的灵活性,能够更好地满足不同场合小角位移的测量需求。针对该方法亚像素小角位移测量的曲面拟合参数选择问题,研究了亚像素测量图像小角旋转前后的九点二次曲面拟合法,并根据计算机生成模拟散斑进行模拟实验分析,得到最佳误差效率优化条件下的曲面拟合法求解亚像素小角位移的最佳散斑尺寸3.5 pixel、计算窗口尺寸41×41 pixel和拟合窗口尺寸3×3 pixel。实验验证了上述测量参数的有效性,为进一步的曲面拟合法数字散斑成像角位移测量提供参考。     

多目标探测的摆镜动态角位置测量方法

为进一步提高CCD图像测角的摆角测量精度,提出一种基于多目标探测的摆镜动态角度测量方法。该方法采用多条等宽的平行狭缝作为CCD探测目标,首先利用灰度质心算法得到各狭缝的质心位置,进而将各狭缝的质心位置进行平均运算,得到摆镜的动态角位置。模型表明当使用m条等宽狭缝目标进行测量时,其动态测量误差方差为单目标方法的1／m。实验结果证明,该方法可以有效地提高摆镜动态角位置测量精度。     

The development of an inspection system for defects in silicon crystal growth

This study presents an inspection system to detect the growth defects of silicon crystals that comprise a CCD camera, an LED light source, and power modulation. The defects on multicrystalline silicon can be observed clearly while the silicon wafer were irradiated by the red LED light at a small lighting angle (i.e., 20–30°). However, the growth defects on monocrystalline silicon wafer were difficult to observe because of it low image intensity. And then, the growth defects image was significantly enhanced when the wafer was illuminated by a white LED (WLED) and rotated at a specific angle (i.e., 23°). The experimental results showed that the WLED illumination system made the growth defects more easily observable than did other LED sources (i.e., red, blue, and green LEDs). In addition, the proposed inspection system can be used for on-line fast detection for quality control of monocrystalline silicon wafer.     

基于单目视觉的矩形靶面弹着点测量

目前机器视觉技术广泛应用于弹着点坐标的测量领域,针对双目视觉技术标定、演算复杂的问题,提出一种基于单目视觉技术的弹着点测量方法。通过图像处理技术定位出靶面4个角点以及弹着点像素坐标,采用矩形P4P方法解算出靶面坐标相对于相机坐标系的位姿,根据单目视觉成像原理计算出弹着点在靶面的实际坐标。根据该方法成功测量出了实验中靶面弹孔的坐标,最大测量误差为2.3 mm。结果表明,该方法可以快速、精确测量靶面与相机的位姿关系以及弹着点的坐标。     

线阵CCD立靶系统全视场测量误差分析

基于线阵CCD交汇立靶测量系统空间坐标新误差分析模型,用matlab分析了在图像判读精度为±0.5像素的情况下测量系统整个靶面误差情况。在理论分析基础上,用两相机间距为1664mm的线阵CCD正交交汇立靶测量系统对垂直靶面入射的小钢珠进行了空间坐标测量实验。实验结果表明,在线阵CCD有效靶面内,水平方向误差约为0.5mm,垂直方向误差约为0.8mm;与理论分析结果水平方向误差不超过0.5mm,垂直方向误差不超过1.1mm一致。     

Two-step pose estimation method based on five reference points

A two-step method for pose estimation based on five co-planar reference points is studied.In the first step, the pose of the object is estimated by a simple analytical solving process.The pixel coordinates of reference points on the image plane are extracted through image processing.Then,using affine invariants of the reference points with certain distances between each other,the coordinates of reference points in the camera coordinate system are solved.In the second step,the results obtained in the first step are used as initial values of an iterative solving process for gathering the exact solution.In such a solution,an unconstrained nonlinear optimization objective function is established through the objective functions produced by the depth estimation and the co-planarity of the five reference points to ensure the accuracy and convergence rate of the non-linear algorithm.The Levenberg-Marquardt optimization method is utilized to refine the initial values.The coordinates of the reference points in the camera coordinate system are obtained and transformed into the pose of the object.Experimental results show that the RMS of the azimuth angle reaches 0.076°in the measurement range of 0°-90°;the root mean square(RMS) of the pitch angle reaches 0.035°in the measurement range of 0°-60°:and the RMS of the roll angle reaches 0.036°in the measurement range of 0°-60°.     

用重叠四步平均算法测量光纤连接器端面的曲率半径

曲率半径(ROC)是光纤连接器端面三个最重要的控制参数之一。介绍了测量该曲率半径的一种算法:重叠四步平均法(OAF)。对算法过程中涉及的被测波面相位主值计算及表面面形重构等方面作了理论分析,给出了模拟结果。分析了移相器位移误差对曲率半径测量的影响,给出了ROC误差与移相器位移误差关系的曲面图,并对四步平均法和OAF算法产生的ROC误差作了比较。结果表明:在有移相器位移误差情况下,OAF算法优于四步平均法,且在普通的标定误差≤5%和非线性误差≤5%所构成的移相器位移误差范围内,由OAF算法产生的光纤连接器端面ROC测量误差<7.2×10-5。     

Morphological and optical properties of soft-landed supported nanoclusters: effect of rapid thermal annealing

We report the formation of large islands of bi-modal lateral size distributions having one peak at lateral size ～100 nm (height ～70 nm) and another at ～160 nm (height ～110 nm) by soft-landing of size-selected copper nanoclusters (3 nm in diameter) at room temperature (26 °C). Si(100) wafer containing native oxide is used as substrate. Transmission electron microscopy (TEM), scanning electron microscopy (SEM) and atomic force microscopy (AFM) are employed to study the morphological aspects and for optical aspect cathodoluminescence measurement is used. Rapid thermal annealing (RTA) (200 °C, dry N₂, 120 s) induced effects on the morphology shows that individual islands are morphologically stable. A careful qualitative study of the optical property using cathodoluminescence in a SEM before and after the thermal treatment, using RTA, reveals very low diffusion of the cluster material into the substrate.     

动态像面法测量水面落点位置及误差分析

为了测量弹丸水面落点的位置, 建立了基于CCD相机动态像面的测量模型。该模型通过CCD相机辅助采集相关点位的图像信息, 对水面落点的位置函数以及误差进行了研究。首先, 利用空间几何获得靶船上三定点相对于测量船的方位、俯仰信息。接着, 结合t时刻观测图像上定点的像面坐标, 运用底片常数模型建立像面坐标和角度信息两套参量之间的关系函数, 从而得到目标落点的方位、俯仰信息, 再利用异面交会法计算出目标落点位置。最后, 分析了目标落点位置的误差来源(质心误差, 位置误差)、误差以及各误差源与位置坐标之间的关系。实验结果表明:在测量船位置精度达到0.05 m, 图像质心定位精度达到0.5 pixel时, 在最小交会误差的情况下, 目标落点的位置测量误差分别为2.8, 4.9, 4.3 m。     

Study on Laser Visual Measurement Method for Seamless Steel Pipe Straightness Error by Multiple Line- structured Laser Sensors

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调制激光致硅晶圆载流子辐射扫描成像试验研究

建立了调制激光诱发硅晶圆少数载流子密度波一维模型, 仿真分析了少数载流子输运参数对调制激光诱发载流子辐射信号频域响应的影响. 利用调制激光诱发载流子辐射扫描成像系统对含有表面划痕的硅晶圆进行了扫描成像试验研究. 通过少数载流子密度波模型与多参数拟合方法反求得到了扫描区域的输运参数二维分布图. 该方法得到的少数载流子寿命与利用传统光电导方法测量的少数载流子寿命结果相符; 分析了划痕对载流子输运参数造成的影响, 与光电导方法比较, 该方法可以测量不同位置的全部载流子输运参数且分辨率高.     

Study on Laser Visual Measurement Method for Seamless Steel PipeStraightness Error by Multiple Line-structured Laser Sensors

An original non-contact measurement method using multiple line-structured laser sensors is introduced for seamless steel pipe straightness error is in this paper. An arc appears on the surface of the measured seamless steel pipe against a line-structured laser source. After the image of the arc is accepted by a CCD camera, the coordinates of the center of the pipe cross-section circle containing the arc can be worked out through a certain algorithm. Similarly, multiple line-structured laser sensors are equipped parallel to the pipe. The straightness error of the seamless steel pipe, therefore, can be inferred from the coordinates of multiple cross-section centers obtained from every line-structured laser sernsor .     

Stereo vision sensor calibration based on random spatial points given by CMM

This paper presents a new, high-precision calibration method for stereo vision sensor based on virtual template. Given 3D spatial points coordinates by coordinates measurement machine (CMM) and corresponding image points coordinates, the technique is realized by taking the projection matrix elements as unknown and using singular value decomposition to solve the least-squares solutions. The method avoids solving intrinsic and extrinsic parameters of each camera and introducing the calibration error which caused by template machining and measurement error. We measure the 3D coordinates of a group of random spatial points by the calibrated stereo vision sensor then compare the results with CMM measurement values, the errors are less than 0.05 mm in the Z axis direction, and less than 0.01 mm in the X and Y axis direction, the experiment results show that the technique is feasible and effective.     

基于线阵CCD空间滤波效应的航空相机像移速度测量方法

基于空间滤波测速原理,提出了利用线阵CCD空间滤波效应进行航空相机像移速度测量的新方法。对线阵CCD输出图像进行隔行采样,模拟了多狭缝的空间滤波特性,实现了对航空相机像移速度的光学非接触测量。通过研究空间滤波器的功率谱密度函数,对影响线阵CCD空间滤波特性的关键因素进行了特性分析,并在实验上验证了利用线阵CCD推扫图像模拟多狭缝空间滤波器测量像移速度的可行性。结果表明,对于5～53.2 mm/s范围内的像移速度,测量误差导致的像移量误差不大于1/3 pixel,能够满足航空相机像移补偿精度的要求。     

基于三线结构光的相机平面标定方法研究

相机标定技术是结构光三维视觉测量的关键技术之一,结构光系统的相机标定的精度对三维测量的精度有很大影响。首先对三线结构光系统图的相机标定方法进行了分析,简单介绍了工业相机成像的几何模型及标定的原理;其次利用Harris角点检测方法提取特征点坐标,并选用了BP神经网络来校正工业相机的畸变模型,以提高标定算法的优化速度和标定精度;最后采用张正友的平面标定法对校正后的摄像机模型进行标定实验,由实验结果知,该方法具有一定的准确性和有效性,在一定误差范围内,基于神经网络畸变校正的张正友相机标定能够有效提高视觉检测的精度。