矩形槽光栅矢量模式理论的数值计算

本文根据矩形槽光栅的矢量模式理论进行了数值计算。对于任意入射方向及任意偏振态的入射场，计算了其衍射效率和偏振特性变化，并详细研究了光栅结构参数（周期、槽宽、槽深等）对衍射场的影响。     

亚波长刻槽结构衍射场研究与数值计算

用耦合波理论分析考虑了亚波长刻槽结构有限刻槽光栅对光波场的衍射作用,给出了TE偏振以及TM偏振入射下的耦合波方程,并通过数值计算给出了单槽及多槽在TE偏振正入射下的衍射场分布. 关键词：     

任意槽形金属光栅矢量模式理论的数值计算

本文根据任意槽形金属光栅的矢量模式理论，对正弦槽光栅和半椭圆槽光栅的情况进行了推导和数值计算。对任意入射方向和偏振态的入射场，计算了其衍射场的分布情况，并详细研究了光栅结构参数（光栅常数、槽宽、槽深等）对衍射场的影响。     

矩形槽光栅的矢量模式理论

本文引进满足均匀矢量Helmholtz方程的矢量波函数作为基矢,对矩形槽光栅的槽内和槽外的光场分别进行矢量平面波展开和矢量模式展开,并由耦合条件导出了求解展开系数的方程组,可进行数值计算.该方法可研究入射场的方向和偏振任意时的衍射效率、偏振特性变化等问题.在p偏振和s偏振的特殊情况下所得到的公式与用标量模式理论得到的结果一致.     

布儒斯特角附近的透射光栅传输特性

 减小光栅表面的反射率以得到更高的衍射效率是目前光栅设计与制造中需要解决的重要问题之一。提出利用偏振光沿布儒斯特角入射时具有的特性来实现降低光栅表面反射率的方案,介绍了这种方案的物理模型,并利用严格耦合波分析法进行了模拟计算。计算结果显示,对入射光为TM偏振,波长0.35 μm,当光栅周期较长为2.80 μm时,以布儒斯特角入射的光波,它的表面反射被大大抑制;当光栅周期较短为0.21 μm时也有类似的结论,并且透射光的一级衍射效率极大值出现在刻槽深度为3.50 μm处附近,衍射效率大于95%。     

高效全偏振矩形闪耀光栅的设计(英文)

入射光在光栅内传输时将激发产生离散模.本文采用模态法调节光栅内离散模的传输特性,使TE和TM偏振光所激发的0、1模为传输模,其余高阶模为消逝模.通过调控0模和1模间的累积相位差,对衍射光进行调控,实现了-1级近100%的高效衍射.采用模态法分三部设计了共振域的矩形全偏振闪耀光栅:1)根据光栅的共振条件给出光栅周期,光栅周期越大槽深越小;2)根据特征模方程计算出光栅占空比;3)根据耦合模条件计算机光栅槽深.实验结果表明,该光栅的TE和TM偏振光同时具备近100%的-1级衍射效率.给出了633nm波长-1级矩形石英全偏振闪耀光栅的典型设计实例,计算结果表明:所设计的全偏振闪耀光栅对TE和TM偏振入射光的-1级衍射效率分别高达96.7%和98.1%,且具有较宽的入射角及入射波长的变化适应范围,较大的制作容差.     

直角刻槽反射光栅的后向衍射特性

本文导出了直角刻槽反射光栅在正入射和非正入射以及刻槽偏离直角等情况下,反射夫朗和费(Fraunhofer)衍射强度分布表达式;用数值计算结果,分析和讨论了这种光栅的后向衍射特性.     

亚微米光栅零级衍射特性的数值研究

用耦合波理论分析了亚微米光栅对光波场的衍射作用,给出了在TE和TM偏振入射条件下矩阵形式的耦合波方程,研究了光栅在TE偏振入射条件下可见光波段内的反射和透射零级衍射特性。亚微米光栅零级衍射效率是波长、偏振和入射角的函数,在不同照明、观察和光栅参数条件下,光栅零级衍射具有非常复杂的光谱结构,经过适当的优化光栅参数,零级衍射具有许多独特的衍射特性,在许多应用领域具有广泛的应用前景。     

亚波长光栅衍射效率特性设计的遗传算法优化

亚波长光栅中的衍射需要使用矢量衍射理论进行分析,其衍射效率与多个因素有关,对任意面形、任意入射条件的亚波长光栅的衍射来说,使用严格的耦合波理论进行分析计算可以得到数值解。通过分析不同参数条件下的衍射特性和衍射效率对各个参数的敏感性,获得了对衍射效率影响最大的光栅参数——槽深。用接近衍射效率曲线的抛物线作为目标函数建立了适应度函数。使用遗传算法进行优化,得到了所期望的衍射效率滤波特性,从而完成了具有防伪功能的亚波长光栅的设计。     

基于二维结构薄膜的偏振选择相位光栅的研究

利用二维结构薄膜构建了具有偏振选择特性的新型相位光栅,借助严格耦合波分析(RCWA)方法计算了光栅各级衍射强度随入射光波长及入射角的变化,发现在垂直入射情况下,波长600—640 nm范围内,相位光栅对横向电学(TE)模主要产生0级衍射,而对横向磁学(TM)模产生±1级衍射,在波长633nm处,0级衍射光的偏振消光比为109.8,±1级衍射光的偏振消光比为334.6.利用时域有限差分方法对这种相位光栅的偏振分束现象进行了模拟,偏振分离角在玻璃基板内可以达到10°左右,最后模拟了入射角为23°时光栅对不同偏     

A detailed study of metallic surface-relief grating

This paper presents a more detailed interaction of an electromagnetics light with a metallic surface-relief subwavelength grating utilizing the rigorous coupled-wave analysis. The focus of this work is the accurate modeling of undetermined aspects of diffraction patterns produced by binary metallic grating structures, specially gold grating. First-order diffraction efficiency for rectangular-groove gold grating with equal groove and ridge widths are presented for various wavelengths as a function of period, groove depth, polarization and angle of incidence. We also studied diffraction efficiency of both of TE and TM polarization modes against increasing of incident angle as well as TE polarization against increment of grating period. As a result, very low reflectivity at zero-order was found out for TE and TM polarizations at the pitch of Λ = 2λ. Having been studied diffraction efficiency of metallic surface-relief gratings, we also examined polarization-dependent efficiency of diffraction orders, for different groove depths. Simulation results have been completely presented.     

矩孔金属光栅矢量模式理论的数值计算

根据矩孔金属光栅的矢量模式理论，计算了不同入射方向，波长及偏振态情况下衍射场的分布，研究了不同光栅结构对衍射效率，偏振态变化的影响；同时，根据实际需要，加工制作了一批不同深度的矩孔光栅样品，进行了实验测量，并将计算值与实验值进行了比较，两者基本相符。     

二元矩形金属光栅衍射增强电磁理论

采用耦合波原理计算了TM波经过二元纳米量级金属光栅衍射的电磁场，研究了金属光栅的占空比、光栅深度及TM波入射角对衍射后的光栅表面电磁场的增强的影响，针对金属金、银做了探讨和分析，得出重要的结论. 关键词： 耦合波原理 金属光栅 衍射     

Effects of shaded facets on the performance of metal-coated etched diffraction grating demultiplexer

A finite-difference time-domain (FDTD) method combined with a periodic boundary condition is used to analyze the diffraction efficiency of an etched diffraction grating (EDG) demultiplexer coated with a metallic film at the backside. The numerical results show that the diffraction loss is mainly due to the scattering effect of shaded facets of a metal-coated grating at both the polarizations. However, the same shaded facets can produce a higher loss for a TM polarization than that for a TE polarization, which induces a higher polarization dependent loss (PDL) of the demultiplexer.     

Surface plasmon resonance sensor based on diffraction grating with high sensitivity and high resolution

A surface plasmon resonance (SPR) sensor based on diffraction grating with high sensitivity and high resolution is proposed. The sensitivity of grating coupled SPR sensor based on angular interrogation is enhanced by replacing +1st diffraction order of metallic grating with −1st diffraction order to excite the surface plasmon. To improve the resolution of grating-based SPR sensor, aluminum is used as an SPR-active metal. The reflectivity dip of the Al-based sensor is sharper than an Au-based one, which is the mostly widely used as SPR-active metal. And 3-nm-thick gold film is deposited on the grating surface in order to protect the Al layer from getting oxidized. Numerical simulations show that the sensor not only has high sensitivity and high resolution, but also exhibits good linearity.     

Effect of aspect ratio on the inter-surface plasmonic coupling of tubular gold nanoparticle

A theoretical study based on discrete dipole approximation (DDA) and coupling effect is presented on the tunable transverse surface plasmon resonance (SPR) in a gold nanotube with varying aspect ratio (AR). Because gold nanotube has the shape features from both rod and shell, both the AR and wall thickness can greatly affect the transverse SPR. It is observed that the maximum red shift can be obtained with small wall thickness and AR. By calculating the local field distribution, the physical mechanism of this multi shape factors controlled plasmon shifting has been illustrated by the coulombic interaction from the charges at the interfaces of gold nanotube. This study indicates that finding the surface charge distribution by calculating the local electric field can be used as an effective method to analyze the plasmonic characters in complicated metallic nanostructure.     

深紫外双层金属光栅偏振器的设计与分析

193 nm波长浸没式步进扫描投影光刻机是实现45 nm及以下技术节点集成电路制造的核心装备.增大数值孔径是提高光刻分辨率的有效途径,而大数值孔径曝光系统的偏振性能严重影响光刻成像质量.光刻机曝光系统偏振参数的高精度检测是对其进行有效调控的前提.基于光栅的偏振检测技术能实现浸没式光刻机偏振检测装置的小型化,满足其快速、高精度在线检测的需求,该技术中的关键部件是结构紧凑且偏振性能良好的光栅.本文基于反常偏振效应和双层金属光栅对TE偏振光的透射增强原理,采用严格耦合波理论和有限时域差分方法,设计了一种双层金属光栅偏振器.计算了该偏振器的初始结构参数,并通过数值仿真得到了其偏振性能关于各光栅参数的变化关系.仿真结果表明,中间层高度是影响TE偏振光透射增强的主要因素;垂直入射时TE偏振光的透过率可达到56.8%,消光比高达65.6 dB.与现有同波段金属光栅偏振器相比,所设计的光栅偏振器在保证高透过率的同时,消光比提升了四个数量级.     

基于开口环阵列结构的表面晶格共振产生及二次谐波增强

理论研究了二维周期排列的金开口环谐振器的磁共振模式与周期阵列的衍射模式发生强耦合所需满足的条件及其对二次谐波产生效率的影响.通过控制阵列结构在x和y方向的周期大小,使得衍射模式只在其中一个方向产生,当衍射模式的电场方向与入射光电场偏振方向一致时,衍射模式才会与开口环谐振器的磁共振模式发生强耦合作用,产生表面晶格共振进而实现近场场增强.在此基础上,进一步计算了金开口环谐振器阵列的二次谐波产生效率,随着阵列周期逐渐增大,即开口环谐振器的数密度减小,二次谐波强度呈现先增加后降低的趋势,当开口环谐振器数密度降为原来的1/4左右时,二次谐波强度可以增强2倍以上.本文的研究为金属超表面二次谐波产生效率的提高提供了一种新的可能途径.