A conical piezoelectric transducer with integral sensor as a self-calibrating acoustic emission energy source

The experimental results of a conical piezoelectric transducer with integral backing sensor as a self-calibrating simulated acoustic emission (SAE) energy source are presented. It has been shown that there is a negative linear relationship between the energy of SAE signal detected by the backing sensor and the relative strength (signal energy) of SAE source in the structure detected by a reference sensor under different transducer-to-structure coupling efficiencies, with AC drives of the same wave packet, frequency and peak amplitude to excite the conical transducer as a SAE source at all the investigated frequencies over the frequency range of interest in AE measurements (nominally from 50 kHz to around 1 MHz). This should enable the relative strength of the SAE source in a structure to be determined using the SAE measurement from the backing sensor for the selected electrical inputs to the conical transducer, and hence to remove the concerns about inconsistent transducer-to-structure coupling affecting the relative strength of the SAE source for calibration.     

Miniature piezoelectric conical transducer: fabrication, evaluation and application

This paper reports a new type miniature-conical transducer for acoustic emission measurements. The transducer follows the basic idea and structure of a conventional NBS conical transducer, but is much compact in size and easier to use. The improvements are made possible by introducing an excimer laser micromachining method for fabricating smaller PZT conical elements, which play a key role in the transducer. Conical PZT elements with contact size less then 300 microm are laser-machined and the miniature-conical transducers are constructed. Standard quantitative acoustic emission testing is performed on a plate using the fabricated transducers and good results are observed. The transducers can be very useful in many applications involving quantitative measurements of transient elastic waves.     

Acoustic impedance matching of medical ultrasound transducers

Ultrasonic transducers for pulse-echo systems are studied both theoretically and experimentally. For the theoretical calculations the Mason model for thickness-mode disc transducers with and without backing and matching layers is used. By building several of the theoretically investigated transducer configurations it is shown that theory and experiment agree well. Thus the properties of a transducer can be predicted to a good approximation before its experimental realization. To find transducers with good sensitivity and short pulses, the pulse shape and frequency response for the following classes of transducers were studied both theoretically and experimentally: transducers with backing only, transducers with heavy backing and front matching layers, and air-backed transducers with front matching layers.     

超声检测用压电换能器瞬态特性可控可调

超声检测用压电换能器瞬态特性主要包括瞬态空间响应和瞬态时间响应。本文通过调整控制换能器和激励源,实现瞬态空间响应和瞬态时间响应的某些特性的可控可调。其中包括在空间响应方面消除边缘波以获得平行声束和消除平面波以获得聚焦绳声束;在时间响应方面,调整换能器的背衬阻抗以获得可调首次波幅比和调整换能器结构和激励电信号以获得任意检测信号等。     

Loading transducers for non-destructive testing and signal processing by acoustic bulk waves

Non-destructive testing and signal processing with acoustic bulk waves require the use of loaded transducers having a large bandwidth. The technique of loading quartz or ceramic transducers by backing with a material having a relatively large acoustic impedance is well known. A brief review of the methods and results of this classical type of loading is given. Another method of broadening the bandwidth by backing the transducer with one or several metallic layers of variable thickness followed by a semi-infinite medium is then proposed. A brief mention is also given to the technique of matching the backed transducer to the propagating medium. Several practical examples illustrating the use of the methods are given.     

Modeling of functionally graded piezoelectric ultrasonic transducers

The application of functionally graded material (FGM) concept to piezoelectric transducers allows the design of composite transducers without interfaces, due to the continuous change of property values. Thus, large improvements can be achieved, as reduction of stress concentration, increasing of bonding strength, and bandwidth. This work proposes to design and to model FGM piezoelectric transducers and to compare their performance with non-FGM ones. Analytical and finite element (FE) modeling of FGM piezoelectric transducers radiating a plane pressure wave in fluid medium are developed and their results are compared. The ANSYS software is used for the FE modeling. The analytical model is based on FGM-equivalent acoustic transmission-line model, which is implemented using MATLAB software. Two cases are considered: (i) the transducer emits a pressure wave in water and it is composed of a graded piezoceramic disk, and backing and matching layers made of homogeneous materials; (ii) the transducer has no backing and matching layer; in this case, no external load is simulated. Time and frequency pressure responses are obtained through a transient analysis. The material properties are graded along thickness direction. Linear and exponential gradation functions are implemented to illustrate the influence of gradation on the transducer pressure response, electrical impedance, and resonance frequencies.     

Nonlinear characterization with burst excitation of 1-3 piezocomposite transducers

Ultrasonic transducers made with 1-3 connectivity piezocomposites are frequently used in Medical applications and nondestructive testing. When the transducer is used for special applications as, for instance air-coupled transmission, it is necessary to compensate for the high difference of acoustic impedance between transducer and medium using high amplitude pulses to generate high acoustic signal. Thus, the nonlinear behavior of the transducer must be taken into account in similar application conditions. The newly developed method, which performs the nonlinear characterization with burst signal excitation near the thickness resonance frequency, is based on the measure of the current as well as the vibration velocity of the piezocomposite transducer. The current of the stationary response is measured before the end of the burst signal excitation. Burst excitation enables us to measure the nonlinear characterization without producing overheating in the transducers. The amplitude level dependence of mechanical losses tandelta(m) and the stiffness increases |Deltac/c(0)| have been studied, as well as the velocity dependence of a point of the transducer, measured with a laser vibrometer. In this method, the power level applied to the transducers can be higher than other nonlinear measurement methods, providing measurements of high accuracy.     

厚度模压电超声换能器无源声学材料研究进展*

厚度模压电超声换能器作为超声波发射、接收以及电信号间转换的载体,是超声成像与检测系统的核心器件,一般由压电层、匹配层和背衬层3部分组成。超声换能器的性能一定程度上决定着整体超声设备的性能,影响了其在工业、医学、军事等领域的应用。该换能器的关键性能指标(带宽、灵敏度)除了受到压电层的影响,还与匹配层、背衬层等无源声学材料的设计密切相关。该文综述了近年来厚度模压电超声换能器无源声学材料(匹配层、背衬层和声透镜)的研究进展,提出了当前该类材料面临的难题和解决途径,并对其未来发展方向进行了展望。     

Study on the multifrequency Langevin ultrasonic transducer

Langevin ultrasonic transducers are widely used in high-power ultrasonics and underwater sound. In ultrasonic cleaning, a matching metal horn rather than a metal cylinder is used as the radiator in order to enhance the radiating surface and improve the acoustic matching between the transducer and the processed medium. To raise the effect of ultrasonic cleaning, the standing wave in the cleaning tank should be eliminated. One method to eliminate the standing wave in the tank is to use the multifrequency ultrasonic transducer. In this paper, the Langevin ultrasonic horn transducer, with two resonance frequencies, is studied. The transducer consists of two groups of piezoelectric ceramic elements: the back metal cylinder, the middle metal cylinder and the front matching metal horn. The vibrational modes of the transducer are analysed, and resonance frequency equations of the transducer in the half-wave and the all-wave vibrational modes are derived. According to the resonance frequency equations, transducers with two resonance frequencies are designed and made. The resonance frequencies, the effective electromechanical coupling coefficients and the equivalent electric impedances of the transducers are measured. It is shown that the measured resonance frequencies are in good agreement with the computed results, and the transducer can be excited to vibrate at two resonance frequencies, which correspond to the half-wave and the all-wave vibrational modes of the transducer.     

Electrical coupling effects in an ultrasonic transducer array

Ultrasonic imaging devices often use transducer arrays for sampling the incoming acoustic field and converting it into electrical signals. After some convenient processing (amplification, dephasing, summing, etc), the electrical signals are used to modulate the brightness of a cathode ray tube (crt) monitor on which the ultrasonic image becomes visible. The quality of the imaging apparatus depends critically on the transducer array design and implementation.

Each individual transducer would, ideally, produce an electrical signal related exclusively to the ultrasonic field arriving at its surface; the reciprocal would also be true for transmission. In all practical cases, however, numerous effects lead to some coupling between nearby transducers, especially for very narrow transducers. The subsequent perturbations may be described as a narrowing of the radiation (or reception) pattern of the individual transducers, with respect to the theoretical predictions. To understand the mechanism for these couplings and to minimize them, their possible origins have been systematically studied. One of the most important sources of coupling is electrical leakage, which is reported here. Since no simple analytical calculation can be performed, diagrams have been established that enable evaluation of the electrical coupling against the dimensional characteristics of the array. Some means for reducing this coupling are suggested and comparative experimental results are given.     

A spiral wave front beacon for underwater navigation: transducer prototypes and testing

Transducers for acoustic beacons which can produce outgoing signals with wave fronts whose horizontal cross sections are circular or spiral are studied experimentally. A remote hydrophone is used to determine its aspect relative to the transducers by comparing the phase of the circular signal to the phase of the spiral signal. The transducers for a "physical-spiral" beacon are made by forming a strip of 1-3 piezocomposite transducer material around either a circular or spiral backing. A "phased-spiral" beacon is made from an array of transducer elements which can be driven either in phase or staggered out of phase so as to produce signals with either a circular or spiral wave front. Measurements are made to study outgoing signals and their usefulness in determining aspect angle. Vertical beam width is also examined and phase corrections applied when the hydrophone is out of the horizontal plane of the beacon. While numerical simulations indicate that the discontinuity in the physical-spiral beacon introduces errors into the measured phase, damping observed at the ends of the piezocomposite material is a more significant source of error. This damping is also reflected in laser Doppler vibrometer measurements of the transducer's surface velocity.     

超声换能器辐射特性的优化*

匹配层和背衬层是换能器的重要组成部分,对换能器特性有重要影响。针对发射型换能器,基于有/无匹配层和空气/树脂背衬两种条件组合,该文研究了匹配层与背衬层对换能器辐射特性的影响。结果表明,负载材料为水时,空气背衬换能器相较于树脂背衬换能器声能辐射效率更高;匹配层可以提高换能器的主瓣能量,抑制旁瓣能量及旁瓣数量。因此,针对发射型换能器的设计,背衬材料的选择应遵循与压电材料的阻抗差异越大越优的原则;匹配层的合理设计不仅可以提高超声换能器的声能辐射效率,还可以提高主瓣旁瓣峰值比,使声能更集中。     

背衬参数对厚度模压电换能器特性的影响

系统研究了厚度模压电换能器的背衬厚度、声阻抗率及机械损耗因子对换能器振动性能影响,重点分析了在所关心频率附近的有效机电耦合系数和机械品质因数。计算结果表明,随着背衬厚度增大,换能器的有效机电耦合系数和机械品质因数均震荡减小;背衬声阻抗率与压电片声阻抗率差值增大,换能器有效机电耦合系数减小,机械品质因数增大;保持压电片厚度不变,增大背衬的机械损耗因子,换能器有效机电耦合系数单调减小,机械品质因数有极小值,在给定频率范围内电特性曲线趋于光滑。用有限元方法验证了等效电路计算方法的正确性,并对比了换能器的测试结果和计算结果。计算所得规律为厚度模压电换能器的设计和实验制作提供了理论依据。      

A spatial impulse response based method for determining effective geometrical parameters for spherically focused transducers

This paper proposes a novel method for determining effective geometrical parameters (GPs) of spherically focused transducer. Theoretical basis of the method is the spatial impulse response method (SIRM) that is a powerful tool to calculate transient fields from a piston-like transducer. Experimentally, the method is implemented by measuring arrival times of the pulse signals (either transmission or pulse echo signals) and using them to determine the time intervals between the direct and edge wave pulses. Since the time intervals for a given measurement position depend on the transducer's GPs, then the effective GPs can be obtained. The measurements are carried out in the near-field so that the time intervals can be resolved. The proposed method has been applied to a spherically focused transducer operating in pulse echo mode. The results have shown that the effective GPs used in the SIRM give a closer agreement between the theory and the measurements than the nominal GPs. The method is best suited for characterizing broadband transducers with short pulse excitations. With certain modification it can be also applied to narrowband transducers. The method can be also applied to transducers of other shapes, e.g., planar circle, and planar or curved rectangle provided the piston approximation is appropriate.     

圆环状复合材料高频宽带水声换能器

研制了一种圆环状高频宽带水声换能器。利用压电复合材料Q值低从而频带宽的特点,采用双环轴向堆叠产生双模态耦合的结构方式拓宽换能器的带宽。通过理论分析与仿真计算,确定敏感元件几何尺寸。用切割-浇注-被覆电极等工艺制备出压电复合材料圆环;再将制备出的外径相同,壁厚不等的压电复合材料圆环轴向叠堆制成叠堆敏感元件,最后灌注防水透声层制成换能器。对制得的换能器进行水下性能测试,测得该换能器谐振频率为410 kHz,最大发射电压响应为150 dB,-3 dB带宽达60 kHz,水平指向性开角(-5 dB)为360°,-3 dB垂直指向性开角约20°。结果表明将复合材料圆环轴向堆叠可显著拓展换能器的带宽,且实现声波的水平全向发射。      

Characteristics of backing impacts on the performance of the thickness mode piezoelectric transducer

The impacts of the thickness, the specific acoustic impedance and the mechanical loss factor of the backing on the performance of the thickness mode piezoelectric transducer are systemically studied, which are focused on the effective electromechanical coupling coefficient and the mechanical quality factor near the center frequency. The results show that with contin?uous increasing of the backing thickness, the effective electromechanical coupling coefficient and the mechanical quality factor are found rapidly declined by oscillation way. With the increase of the difference value of the acoustic impedance between the backing material and the piezoelec?tric material, the effective electromechanical coupling coefficient deceases and the mechanical quality factor increases. Under condition that the thickness of the piezoelectric material is fixed, the effective electromechanical coupling coefficient is found declined with the increase of the mechanical loss factor by monotonous way. The mechanical quality factor has minimum value and the electric characteristic curve tends to be smooth in a given frequency range. The equivalent circuit theory result is in good agreement with the ones by finite element method and the experimental results. The work mentioned above provides a theoretical guidance for the design and experimental fabrication of the thickness mode piezoelectric transducer.     

Temporal and spatial apodization in defocused acoustic transmission microscopy

Two non-confocally adjusted spherical transducers are employed to implement an acoustic microscope operating in transmission with an approximately line-shaped point spread function (PSF). Such a PSF is of advantage in acoustic transmission line tomography and spatially resolved velocity measurements in solids. The foci of the transducers are viewed as diffraction-limited point transducers and appropriate time-selective signal acquisition is designed to restrict the ultrasound wave paths to the line connecting them. It is found that for typical commercially available transducers the largest contribution to the detected signal is not due to the direct ultrasound wave but due to the edge waves emanating from the rim of the focusing transducer. This poses constraints on achieving a line-shaped PSF in defocused acoustic transmission microscopy. It is shown that, due to the strong contribution from edge waves, it is impossible to achieve a line-shaped PSF in the case of application of a long exciting toneburst. The influence of the exciting pulse length, as well as the position of the time gate on the obtainable PSF is investigated.     

Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process

For medical high frequency acoustic imaging purposes the reduction in size of a single transducer element for one-dimensional and even more for two-dimensional arrays is more and more limited by fabrication and cabling technology. In the fields of industrial distance measurement and simple object recognition low cost phased arrays are lacking. Both problems can be solved with micromachined ultrasound transducers (MUTs). A single transducer is made of a large number of microscopic elements. Because of the array structure of these transducers, groups of elements can be built up and used as a phased array. By integrating parts of the sensor electronics on chip, the cabling effort for arrays can be reduced markedly. In contrast to standard ultrasonic technology, which is based on massive thickness resonators, vibrating membranes are the radiating elements of the MUTs. New micromachining technologies have emerged, allowing a highly reproducible fabrication of electrostatically driven membranes with gap heights below 500 nm. A microelectronic BiCMOS process was extended for surface micromechanics (T. Scheiter et al., Proceedings 11th European Conference on Solid-State Transducers, Warsaw, Vol. 3, 1997, pp. 1595-1598). Additional process steps were included for the realization of the membranes which form sealed cavities with the underlying substrate. Membrane and substrate are the opposite electrodes of a capacitive transducer. The transducers can be integrated monolithically on one chip together with the driving, preamplifying and multiplexing circuitry, thus reducing parasitic capacities and noise level significantly. Owing to their low mass the transducers are very well matched to fluid loads, resulting in a very high bandwidth of 50-100% (C. Eccardt et al., Proceedings Ultrasonics Symposium, San Antonio, Vol. 2, 1996, pp. 959-962; P.C. Eccardt et al., Proceedings of the 1997 Ultrasonics Symposium, Toronto, Vol. 2, 1997, pp. 1609-1618). In the following it is shown how the BiCMOS process has been modified to meet the demands for ultrasound generation and reception. Bias and driving voltages have been reduced down to the 10 V range. The electromechanical coupling is now almost comparable with that for piezoelectric transducers. The measurements exhibit sound pressures and bandwidths that are at least comparable with those of conventional piezoelectric transducer arrays.     

Theoretical analysis of an ultrasonic interferometer for precise measurements at high pressures

Expressions making it possible to calculate the transmission coefficient of an ultrasonic interferometer, its Q factor and errors of interferometric measurements are presented. These expressions are obtained on the basis of a one-dimensional model which takes into account the non-ideal reflection of acoustic waves from the transducers, diffraction losses and electromechanical properties of transducers. Fixed path ultrasonic interferometers which are widely used for high precision measurements of ultrasound absorption and velocity in liquids, include air-backed transducers. Air-backing limits the application of these interferometers for the measurements under the high pressures. The influence of non-gaseous backing of transducers on the characteristics of an interferometer is theoretically analysed by means of suggested expressions. Frequency dependences of main parameters of the interferometer are obtained. The possibility of high precision measurements of velocity and absorption of ultrasound in liquids under the high pressures by means of fixed path interferometers with liquid-backed transducers is shown.     

Study on the compound multifrequency ultrasonic transducer in flexural vibration

A new type of compound multifrequency ultrasonic transducer is analyzed in this paper. The compound multifrequency ultrasonic transducer consists of two sandwiched ultrasonic transducers and a rectangular radiator. In virtue of the coupling between longitudinal vibration of the sandwiched ultrasonic transducers and flexural vibration of the rectangular radiator, the compound multifrequency ultrasonic transducer can produce several resonance frequencies. Some compound multifrequency ultrasonic transducers are designed and simulated by finite element method (ANSYS), and modal shapes and harmonic response are analyzed. The compound multifrequency ultrasonic transducers are designed and manufactured. The resonance frequencies are measured and compared with the numerical results. The effect of the geometrical dimensions of the compound multifrequency ultrasonic transducer and the location of two sandwiched ultrasonic transducers on the compound multifrequency ultrasonic transducer is discussed. It is shown experimentally and numerically that the compound multifrequency ultrasonic transducer has several resonance frequencies.