Surface diffusion of Pb on clean Si surfaces

Pb diffusion on clean Si(111), (100), and (110) surfaces was studied by Auger electron spectroscopy and low energy electron diffraction in the temperature range from 100 to 300°C. It is shown that lead transport along sillicon surfaces takes place via the mechanism of solid-phase spreading with a sharp moving boundary. The temperature dependence of the Pb diffusion coefficients on Si(111), (100) and (110) surfaces have been obtained. A Si(110)-4×2-Pb surface structure has been observed for the first time.     

Mechanism of the transport of nickel along a Si(111) surface in the presence of adsorbed cobalt atoms

The mechanism of the transport of nickel along a Si(111) surface in the presence of adsorbed cobalt atoms is established by LEED and Auger electronic spectroscopy. The mechanism consists of diffusion of nickel atoms through the bulk and segregation of the atoms on the surface during annealing. This mechanism of nickel transport plays the governing role at temperatures below 700°C, where nickel transport along clean silicon surfaces is not observed. It is found that the nickel segregation factor is what determines the lowest temperature at which nickel transport is observed on clean silicon surfaces. Pis’ma Zh. éksp. Teor. Fiz. 69, No. 6, 423–425 (25 March 1999)     

Formation of copper islands on a native SiO2 surface at elevated temperatures

A combination of in situ X-ray photoelectron spectroscopy analysis and ex situ scanning electron- and atomic force microscopy has been used to study the formation of copper islands upon Cu deposition at elevated temperatures as a basis for the guided growth of copper islands. Two different temperature regions have been found: (I) up to 250 °C only close packed islands are formed due to low diffusion length of copper atoms on the surface. The SiO₂ film acts as a barrier protecting the silicon substrate from diffusion of Cu atoms from oxide surface. (II) The deposition at temperatures above 300 °C leads to the formation of separate islands which are (primarily at higher temperatures) crystalline. At these temperatures, copper atoms diffuse through the SiO₂ layer. However, they are not entirely dissolved in the bulk but a fraction of them forms a Cu rich layer in the vicinity of SiO₂/Si interface. The high copper concentration in this layer lowers the concentration gradient between the surface and the substrate and, consequently, inhibits the diffusion of Cu atoms into the substrate. Hence, the Cu islands remain on the surface even at temperatures as high as 450 °C.     

Surface diffusion of Ni on Si(111) with coadsorption of Co

The effect of the coadsorption of Co and Ni on an Si(111) surface structure and on the diffusion of adsorbed atoms is investigated by low-energy electron diffraction and Auger electron spectroscopy. It is established that surface structures similar to those formed with the adsorption of Co alone are formed with the Ni and Co coadsorption on an Si(111) surface. It is found that the contribution of surface diffusion to the transport of Ni atoms is sharply higher on an Si(111) surface with submonolayer Co concentrations in the temperature range 500–750 °C than for a pure surface, where the main mechanism of Ni transport along the surface is diffusion of Ni atoms through the bulk of Si. Fiz. Tverd. Tela (St. Petersburg) 41, 1489–1494 (August 1999)     

Influence of the Si(111)-7×7 surface reconstruction on the diffusion of strontium atoms

The diffusion of strontium atoms on the Si(111) surface at room temperature has been investigated using scanning tunnel microscopy and simulation carried out in terms of the density functional theory and the Monte Carlo method. It has been found that the reconstruction of a clean silicon surface with a 7 × 7 structure has a profound effect on the diffusion process. The average velocity of motion of a strontium atom in a unit cell of the 7 × 7 structure has been calculated. The main diffusion paths of a strontium atom and the corresponding activation energies have been determined. It has been demonstrated that the formation of scanning tunnel microscope images of the Si(111)-7 × 7 surface with adsorbed strontium atoms is significantly affected by the shift of the electron density from the strontium atom to the nearest neighbor silicon adatoms in the 7 × 7 structure.     

Structural properties and diffusion processes of the Cu3Au (0 0 1) surface

The surface relaxation and surface energy of both the mixed AuCu and pure Cu terminated Cu₃Au (0 0 1) surfaces are simulated and calculated by using the modified analytical embedded-atom method. We find that the mixed AuCu termination is energetically preferred over the pure Cu termination thereby the mono-vacancy diffusion is also investigated in the topmost few layers of the mixed AuCu terminated Cu₃Au (0 0 1) surface. In the mixed AuCu terminated surface the relaxed Au atoms are raised above Cu atoms for 0.13 Å in the topmost layer. All the surface atoms displace outwards, this effect occurs in the first three layers and changes the first two inter-layer spacing. For mono-vacancy migration in the first layer, the migration energies of Au and Cu mono-vacancy via two-type in-plane displace: the nearest neighbor jump (NNJ) and the second nearest neighbor jump (2NNJ), are calculated and the results show that the NNJ requires a much lower energy than 2NNJ. For the evolution of the energy requirements for successive nearest neighbor jumps (SNNJ) along three different paths: circularity, zigzag and beeline, we find that the circularity path is preferred over the other two paths due to its minimum energy barriers and final energies. In the second layer, the NN jumps in intra- and inter-layer of the Cu mono-vacancy are investigated. The calculated energy barriers and final energies show that the vacancy prefer jump up to a proximate Cu site. This replacement between the Cu vacancy in the second layer and Cu atom in the first layer is remunerative for the Au atoms enrichment in the topmost layer.     

Effect of adsorbed Sn on Ge diffusivity on Si(111) surface

The effect of adsorbed Sn as a surfactant on Ge diffusion on a Si(111) surface has been studied by Low Energy Electron Diffraction and Auger Electron Spectroscopy. The experimental dependence of Ge diffusion coefficients on the Si(111) surface versus temperature in the presence of adsorbed Sn atoms has been measured in the range from 300 to 650°C. It has been shown that at a Sn coverage of about 1 monolayer the mobility of Ge atoms increases by several orders of magnitude.      

Si/Gen/Si(001)异质结薄膜的掠入射荧光X射线吸收精细结构研究

利用掠入射荧光X射线吸收精细结构(XAFS)方法研究了在400℃的温度下分子束外延生长的Si/Ge_n/Si(001)异质结薄膜(n=1，2，4和8个原子层)中Ge原子的局域环境结构.结果表明，在1至2个Ge原子层(ML)生长厚度的异质结薄膜中，Ge原子的第一近邻配位主要是Si原子.随着Ge原子层厚度增加到4ML，Ge原子的最近邻配位壳层中的Ge-Ge配位的平均配位数增加到1.3.当Ge原子层厚度增加到8ML时，第一配位壳层中的Ge-Ge配位占的比例只有55%.这表明在400℃的生长条件下，Ge原子有很强的迁移到Si覆盖层的能力.随着Ge层厚度从1 增加到2，4和8ML，Ge原子迁移到Si覆盖层的量由0.5ML分别增加到1.5，2.0和3.0ML.认为在覆盖Si过程中Ge原子的迁移主要是通过产生Ge原子表面偏析来降低表面能和Ge层的应变能. 关键词： XAFS n/Si(001)异质膜')" href="#">Si/Ge_n/Si(001)异质膜 迁移效应     

He,Au离子辐照AuCu_3致元素表面偏析

采用磁控溅射方法在单晶硅(111)衬底上制备了AuCu_3薄膜,用2 MeV He离子和1 MeV Au离子对薄膜进行辐照,用卢瑟福背散射对He,Au离子辐照前后AuCu_3薄膜近表面的成分变化进行了分析,对不同离子辐照导致的表面元素偏析行为进行了研究.结果表明:当2 MeV He离子辐照时,随着辐照剂量增大,观察到样品近表面Au元素偏析的趋势;当1 MeV Au离子辐照时,随着辐照剂量增大,观察到样品近表面Cu元素偏析的趋势,与He离子辐照相反.通过对He,Au离子在样品中产生的靶原子空位及其分布分析,发现靶原子空位浓度分布的梯度是导致两种不同表面元素偏析趋势的原因,空位扩散是其中的主要机理.     

高温退火处理下SiNx薄膜组成及键合结构变化

采用等离子增强化学气相沉积法, 以氨气和硅烷为反应气体, p型单晶硅为衬底, 低温下(200 ℃)制备了非化学计量比氮化硅(SiN_x)薄膜. 在N₂氛围中, 于500–1100 ℃范围内对薄膜进行热退火处理. 室温下分别使用Fourier变换红外吸收(FTIR)光谱技术和X射线光电子能谱(XPS)技术测量未退火以及退火处理后SiN_x薄膜的Si–N, Si–H, N–H键键合结构和Si 2p, N 1s电子结合能以及薄膜内N和Si原子含量比值R的变化. 详细讨论了不同温度退火处理下SiN_x薄膜的FTIR和XPS光谱演化同薄膜内Si, N, H原子间键合方式变化之间的关系. 通过分析FTIR和XPS光谱发现退火温度低于800 ℃时, SiN_x薄膜内Si–H和N–H键断裂后主要形成Si–N键; 当退火温度高于800 ℃时薄膜内Si–H和N–H键断裂利于N元素逸出和Si纳米粒子的形成; 当退火温度达到1100 ℃时N₂与SiN_x薄膜产生化学反应导致薄膜内N和Si原子含量比值R增加. 这些结果有助于控制高温下SiN_x薄膜可能产生的化学反应和优化SiN_x薄膜内的Si纳米粒子制备参数. 关键词： x薄膜')" href="#">SiN_x薄膜 Fourier变换红外吸收光谱 X射线光电子能谱 键合结构     

Theoretical study of sorption and diffusion of lithium atoms on the surface of crystalline silicon and inside it

The energy of the sorption and diffusion of lithium atoms on the reconstructed (4 × 2) (100) silicon surface in the process of their transport into near-surface layers, as well as inside crystalline silicon, at various lithium concentrations have been investigated within the density functional theory. It has been shown that single lithium atoms easily migrate on the (100) surface and gradually fill the surface states (T3 and L) located in channels between silicon dimers. The diffusion of lithium into near-surface silicon layers is hampered because of high potential barriers of the transition (1.22 eV). The dependences of the binding energy, potential barriers, and diffusion coefficient inside silicon on distances to the nearest lithium atoms have also been examined. It has been shown that an increase in the concentration of lithium to the Li_0.5Si composition significantly reduces the transition energy (from 0.90 to 0.36 eV) and strongly increases (by one to three orders of magnitude) the lithium diffusion rate.     

Fast measurement of rocking curve of reflection high-energy electron diffraction by using quasi-1D convergent beam

In order to investigate dynamic change in surface structure, we tried to measure the rocking curve of reflection high-energy electron diffraction (RHEED) by using a quasi-1D convergent beam method, which means a superposition of a hundred RHEED patterns at different glancing angles on one image. After we have checked the experimental accuracy, it is confirmed that the measurement time is shortened to 0.3 s by using this method. We also show an application of this method to a real time observation of surface segregation of B atoms while a highly B-doped Si is annealed.     

Influence of the state of the bulk of the sample on the formation and thermal stability of the surface silicide on W(100)

The formation and destruction of the surface silicide on W(100) after cleaning of the sample surface and bulk in various regimes is studied by high-resolution Auger electron spectroscopy. It is shown that the cleanness of the bulk has practically no influence on the laws governing the formation of the surface silicide when Si atoms are adsorbed on a heated W surface and that almost up to completion of its formation all the silicon atoms impinging on the surface, from the very first, remain on it and are incorporated into the surface silicide. The destruction of the surface silicide depends in a definite manner on the state of the bulk, and at T=1400 K it is apparently limited in the early stages by the passage of Si atoms from the surface to the subsurface layer and in subsequent stages by the diffusion of silicon within the substrate. The bulk silicon density that limits the destruction of the surface silicide is estimated. Zh. Tekh. Fiz. 67, 137–140 (July 1997)     

The effect of embedded Pb on Cu diffusion on Pb/Cu(1 1 1) surface alloys

We have used scanning tunneling microscopy and low-energy electron microscopy to measure the thermal decay of two-dimensional Cu, Pb-overlayer, and Pb-Cu alloy islands on Pb-Cu(1 1 1) surface alloys. Decay rates covering 6-7 orders of magnitude are accessible by applying the two techniques to the same system. We find that Cu adatom diffusion across the surface alloy is rate-limiting for the decay of both Pb and Pb-Cu islands on the surface alloy and that this rate decreases monotonically with increasing Pb concentration in the alloy. The decrease is attributed to repulsive interactions between Cu adatoms and embedded Pb atoms in the surface alloy. The measured temperature dependences of island decay rates are consistent with first-principles calculations of the Cu binding and diffusion energies related to this “site-blocking” effect.     

Surface modification of Al-20Si alloy by high current pulsed electron beam

Hypereutectic Al-20Si (Si 20 wt.%, Al balance)alloy surface was treated with high current pulsed electron beam (HCPEB) under different pulse numbers. The results indicate that HCPEB irradiation induces the formation of metastable structures on the treated surface. The coarse primary Si particle melts, producing a “halo” microstructure with primary Si as the center on the melted surface. A supersaturated solid solution of Al is formed in the melted layer caused by Si atoms dissolving into the Al matrix. Cross-section structure analysis shows that a 4 μm remelted layer is formed underneath the top surface of the HCEPB-treated sample. Compared with the matrix, the Al and Si elements in the remelted layer are distributed uniformly. In addition, the grains of the Al-20Si alloy surface are refined after HCPEB treatment, as shown by TEM observation. Nano-silicon particles are dispersed on the surface of remelted layer. Polygonal subgrains, approximately 50-100 nm in size, are formed in the Al matrix. The hardness test results show that the microhardness of the α(Al) and eutectic structure is increased with increasing pulse number. The hardness of the “halo” microstructure presents a gradient change after 15 pulse treatment due to the diffusion of Si atoms. Furthermore, hardness tests of the cross-section at different depths show that the microhardness of the remelted layer is higher than that of the matrix. Therefore, HCPEB technology is a good surface modification method for enhancing the surface hardness of hypereutectic Al-20Si alloy.     

Surface diffusion during decay of nano-island on Si(1 0 0) at high temperature

Surface diffusion during decay of a two-dimensional nano-island formed on Si(1 0 0) surface at 750-800 K is studied using STM and a kinetic Monte Carlo simulation. From a surface diffusion point of view, decay proceeds so that the total diffusion rate of atoms on a surface decreases. Atoms at step edges move more frequently than terrace atoms, which results in decay from step edges of the island. In addition, a terrace atom takes part in surface diffusion in the same way as an atom from steps of the island once it hops up on a terrace leaving a vacancy. The mass transport is not a specific atom process but terrace atoms and vacancies on the terrace are involved. Repeated upward and downward hops of atoms and their difference are combined with surface diffusion, which leads to the mass transport. Some tracks of atom using simulation show random walk with preferential diffusion along step edges, re-entering to the island, exchange of diffusing atom and filling in a vacancy on the terrace. The motion of the center of the island to the upper side of the terrace observed by STM is also well reproduced in the simulation.     

Specific features of the formation of ytterbium films on the Si(111) surface at room temperature

The processes accompanying the formation of ytterbium films on the Si(111) surface at room temperature are investigated by the contact potential difference method, Auger electron spectroscopy, low-energy electron diffraction, and thermal desorption spectroscopy. It is shown that the grown metal films are uniform in thickness and that Si atoms virtually do not dissolve in the films. The atoms of the silicon substrate can diffuse in limited amounts into the Yb metal film only when the surface is bombarded by high-energy primary electron beams employed in Auger electron spectroscopy. The results obtained permit the conclusion that the previously observed oscillations of the work function in Yb-Si(111) thin-film structures cannot originate from dissolution of silicon atoms in the ytterbium film.     

Theoretical study on diffusion mechanism of fluorine atom adsorbed on Si(111) reconstructed surface

We study diffusion mechanisms of fluorine atom adsorbed on Si(111) reconstructed surface by means of the first-principles density functional calculation. Recently, it was revealed experimentally that the fluorine diffusion is assisted by extra silicon atoms diffusing freely on the surface, whereas the detailed mechanism of the Si assist has not been understood. We first investigate F atom adsorption structures with and without a Si atom and find that extra Si atoms do not affect them. Next, we investigate the diffusion mechanism, considering four models in which extra silicon atoms act a different role, and find that SiF-complex diffusion model with activation energy of 1.34 eV is appropriate to explain the experiment. In this model, the Si–F bond is kept during diffusion, while in the others, it repeats breaking and re-bonding. This diffusion mechanism is also understood as the Si diffusion with carrying an F atom. We analyze why this diffusion mechanism is preferable to the others and find that two important features play roles. One is the strong Si-F bond that favors to keep the complex form, and the other is the existence of an extra silicon atom, which takes over the adatom position to passivate dangling bonds left behind after the SiF-complex removal.     

利用Keating模型计算Si（1-x）Gex及非晶硅的拉曼频移

利用Keating模型计算了Si_（1-x）Ge_x合金中Si—Si,Ge—Ge和Si—Ge三种振动模态的拉曼频移,计算分别获得Ge浓度为01,05和09时,Si—Ge的振动拉曼频移分别为40275,41339和38815 cm^-1,这些结果与文献的实验结果符合,证明了Keating模型建立的关于原子振动模型是有效的,并可以利用拉伸压缩和相邻原子键之间弹性系数变化获得处于应变状态的拉曼光谱频率.利用Kea 关键词： Keating模型 拉曼光谱 （1-x）Ge_x')" href="#">Si_（1-x）Ge_x 非晶硅