多孔阳极氧化铝膜的制备研究

在直流恒压下,在不同的酸性溶液中对铝片实施两步阳极氧化制备多孔氧化铝膜,在磷酸溶液中制得的模板孔径大,并且电解时间缩短,加快了制备模板的过程。同时利用阳极氧化初期电流密度的变化,分析了多孔氧化铝膜的形成机理。     

The influence of initial surface conditions on field crystallization of anodic aluminum oxide films determined by synchrotron X‐ray diffraction

X‐ray diffraction measurements were performed using synchrotron radiation at the SPring‐8 facility and electrochemical techniques to investigate the effect of polishing methods and storage conditions on the crystal structure of air‐formed oxide films and anodic oxide films formed on highly pure aluminum. Storage in an N₂ environment hinders local film breakdown during anodizing, and it was established that the X‐ray diffraction measurements showed the presence of a γ‐Al₂O₃ in the anodic oxide film formed on mechanically polished (MP) specimens. Formation of γ‐Al₂O₃ during anodizing was inhibited by electropolishing because of the removal of the work‐hardened layer that was formed on the MP by electro‐polishing. The X‐ray diffraction results do not show clear differences in the influence of the polishing method on the crystal structure of air formed oxide film. This is due to the very fast oxidation rate of the air‐formed oxide film and very long storage times for the X‐ray measurements. The anodic oxide film formed on aluminum, which has a very flat surface, shows color and the color depended on grain orientation. The electrochemical impedance of the MP specimen is slightly lower than that of the mechanically and then electrochemically polished specimen at the middle frequency range. This impedance difference may be due to formation of γ‐Al₂O₃ in the amorphous anodic oxide film and the thickness of the film. Copyright © 2010 John Wiley & Sons, Ltd.     

纳米孔阵列阳极氧化铝膜的制备和表征

本文通过在0℃、0.5mol·L^-1的草酸溶液中阳极氧化高纯铝片的方法制得了阳极氧化铝(AAO)膜，并用扫描电子显微镜(SEM)和原子力显微镜(AFM)对AAO膜的形貌和结构进行了表征。结果表明，阻挡层AAO膜中大小一致的膜胞在铝/氧化铝界面上排成六方形阵列;有孔层AAO膜中含有高度有序的纳米孔阵列和膜胞阵列，并且孔的直径和膜胞的尺寸都具有较窄的分布。另外，考察了阳极氧化电压对膜胞尺寸、孔径大小、孔密度和膜胞密度的影响，表明在一定的电压范围内，膜胞和孔径都随电压的升高而增大，而孔密度和膜胞密度却随电压的升高而减小。     

Fast migration of fluoride ions in growing anodic titanium oxide

The rapid inward migration of fluoride ions in growing anodic titanium oxide under a high electric field has been elucidated by anodizing a Ti–12 at% silicon alloy, where film growth proceeds at nearly 100% efficiency in selected electrolytes. Further, incorporated silicon species in the anodic film are immobile, acting as marker species. The migration rate of fluoride ions is determined precisely by three-stage anodizing, consisting of initial anodic film formation at a constant current density to 50 V in ammonium pentaborate electrolyte, subsequent incorporation of fluoride ions by reanodizing to 55 V in ammonium fluoride electrolyte and, finally, anodizing again in ammonium pentaborate electrolyte at high current efficiency. The resultant films were analyzed by glow discharge optical emission spectroscopy to reveal the depth distribution of fluoride ions and the location of the silicon marker species. The fluoride ions migrate inward at twice the rate of O²⁻ ions. Consequently, anodizing of titanium in fluoride-containing electrolytes develops a fluoride-rich layer that separates the alloy substrate from the anodic oxide, with eventual detachment of the film from the substrate.     

Dielectric properties of Al–Si composite oxide films formed on electropolished and DC-etched aluminum by electrophoretic sol-gel coating and anodizing

Highly pure aluminum specimens (99.99%) after electropolishing and DC-etching were covered with SiO₂ films by electrophoretic sol-gel coating and were anodized in neutral boric acid/borate solutions. Time-variations in cell voltage during electrophoretic sol-gel coating and in anode potential during anodizing were monitored. Structure and dielectric properties of the anodic oxide films were examined by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy-dispersive X-ray (EDX), and electrochemical impedance spectroscopy (EIS). It was found that electrophoretic sol-gel coating forms uniform SiO₂ films on the surface of both electropolished and DC-etched specimens. Anodizing of specimens after electrophoretic coating lead to the formation of anodic oxide films consisting of two layers: an inner alumina layer and an outer Al–Si composite oxide layer. The anodic oxide films formed, thus, had slightly higher capacitances than those formed on aluminum without any coating. Higher heating temperatures after electrophoretic deposition caused the increase in capacitance of anodic oxide films more effectively. Anodizing in a boric acid solution after SiO₂ coating on DC-etched foil allowed the anode potential to reach a value higher than 1,000 V, resulting in 39% higher capacitances than those on specimens without SiO₂ film. Dedicated to Professor Su-Il Pyun on the occasion of his 65th birthday.     

Highly increased capacitance and thermal stability of anodic oxide films on oxygen-incorporated Zr-Ti alloy

Heat treatment of Zr-24 at% Ti alloy with barrier-type dielectric anodic oxide films was conducted at 473 K in air to examine the thermal stability of the dielectric oxide films for possible electrolytic capacitor application. The anodic oxide film was formed by anodizing of the alloy at 50 V for 30 min in 0.1 mol dm^?3 ammonium pentaborate electrolyte. The anodic oxide film of 125 nm thickness was crystalline, containing both monoclinic and tetragonal ZrO₂ phase. It was found that marked thickening of the oxide film with generation of cracks occurred during heat treatment at 473 K. Thus, the dielectric loss was largely increased along with the capacitance increase. In contrast, the anodic oxide film formed on the oxygen-incorporated alloy remained uniform, and no significant increase in dielectric loss was observed even after the heat treatment. The capacitance of the anodic film became as high as 4.8 mF m^?2, which was nearly twice that on Ta. The high capacitance was associated with the preferential formation of tetragonal ZrO₂ phase in the anodic oxide film on the oxygen-incorporated alloy. Findings indicated that the oxygen-incorporated Zr-Ti alloy is a promising novel material for capacitor application.     

Porous alumina membranes with branched nanopores as templates for fabrication of Y-shaped nanowire arrays

Porous anodic alumina membranes with Y-branched and double-branched nanopores were fabricated by the stepwise reduction of anodizing potential during the second step of anodization carried out in 0.3 M oxalic acid. The process of nanoporous layer formation and influence of anodizing parameters on structural features of as-obtained anodic aluminum oxide (AAO) membranes were discussed in detail. The pore rearrangement process occurring after the potential decrease was investigated on the basis of the current density vs. time curves, and results were correlated with the field-emission scanning electron microscope images of the pore bottoms taken after different anodizing durations. It was found that the reorganization of nanopores begins after 600 and 500 s from the time of the potential reduction to 42 and 30 V and the process seems to be completed after about 900 and 800 s, respectively. The through-hole AAO membranes were used as templates for the fabrication of gold and polystyrene nanowires via electrochemical deposition and simple immersing in the polymer solution, respectively. The arrays of hierarchically branched nanowires were synthesized, and the dimensions of nanowires were consistent with the shape and structure of used AAO templates.

     

Nanostructure Analysis of Anodic Films Formed on Aluminum-Focusing on the Effects of Electric Field Strength and Electrolyte Anions

In this review, the research conducted by the authors on anodic oxide films on aluminum is described, paying particular attention to how the electric field strength, as a factor other than voltage, controls the nanostructures and properties of the films. It will also be indicated what factors contribute to the formation of defects, which, in contrast to the ideal or model film structure, contains a significant number of defects in the film. In addition to electrochemical measurements, the films were examined with a variety of advanced instruments, including electron microscopes, to confirm the “reality of film nanostructure” from a slightly different angle than the conventional view. The following topics on anodic films formed in four types of major anodizing electrolytes are discussed: pore initiation process, steady-state porous structure, sealing mechanism, the relationship between cell parameters and voltage/electric field strength, amount and depth of anion incorporation, electrolyte types, radial branching of pores, atypical pore structures, defect formation mechanism, self-ordering, Al coordination number, and the creation of α-alumina membranes.     

Anodic oxidation of complex shaped items of aluminum and aluminum alloys with subsequent electrodeposition of copper coatings

It was shown that the method of anodization of aluminum and aluminum alloys can be applied for subsequent plating of highly adherent copper coating instead of the known zincate treatment with additional annealing. Fluorine-containing additives in anodizing electrolyte were proposed as activator of oxide film. The parameters of the anodic film (thickness, porosity, and microroughness) were calculated. The plated quality copper coatings have high adhesion to the aluminum support, and no additional heat treatment is required. This considerably reduces the processing time for deposition of multilayer coatings and decreases the material costs.     

Growth of anodic oxide films on titanium-nickel alloys and breakdown of alloy passivity with halide ions

Some characteristics of anodic oxide films growth on titanium-nickel alloys in the borate buffer solution and local breakdown of alloy passivity in the chloride and bromide solutions were determined from the experimental results. In particular, the dependences of anodic oxide film thickness at a given formation potential, anodizing constant, and potential of passivity breakdown (anodic-anionic activation) on the nickel content in the alloys are obtained.     

Anodic alumina membranes with defined pore diameters and thicknesses obtained by adjusting the anodizing duration and pore opening/widening time

The through-hole porous anodic aluminum oxide (AAO) membranes were fabricated by a simple two-step anodization of aluminum in 0.3?M oxalic acid, 0.3?M sulfuric acid, and 2?wt.% phosphoric acid solutions under different operating conditions followed by the removal of the remaining Al substrate and the pore opening/widening process. The effect of duration of the second anodizing step on the thickness of the porous oxide layer and the influence of other anodizing conditions such as applied voltage, type of electrolyte, and purity of the substrate on the rate of porous oxide growth were discussed in detail. The pore opening procedure for all synthesized membranes was optimized, and the influence of the duration of chemical etching on structural features of AAO membranes, especially pore diameter, was studied. The rate of pore widening was established for AAO membranes formed in various anodizing electrolytes and for different temperatures of 5?wt.% H₃PO₄ used for alumina dissolution.     

Highly increased breakdown potential of anodic films on aluminum using a sealed porous layer

The growth of a uniform barrier-type anodic film on aluminum is usually terminated by electric breakdown, which is controlled by the resistance of electrolyte or anion concentration. In this study, highly resistive porous layers have been introduced by anodizing aluminum in sulfuric acid electrolyte followed by boiling water treatment to examine their influence on the electric breakdown potential. The pores of the porous alumina film are sealed by forming hydrated alumina (pseudo-boehmite) after the boiling water treatment. The breakdown potential increases to over 1500 V for the pore-sealed aluminum specimens on anodizing in sodium tungstate electrolyte. The electrochemical impedance spectroscopy measurements revealed an increased resistance of the porous layer after the pore-sealing treatment. GDOES depth profile analysis disclosed that the sealed porous layer impedes the incorporation of tungsten species into the barrier layer. The introduction of a highly resistive layer that also suppresses the anion incorporation on aluminum is effective in increasing the breakdown potential of anodic films.     

Formation and dielectric properties of anodic oxide films on Zr–Al alloys

Zr–Al alloys containing up to 26 at.% aluminum, prepared by magnetron sputtering, have been anodized in 0.1 mol dm⁻³ ammonium pentaborate electrolyte, and the structure and dielectric properties of the resultant anodic oxide films have been examined by grazing incidence X-ray diffraction, transmission electron microscopy, Rutherford backscattering spectroscopy, and AC impedance spectroscopy. The anodic oxide film formed on zirconium consists of monoclinic and tetragonal ZrO₂ with the former being a major phase. Two-layered anodic oxide films, comprising an outer thin amorphous layer and an inner main layer of crystalline tetragonal ZrO₂ phase, are formed on the Zr–Al alloys containing 5 to 16 at.% aluminum. Further increase in the aluminum content to 26 at.% results in the formation of amorphous oxide layer throughout the thickness. The anodic oxide films become thin with increasing aluminum content, while the relative permittivity of anodic oxide shows a maximum at the aluminum content of 11 at.%. Due to major contribution of permittivity enhancement, the maximum capacitance of the anodic oxide films is obtained on the Zr–11 at.% Al alloy, being 1.7 times than on zirconium at the formation voltage of 100 V.     

Anodic alumina membranes with defined pore diameters and thicknesses obtained by adjusting the anodizing duration and pore opening/widening time

The through-hole porous anodic aluminum oxide (AAO) membranes were fabricated by a simple two-step anodization of aluminum in 0.3 M oxalic acid, 0.3 M sulfuric acid, and 2 wt.% phosphoric acid solutions under different operating conditions followed by the removal of the remaining Al substrate and the pore opening/widening process. The effect of duration of the second anodizing step on the thickness of the porous oxide layer and the influence of other anodizing conditions such as applied voltage, type of electrolyte, and purity of the substrate on the rate of porous oxide growth were discussed in detail. The pore opening procedure for all synthesized membranes was optimized, and the influence of the duration of chemical etching on structural features of AAO membranes, especially pore diameter, was studied. The rate of pore widening was established for AAO membranes formed in various anodizing electrolytes and for different temperatures of 5 wt.% H₃PO₄ used for alumina dissolution.

     

Toward a quantitative description of the anodic oxide films on aluminum

A method to quantify the composition of anodic oxide films on aluminum using Infrared Spectroscopic Ellipsometry (IRSE) is proposed. It consists of obtaining the absorption coefficient of the film as a function of wavelength. Using values of the absorption coefficients for the pure components of the film, the percentages (mole or wt%) of each component in the sample can be calculated.The method is demonstrated in a study of the structure of the oxide film on electropolished aluminum and the anodically formed barrier layer film. Both surface oxides were found to be initially a form of amorphous Al₂O₃. While the barrier film is essentially free of water as prepared, the film on electropolished aluminum contained about 25 wt% water. Hydration of both types of films by immersion in boiling water results in the formation of pseudoboehmite (AlOOH). The technique may have more general applicability to the quantitative determination of the composition of corrosion films and other surface layers on metals.     

Fabrication of three dimensional interconnected porous carbons from branched anodic aluminum oxide template

In this communication, the morphology of double branched anodic aluminum oxide (AAO) templates from linear down or step down function of anodizing voltage is discussed. The interconnected AAO film is obtained when the thin pore wall at the final branched channels is dissolved by chemical etching. The three-dimensional interconnected porous carbons are fabricated by carbonization of polyimide film which is negative replicated from the layered interconnected AAO template.     

用磷钨杂多酸-聚吡咯-氧化铝薄膜修饰玻碳电极测定废水中的对苯二酚

利用草酸电解液一步阳极氧化法在高纯铝表面制得纳米孔阳极氧化铝(AAO)薄膜;随后通过纳米孔阳极氧化铝模板电聚合,将磷钨杂多酸(PW12)掺杂吡咯(Py)溶液修饰到玻碳电极(GCE)表面,制得高灵敏的纳米微粒修饰电极(PW12-PPy/AGCE);研究了PW12-PPy/AGCE的伏安行为,考察了其影响因素;并将该电极应用于废水中对苯二酚的测定.结果表明,所制备的PW12-PPy/AGCE可以用于测定废水中的对苯二酚.     

Anodizing—Interplay between bath aging and oxide formation and properties

The present study investigates the interplay between ongoing bath aging during the anodizing process and the formation and properties of the anodic formed oxide layers on AA 1050 in sulfuric acid. The change in the bath over the time of use is studied by controlling the conductivity of the bath. The pH value and the concentration of Al³⁺ ions in the bath are simultaneously measured. The kinetic of the oxide formation depending on the bath aging is electrochemically investigated by repetitive potential controlled anodizing of reference samples. Supplementary material diagnostics by SEM and infrared reflection–absorption spectroscopy show a significant decrease of the oxide film thickness as well as the molecular composition with ongoing bath aging.     

Optimization of anodizing process of tantalum for Ta2O5-based capacitors

Anodic oxides were grown to 50 V on Ta in several organic ions containing anodizing baths. Their properties were compared with anodic Ta oxide film grown to the same formation voltage in 0.1 M NaOH. Anodizing process carried out in sodium citrate led to the growth of the anodic oxide with the best blocking properties whilst, when Ta is anodized in sodium adipate, a significant part of the circulated charge is wasted in side reactions, such as oxygen evolution. Photoelectrochemical measurements showed the presence of optical transitions at energy lower than the band gap for the anodic films grown in citrate and tartrate electrolytes, attributed to localized electronic states located close to the valence band mobility edge of the films generated by anions incorporation into the oxide. Differential capacitance measurements proved an increase by 17% in capacitance value for the oxide grown in citrate-containing solution with respect to that grown in NaOH electrolyte. A sketch of the energetic of the metal/oxide interface is provided.

Graphical abstract

     

Surface characteristics of anodic oxide films fabricated in acid and neutral electrolytes on Ti–10V–2Fe–3Al alloy

Anodic oxide films were fabricated on Ti–10V–2Fe–3Al alloy in acid (H₂SO₄/H₃PO₄) and neutral environmental friendly (C₄H₄O₆Na₂) electrolytes. The morphology, roughness, crystalline structure of the anodic oxide film were characterized by using scanning electron microscopy, atomic force microscopy, Raman spectroscopy and electrochemical impedance spectroscopy (EIS). The results showed that the oxide film fabricated in H₂SO₄/H₃PO₄ electrolyte had a porous structure and the thickness of the film was 3.5 µm. The oxide film fabricated in C₄H₄O₆Na₂ electrolyte presented a nonporous structure that sustained the evident microstructure of the substrate, and the thickness of the film was 6.0 µm. The surface average roughness values of the two types of films were 245 nm and 166 nm, respectively. The phase of the anodic oxide films consisted mainly of anatase and rutile. EIS results showed that the film fabricated in C₄H₄O₆Na₂ electrolyte had higher impedance of the outer layer, while the film fabricated in H₂SO₄/H₃PO₄ electrolyte had higher impedance of the inner layer. Moreover, we attempt to explain the differences in the anodizing kinetics, structure and electrochemical impedance of anodic oxide films by the different films growth processes in the two types of electrolytes. Copyright © 2012 John Wiley & Sons, Ltd.