Ultra-fast movies of thin-film laser ablation

Ultra-short-pulse laser irradiation of thin molybdenum films from the glass substrate side initiates an intact Mo disk lift off free from thermal effects. For the investigation of the underlying physical effects, ultra-fast pump–probe microscopy is used to produce stop-motion movies of the single-pulse ablation process, initiated by a 660-fs laser pulse. The ultra-fast dynamics in the femtosecond and picosecond ranges are captured by stroboscopic illumination of the sample with an optically delayed probe pulse of 510-fs duration. The nanosecond and microsecond delay ranges of the probe pulse are covered by an electronically triggered 600-ps laser. Thus, the setup enables an observation of general laser ablation processes from the femtosecond delay range up to the final state. A comparison of time- and space-resolved observations of film and glass substrate side irradiation of a 470-nm molybdenum layer reveals the driving mechanisms of the Mo disk lift off initiated by glass-side irradiation. Observations suggest that a phase explosion generates a liquid–gas mixture in the molybdenum/glass interface about 10 ps after the impact of the pump laser pulse. Then, a shock wave and gas expansion cause the molybdenum layer to bulge, while the enclosed liquid–gas mixture cools and condenses at delay times in the 100-ps range. The bulging continues for approximately 20 ns, when an intact Mo disk shears and lifts off at a velocity of above 70 m/s. As a result, the remaining hole is free from thermal effects.     

Time-resolved study of back side ablated molybdenum thin films by ultrashort laser pulses

Ultrashort laser pulses are used to ablate a thin molybdenum layer from glass by irradiating the metal film through the transparent substrate. The trajectories of ablated molybdenum fragments are recorded using a shadowgraphic setup with a time resolution in the nanosecond range. In addition, the shape of collected molybdenum fragments is examined as a function of applied fluence. It is confirmed that in a fluence regime close to the ablation threshold one single disc is ablated as a whole and its velocity is determined in the order of 50 ms^?1. In a second fluence regime, partial melting at the center of the disc is found and small melt droplets are recorded on their flight. Mo fragments ablated in this regime feature a ring-like structure with a brittle fracture at the outer and a molten appearance at the inner edge.     

Interaction of ultra-short laser pulses with CIGS and CZTSe thin films

The thin-film solar cell technologies based on complex quaternary chalcopyrite and kesterite materials are becoming more attractive due to their potential for low production costs and optimal spectral performance. As in all thin-film technologies, high efficiency of small cells might be maintained with the transition to larger areas when small segments are interconnected in series to reduce photocurrent and related ohmic losses in thin films. Interconnect formation is based on the three scribing steps, and the use of a laser is here crucial for performance of the device. We present our simulation and experimental results on the ablation process investigations in complex CuIn_1?x Ga _x Se₂ (CIGS) and Cu₂ZnSn(S,Se)₄ (CZTSe) cell’s films using ultra-short pulsed infrared (~1 μm) lasers which can be applied to the damage-free front-side scribing processes. Two types of processes were investigated—direct laser ablation of ZnO:Al/CIGS films with a variable pulse duration of a femtosecond laser and the laser-induced material removal with a picosecond laser in the ZnO:Al/CZTSe structure. It has been found that the pulse energy and the number of laser pulses have a significantly stronger effect on the ablation quality in ZnO:Al/CIGS thin films rather than the laser pulse duration. For the thin-film scribing applications, it is very important to carefully select the processing parameters and use of ultra-short femtosecond pulses does not have a significant advantage compared to picosecond laser pulses. Investigations with the ZnO:Al/CZTSe thin films showed that process of the absorber layer removal was triggered by a micro-explosive effect induced by high pressure of sublimated material due to a rapid temperature increase at the molybdenum-CZTSe interface.     

Different preparation methods and characterization of magnetic maghemite coated with chitosan

In this report, we investigated the so-called plasmonic platforms prepared to target ultra-short fluorescence and accurate instrumental response function in a time-domain spectroscopy and microscopy. The interaction of metallic nanoparticles with nearby fluorophores results in the increase of the dye fluorescence quantum yield, photostability and decrease of the lifetime parameter. The mentioned properties of platforms were applied to achieve a picosecond fluorescence lifetime (21 ps) of erythrosin B, used later as a better choice for deconvolution of fluorescence decays measured with “color” sensitive photo-detectors. The ultra-short fluorescence standard based on combination of thin layers of silver film, silver colloidal nanoparticles (about 60 nm in diameter), and top layer of erythrosin B embedded in 0.2 % poly(vinyl) alcohol. The response functions were monitored on two photo-detectors; microchannel plate photomultiplier and single photon avalanche photodiode as a Rayleigh scattering and ultra-short fluorescence. We demonstrated that use of the plasmonic base fluorescence standard as an instrumental response function results in the absence of systematic error in lifetime measurements and analysis.     

A “comb” structure measurement of a micrometer displacement in laser plasma propulsion

A “comb” structure of beam intensity distribution is achieved to measure target displacements at the micrometer level in laser plasma propulsion experiments. Compared with single-beam and double-beam detection, the “comb” structure is more suitable for a thin film targets with a velocity lower than 10^?2 m/s. Combined with a light-electric monitor, the “comb” structure can be used to measure a velocity range from 10^?3 to 1 m/s. Using this “comb” structure, the coupling coefficient of aluminum ablated by nanosecond pulse laser in air is determined and compared. The results indicate that this “comb” structure is an effective experimental approach.     

Plume optical transmission studies of a thin 2-propanol layer lifting off from a laser-heated Si substrate

Plume velocities were measured in air by an optical transmission technique as a function of laser fluence using a KrF laser for explosive boiling and lift-off of a thin variable thickness 2-propanol layer on a laser-heated Si substrate of interest for laser-assisted particle removal. The plume velocities were found to diminish with an increase in the thickness of the 2-propanol layer. This dependence was explained on the basis of the the momentum conservation rule, assuming explosive expansion of the superheated alcohol layer under spinodal conditions. PACS 05.70; 47.40.-x; 64.60.My; 64.70.Fr; 81.65.Cf     

Electron gas compression and Coulomb explosion in the surface layer of a conductor heated by femtosecond laser pulse

The hypothesis is put forward on the basis of experimental data that strong inhomogeneous heating of the skin layer of conducting materials by a femtosecond pulse gives rise to a double electrical layer that is formed of a “surface” layer of positive ions and a thin (about 1 nm) “subsurface” layer of a superdense (10²³–10²⁵ cm^?3) degenerate electron gas. The double layer breaks within one picosecond through the Coulomb explosion.     

Excimer laser crystallization of amorphous silicon on metallic substrate

An attempt has been made to achieve the crystallization of silicon thin film on metallic foils by long pulse duration excimer laser processing. Amorphous silicon thin films (100 nm) were deposited by radiofrequency magnetron sputtering on a commercial metallic alloy (N42-FeNi made of 41 % of Ni) coated by a tantalum nitride (TaN) layer. The TaN coating acts as a barrier layer, preventing the diffusion of metallic impurities in the silicon thin film during the laser annealing. An energy density threshold of 0.3 J?cm^?2, necessary for surface melting and crystallization of the amorphous silicon, was predicted by a numerical simulation of laser-induced phase transitions and witnessed by Raman analysis. Beyond this fluence, the melt depth increases with the intensification of energy density. A complete crystallization of the layer is achieved for an energy density of 0.9 J?cm^?2. Scanning electron microscopy unveils the nanostructuring of the silicon after laser irradiation, while cross-sectional transmission electron microscopy reveals the crystallites’ columnar growth.     

Ultra-short pulse laser deep drilling of C/SiC composites in air

Ultra-short pulse laser machining is an important finishing technology for high hardness materials. In this study, it demonstrated that the ultra-short pulse laser can be used to drill the film cooling holes and square holes in aero-engine turbine blades made of C/SiC composites. Both the edges and bottoms of the drilling holes are covered with small particles. The following factors have a great effect on drilling holes according to this work: (1) circular holes can be processed only at a relative small helical lines spacing. (2) With the increase of laser scanning speed, the depth of holes reduces while the diameter rarely changes. (3) Through the holes of high aspect ratio can be obtained via high processing power.     

Theoretical analysis and experimental verification of AZO/i-ZnO/CdS/CIGS multilayer stack isolation using 1064 nm and 355 nm laser wavelengths

This study analyzed the thermal field effect and experimental verification of laser scribing of stainless foil based copper indium gallium selenide solar cells of the AZO/i-ZnO/CdS/CIGS multilayer stack films (P3 layer) using Nd:YAG (1064 nm) and ultraviolet (355 nm) lasers. To prevent breakdown of molybdenum films of the solar cell, the laser processing temperature must be lower than the ablation temperature (2896 °C) of the Mo layer, but higher than the ablation temperature (2248 °C) of aluminum doped zinc oxide layer. Therefore, the scribing depth of the P3 layer is limited to the range 1.5–1.7 μm. First, the ANSYS Parameter Design Language program in the ANSYS finite element software is used to establish the simulation mathematical thermal model of the laser scribing process. To simulate the actual laser scribing process, a three-dimensional FE model for laser scribing process with a moving laser beam was constructed. Comparison the theoretical analysis and experimental results indicated that two sets of simulation parameters could not completely remove the P3 layer when the Nd:YAG laser was used. However, when the UV laser was used, the theoretical and experimental results were in favorable agreement. The findings of this study indicate that simulation analysis results can be helpful as reference data for experimental parameters during the actual scribing process.     

Ultra-short pulsed laser deposition of gallium arsenide: a comprehensive study

A Gallium Arsenide target has been ablated by using a frequency-doubled Nd:glass laser with a pulse duration of 250 fs and thin films have been deposited in vacuum. The plasma produced by the ablation process and the deposited films have been studied by several different techniques, including optical emission spectroscopy, ICCD fast imaging and electron microscopies, X-ray diffraction, Raman spectroscopy, respectively. The data evidence that the films, which composition shows an excess of Ga, are formed by the coalescence of a large number of nanoparticles. These results, even if the plasma does not evidence the presence of nanoparticles, seem to indicate that the ablation-deposition mechanism is the same found for the majority of the other systems deposited by ultra-short pulse lasers.     

Biocompatible film deposition by using Nd:YAG pulsed laser

A Nd:YAG laser operating at the fundamental wavelength (1064 nm) and at the second harmonic (532 nm), with 9 ns pulse duration, 100–900 mJ pulse energy, and 30 Hz repetition rate mode, was employed to ablate in vacuum (10^?6 mbar) biomaterial targets and to deposit thin films on substrate backings. Titanium target was ablated at the fundamental frequency and deposited on near-Si substrates. The ablation yield increases with the laser fluence and at 40 J/cm ² the ablation yield for titanium is 1.2×10¹⁶ atoms/pulse. Thin film of titanium was deposited on silicon substrates placed at different distance and angles with respect to the target and analysed with different surface techniques (optical microscopy, scanning electron spectrosopy (SEM), and surface profile).

Hydroxyapatite (HA) target was ablated to the second harmonic and thin films were deposited on Ti and Si substrates. The ablation yield at a laser fluence of 10 J/cm ² is about 5×10¹⁴ HA molecules/pulse. Thin film of HA, deposited on silicon substrates placed at different distance and angles with respect to the target, was analysed with different surface techniques (optical microscopy, SEM, and Raman spectroscopy).

Metallic films show high uniformity and absence of grains, whereas the bio-ceramic film shows a large grain size distribution. Both films found special application in the field of biomaterial coverage.     

Deposition of ITO Nanopowder Layers on Flexible Substrate by Spin Coating Using Pulsed Nd-YAG Laser for Crystallization and Bonding

A transparent thin layer of indium–tin oxide (ITO) is coated on polyethylene terephthalate (PET) by a spin coating process. The surface is treated by a pulsed Nd-YAG laser. We investigate the effect of laser treatment on crystallization and bonding processes of the thin layer using atomic force microscope (AFM) and scanning electron microscope (SEM). The best results are obtained when the pulse frequency, duration, and energy were 1000 Hz, 0.2 to 20 ms, and 25 to 40 J, respectively. The results show that the ITO layer coated on a flexible PET substrate is conductive and transparent. The sheet resistance obtained is 0.6 kΩ, and the transparency of a 350-nm layer in the visible range is more than 83.6%. Using the Nd-YAG laser treatment, we increase the conductivity by a factor of 100 times, and higher bonding performances are achieved.     

Background gas collisional effects on expanding fs and ns laser ablation plumes

The collisional effects of a background gas on expanding ultrafast and short pulse laser ablation plumes were investigated by varying background pressure from vacuum to atmospheric pressure levels. For producing Cu ablation plumes, either 40 fs, 800 nm pulses from a Ti: Sapphire laser or 6 ns, 1,064 nm pulses from a Nd:YAG laser were used. The role of background pressure on plume hydrodynamics, spectral emission features, absolute line intensities, signal to background ratios and ablation craters was studied. Though the signal intensities were found to be maximum near to atmospheric pressure levels, the optimum signal to background ratios are observed ~20–50 Torr for both ns and fs laser ablation plumes. The differences in laser–target and laser–plasma couplings between ns and fs lasers were found to be more engraved in the crater morphologies and plasma hydrodynamic expansion features.     

Formation of microbumps and nanojets on gold targets by femtosecond laser pulses

Femtosecond laser-induced sub-wavelength microstructuring of a thin gold layer coated onto a quartz glass substrate is investigated. Formation of microbumps (microbubbles) and nanojets under single pulse laser irradiation is observed. Discussion of these effects and demonstration of their dependencies on the laser pulse energy and gold layer thickness are presented. PACS 42.62-b; 42.65.Re; 52.38.Mf     

Laser pulses designed in time by adaptive hydrodynamic modeling for optimizing ultra-fast laser–metal interactions

Determining optimal temporal pulse shapes is an essential aspect for controlling the nature and the energetic characteristics of the ablation products following laser irradiation of materials on ultra-fast scales. In this respect, adaptive feedback loops based on temporal pulse manipulation have been inserted into a hydrodynamic code. The procedure enables us to reach the theoretical maximal temperature at a certain energy input. Several regimes have been considered with fluences ranging from the ablation threshold (F _th=0.34 J/cm²) up to 10 J/cm², proposing an optimal coupling for laser–solid and laser–plasma interactions in these fluence regimes. We determine shapes of optimal pulses on ultra-short and short scales (up to 42 ps) and forecast optimized interaction scenarios with fundamental control factors difficult to access experimentally. Simulations performed on aluminum reveal that ultra-short pulses are the natural better solution for localizing energy in space and time for F～F _th. For higher fluences, pulses spread over tens of picoseconds and ended by a final peak enable a better impulsive coupling with the nascent plasma, optimizing its maximal temperature.     

Large area laser surface micro/nanopatterning by contact microsphere lens arrays

Laser surface micro/nanopatterning by particle lens arrays is a well-known technique. Enhanced optical fields can be achieved on a substrate when a laser beam passes through a self-assembled monolayer of silica microspheres placed on the substrate. This enhanced optical field is responsible for ablative material removal from the substrate resulting in a patterned surface. Because of the laser ablation, the microspheres are often ejected from the substrate during laser irradiation. This is a major issue impeding this technique to be used for large area texturing. We explored the possibility to retain the spheres on the substrate surface during laser irradiation. A picosecond laser system (wavelength of 515 nm, pulse duration 6.7 ps, repetition rate 400 kHz) was employed to write patterns through the lens array on a silicon substrate. In this experimental study, the pulse energy was found to be a key factor to realize surface patterning and retain the spheres during the process. When the laser pulse energy is set within the process window, the microspheres stay on the substrate during and after laser irradiation. Periodic patterns of nanoholes can be textured on the substrate surface. The spacing between the nanoholes is determined by the diameter of the microspheres. The depth of the nanoholes varies, depending on the number of laser pulses applied and pulse energy. Large area texturing can be made using overlapping pulses obtained through laser beam scanning.     

Heating of deuterium clusters by a superatomic ultra-short laser pulse

The mechanisms of heating of the electronic component of large deuterium clusters by a super-atomic ultra-short laser pulse field are considered. During pulse rise, the so-called “vacuum heating” plays the determining role. Electrons escaping from a cluster into the vacuum with a low energy return back in a time equal to the period of the laser under laser field action. The returning electrons have a higher energy (on the order of the vibrational energy in the laser radiation field), which causes cluster heating. As the laser field increases, the electronic temperature largely grows at the expense of decreasing the Coulomb potential energy of electron repulsion because of a decrease in the number of electrons. The dynamics of above-barrier cluster ionization at the leading edge of a superatomic laser pulse is calculated. The results are discussed in the light of recent experiments aimed at creating desktop sources of monoenergetic neutrons formed as a result of the fusion of deuterium nuclei in a cluster plasma.     

Modification of structure, morphology and physical properties of tin sulfide thin films by pulsed laser irradiation

This paper presents modification of tin sulfide (SnS) thin films by pulsed laser irradiation. Tin sulfide films of 1 μm thickness were prepared using chemical bath deposition (CBD) technique. The chemical bath contained 5 ml acetone, 12 ml of triethanolamine, 8 ml of 1 M thioacetamide, 10 ml of 4 M ammonium hydroxide and 65 ml of distilled water. The chemical bath was kept at a constant temperature of 60 °C for 6 h which resulted in SnS films with 500 nm thickness. By double deposition, the final thickness of SnS thin films obtained was 1 μm. Laser processing was conducted to modify the structure, morphology and physical properties of the SnS thin films. The laser specifications were pulsed Nd:YAG laser with 532 nm wavelength, 300 mJ pulse energy and 10 ns pulse width. Properties of the laser-irradiated SnS thin films were compared with the as-prepared SnS thin films. The changes in structure, morphology, optical and electrical properties of the laser-irradiated SnS thin films were described.     

Influence of laser repetition rate on ferroelectric properties of pulsed laser deposited BaTiO3 films on platinized silicon substrate

BaTiO₃ thin films were deposited by pulsed laser deposition on Pt–Si at different laser pulse repetition frequencies. X-ray diffraction spectra show that preferred oriented films can be grown by adjusting the pulse repetition frequency. Enhanced dielectric and ferroelectric properties obtained in films deposited at 1 Hz is attributed to preferred orientation, low strain and homogeneous grain distribution. The films deposited at 1 Hz show an impressive remanent polarization of 21.4 μC/cm² with a coercive field of 70.0 kV/cm. The shift in Curie temperature, which stems from changing the laser pulse repetition frequency, is associated with the strain state in the film.