Mathematical and physical considerations on the spatial resolution in scanning Auger electron microscopy

A simple mathematical model is used to evaluate the spatial resolution in scanning Auger microscopy (SAM). This model includes for the first time all the possible causes of Auger electron production and broadening (impact parameter effect, backscattering effect, X-ray induced Auger electron production). The conclusions depend greatly upon the criteria of resolution used (Δ(50) or δ(10–90)). Physical limitations due to the impact parameter and influence of X-ray-induced electron production are established. This model is in good agreement with the experimental data. Applications to scanning electron microscopy and other microanalysis techniques are also suggested.     

Spatial resolution of X-ray line emission in laser produced plasma by shadow techniques

Spatial resolution of X-ray emission from laser-produced plasmas is obtained by placing a 500 μm wire between the plasma and a slitless crystal spectrometer. The sizes of emitting regions of various spectral lines, as well as electron temperature and density spatial profiles are deduced for an Al plasma.     

Growth of silicon carbide films via C60 precursors

Epitaxial silicon carbide films are grown on Si(100) and Si(111) substrates at surface temperatures between 950 and 1250 K via c₆₀ precursors. Films have been grown up to thicknesses greater than 1 μm. The growth rate of the SiC film is not limited by the surface reaction rate of C₆₀ with silicon at these temperatures, rather by the arrival rate of the reactants Si (by diffusion) or C₆₀. This results in rapid film growth. Films have been characterized by low energy electron diffraction, X-ray diffraction, and Auger depth profiling. X-ray diffraction suggests the growth of β-SiC in the temperature range investigated. Auger depth profiling shows the film is stoichiometric. Selective crystalline silicon carbide growth is achieved on patterned silicon-silicon oxide samples.     

基于激光尾波加速的涡轮叶片高能X射线CT

发展微焦点高能X射线源技术是实现高精度高能工业CT突破的关键,基于激光尾波加速驱动高能轫致辐射源开展了微焦点高能X射线源产生以及对涡轮叶片高能CT成像研究。利用一台20 TW钛蓝宝石超快超强激光器,通过电离注入的方式获得了（140±44）pC的高能电子束,并使用1.5 mm厚钨靶产生了累积源尺寸为25 μm的高能轫致辐射X射线。利用该微焦点高能X射线源,采用基于压缩感知的CT重建算法,在获取较少角度投影（31个角度）的情况下,获得了对涡轮叶片叶榫结构的CT重建。     

Low-field mobilities of rare-earth metals

The KLL Auger spectrum of Ni generated in the electron capture decay of radioactive ⁶⁴Cu in a solid state matrix was measured for the first time using a combined electrostatic electron spectrometer adjusted to a 7 eV instrumental resolution. Energies and relative intensities of the all nine basic spectrum components were determined and compared with data obtained from X-ray induced spectra of metallic Ni and with theoretical results as well. Absolute energy of 6562.5 ± 1.3 eV (related to the Fermi level) measured for the dominant KL₂L₃(¹D₂) than a value obtained from the X-ray induced spectra which is probably caused by the effects of chemical bonding and physico-chemical environment. Moreover, it is higher by 20.4 eV (16??) than a prediction of the semi-empirical calculations by Larkins which indicates an influence of the ??atomic structure effect?? on absolute energies of the Auger transitions following the electron capture decay and, possibly, some imperfections in the calculations. Good agreement of the measured and predicted KL₁L₂(³P₀/¹P₁) transition intensity ratios indicates perceptible influence of the relativistic effects on the KLL Auger spectrum even at Z = 28.     

激光惯性约束聚变研究中高时空诊断技术研究进展

对国内激光惯性约束聚变（ICF）领域高时空分辨技术的最新进展进行了比较全面的介绍。针对热斑诊断时间分辨优于10 ps、空间分辨优于10 μm、能区10～30 keV的需求,从光学、X射线、核诊断和计算成像几个角度,比较系统地介绍了最新的进展。光学领域主要介绍基于泵浦探测技术的全光扫描和全光分幅技术。全光扫描技术的时间分辨可以达到200 fs,全光分幅的时间分辨可以达到5 ps,空间分辨可以达到5 μm。该系统的主要部件为光学器件,在ICF未来的强电磁、强电离环境下有很好的应用前景。X射线系统主要介绍最近几年发展的高分辨KB显微镜,其采用STTS构型,可将空间分辨提高到3 μm,满足当前高分辨的需求。漂移管技术的时间分辨可以达到10 ps,作为一种正在发展的技术,对此进行了较为全面的分析。中子成像系统主要介绍了高空间分辨的记录系统以及对应的瞄准技术的进展,其空间分辨可以达到20～25 μm。计算成像作为一个全新的分支,最近引起了ICF领域的广泛关注。着重介绍了三维光场技术和在高时空分辨领域有很好应用前景的压缩感知超快成像（CUP）技术,对其可能在ICF领域中的应用提出了设想。     

Modulation transfer function characteristic of uniform-doping transmission-mode GaAs/GaAlAs photocathode

The resolution characteristic can be obtained by the modulation transfer function (MTF) of a GaAs/GaAlAs photocathode.After establishing the theoretical model of GaAs(100)-oriented atomic configuration and the formula for the ionized impurity scattering of the non-equilibrium carriers,this paper calculates the trajectories of photoelectrons in a photocathode.Thus the distribution of photoelectron spots on the emit-face is obtained,which is namely the point spread function.The MTF is obtained by Fourier transfer of the line spread function obtained from the point spread function.The MTF obtained from these calculations is shown to depend heavily on the electron diffusion length,and enhanced considerably by decreasing the electron diffusion length and increasing the doping concentration.Furthermore,the resolution is enhanced considerably by increasing the active-layer thickness,especially at high spatial frequencies.The best spatial resolution is 860 lp/mm,for the GaAs photocathode of doping concentration 1 × 10 19 cm 3,electron diffusion length 3.6 μm and the active-layer thickness 2 μm,under the 633-nm light irradiated.This research will contribute to the future improvement of the cathode’s resolution for preparing a high performance GaAs photocathode,and improve the resolution of a low light level image intensifier.     

High-resolution correlation OTDR for distributed fiber-optic sensors and mobile cabling

Distributed fiber-optic sensing systems require a spatial resolution of less than 1 meter, which cannot easily be reached by conventional optical time domain reflectometry (OTDR) because of present electronics response times limited to about 10 ns corresponding to a few meter resolution. Correlation optical time domain reflectometry (COTDR) is a powerful technique for high-resolution test of distributed single-mode fiber sensors in the long wavelength range 1.3-1.6 μm.

This article describes the realization of a 1.3-μm COTDR using a 200-Mb/s pseudorandom sequence that allows a spatial resolution of 50 cm and gives results obtained on a short single-mode fiber length with localized defects simulating a distributed line of sensors.     

Background removal in auger electron spectroscopy: a new experimental approach

A review of the main available methods of background removal in Auger electron Spectroscopy and X-ray photoelectron Spectroscopy is given. The major features, assumptions and results of theoretical works, which form the basis of the present method, are presented. This method uses a convolution technique of the experimental spectrum with the single event loss function. It has been applied to Auger electron spectra (Si, Ag, Fe, Ni, Cu, Al). When Auger energy is sufficiently low (Si, Ag), it has been assumed that Auger electrons act as a secondary electrons source within a multiplet energy range. In every case results are satisfactory.     

时域两维荧光寿命显微测量研究

提出了一种新的时域两维荧光寿命显微测量技术,建立了一套荧光寿命成像显微系统,介绍了这种测量技术的数据处理方法。用标准样品对该系统进行了测试,实验表明,该系统的时间分辨率为2ps,在放大倍率为100倍的情况下,该系统的空间分辨率为8um。如果在现有的设备下采用更细的网格板和微位移系统,那么该系统的空间分辨率可小于1um.     

Shock wave propagation in soda lime glass using optical shadowgraphy

Propagation of shock waves in soda lime glass, which is a transparent material, has been studied using the optical shadowgraphy technique. The time-resolved shock velocity information has been obtained (1) in single shot, using the chirped pulse shadowgraphy technique, with a temporal resolution of tens of picoseconds and (2) in multiple shots, using conventional snapshot approach, with a second harmonic probe pulse. Transient shock velocities of (5–7) × 10⁶ cm/s have been obtained. The scaling of the shock velocity with intensity in the 2 × 10¹³–10¹⁴ W/cm² range has been obtained. The shock velocity is observed to scale with laser intensity as I^0.38. The present experiments also show the presence of ionization tracks, generated probably due to X-ray hotspots from small-scale filamentation instabilities. The results and various issues involved in these experiments are discussed.     

Spatial resolution of laser produced plasmas with X-ray crystals

X-ray spectra taken with good quality flat crystals can yield spatial resolution of small plasma sources at the expense of spectral resolution. 40 μm spatial resolution of a laser-produced aluminum plasma was obtained using lines of wavelength ～6 Å.     

Small angle X-ray scattering by spherical particles of Polystyrene and Polyvinyltoluene

The high intensity, high resolution multiple reflection diffractometer has been applied to make accurate measurements of the small angle X-ray scattering of eight different Dow Chemical latexes with stated diameters 2.051, 1.305, 0.814, 0.557, 0.365, 0.264, 0.126, and 0.088 μm. Using thin dry samples, the measured intensities of diffraction extrema with orders higher than the third were found to agree well with the simple Rayleigh-Gans theory which neglects multiple scattering as well as interparticle interference. Orders below the fourth showed a distinct effect of interparticle interference. This effect could be demonstrated to vanish when a liquid solution sample was used instead of a dry one. Scattering curves of thick dry samples had strongly decreased contrast between maxima and minima, an effect which is known to be due to multiple scattering. The following particle diameters were determined from the measured scattering curves: 2.102±0.013 μm, 1.313±0.008 μm, 0.823±0.004 μm, 0.552±0.002 μm, 0.352±0.002 μm, 0.254±0.002 μm, 0.119±0.001 μm and 0.078±0.001 μm. The discrepancies between these and the stated sizes are larger for the smaller particles. It is believed that the X-ray measurements are more accurate than the stated sizes which are based on measurements in the electron microscope. Therefore, as secondary standards, the diameter obtained from the X-ray measurements should be used.     

New improvements in energy and spatial (x,y, z) resolution in AES and XPS applications

This review presents the recent developments published in the literature about the use of Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) at high energy or spatial resolution. The past and present improvements due to technology (analysers, excitation source), and to mathematical procedures are described and discussed. New trends in the application of AES and XPS are related.     

Properties of transparent,conducting ZnO films deposited by reactive bias sputtering

Transparent ZnO thin films of resistivity 2×10^?3 Ωcm have been prepared by a reactive bias sputtering technique. Carrier concentration and mobility were determined by Hall probe measurements. Microstructure and grain size were studied using a scanning electron microscope and an X-ray diffractometer. Optical constants were measured for the wavelength range 0.35 to 2.50 μm and infrared reflectivity for the range 2.5 to 20 μm. These optical properties were modelled by the Drude theory of free electrons utilizing measured electrical transport parameters.     

Monte Carlo calculations of the spatial resolution in a scanning auger electron microscope

The Monte Carlo methods used in calculations of spatial effects in scanning electron microscopy and X-ray microprobe analysis are applied to scanning Auger electron microscopy (SAM). It is concluded that the spatial resolution limits in SAM are determined almost entirely by the profile of the incident electron beam. Backscattered electrons yield a very low, slowly varying, background 0.2–0.5 microm in extent which should be eliminated with simple discrimination techniques in existing SAM designs. In addition, the backscattering factor degrades the spatial resolution of a step in the composition but only by a factor of the order of 2.     

激光等离子体诊断用Wolter型X射线显微镜的设计

围绕着稠密等离子体硬X射线成像诊断,提出了一种基于阿贝正弦条件的Wolter型X射线显微镜的光学系统设计。详细介绍了Wolter显微镜的结构特点和设计方法,进行了参数优化,定量分析了包括物距、放大倍数、掠入射角和双曲面镜镜长在内的初始结构参数对物镜性能的影响。由光线追迹可以得出,在约±260 μm的视场范围内分辨率优于1 μm;在±460 μm范围内优于3 μm。有效视场可达约1 mm,几何集光立体角约为6.1×10-5sr。同时,该系统具备平响应系统特性,在mm级的视场范围内,系统响应效率的一致性优于93.7%。     

第三代同步辐射光源X射线相干性测量研究

随着高性能第三代同步辐射光源的建成开放,基于X射线相干特性的实验方法得到了快速发展和广泛应用.作为一个典型的例子,X射线相位衬度成像已经成为常规的X射线实验方法并向用户开放.相干散射、相干衍射成像、光子关联谱等X射线实验方法正日益受到重视,在高空间分辨、时间分辨等研究领域已显示出其独特的优越性.因此,研究和测量第三代同步辐射的空间相干特性对进一步发展这些新的实验方法具有重要意义.基于Talbot自成像原理成功测量了上海光源X射线成像线站发射的X射线的空间相干长度,并进而测得了相应光源的空间尺度.光子能量为33.2 keV时,测得的X射线光束垂直方向空间相干长度为8.84μm,对应的光源尺寸为23μm,测量结果与理论分析相符.     

A study of the spectral emissions in laser-irradiated microdot targets at 0.53 and 0.27 μm wavelengths with micron resolution

Using a knife-edge technique, we have determined the spatial extension of H-like and He-like emissions and the time-integrated axial electron density profile in laser-irradiated aluminium microdot targets at 0.53 and 0.25 μm wavelengths with about 3 μm resolution.     

电子束放射照相的特性与参数优化

短脉冲强激光产生的电子束具有源尺寸小、脉宽窄、准单能谱等特点, 在放射照相诊断中具有独特作用. 本文通过分析电子在材料中散射并采用蒙特卡罗方法数值模拟, 研究了100 keV到几百MeV能量电子束对有厚度起伏或存在界面的靶的透视, 并与质子、X射线束透视结果比较, 给出了电子束放射照相的特性与参数优化: 基于电子在材料中非弹性散射或能量损失, 选用能量使其射程与靶厚度接近的电子束来诊断靶厚度不均匀性; 基于电子在材料中的弹性散射, 选用射程超过靶厚度的电子束来诊断靶界面.