未来制造业和加工业中的等离子体

从两组元或三线元等离子体的一些基本性质出发，分析了等离子体在超大规模集成电路生产，扁平显示器技术，光导纤维生产和未来光计算机芯片制造，废物处理，新材料制备等中十分诱人的应用前景。     

超导强磁场材料的新进展

本文评述了超导强磁场材料的新进展。基础科学和高技术的迅速发展,对超导强磁场材料不断提出新的要求。针对一些特定的应用目标,现行的实用超导材料,如Nb-Ti、Nb_3Sn和V_3Ga等,在改进制备工艺和提高性能两个方面都取得了明显的进展。有关多芯复合导体的微结构研究正在蓬勃地展开。对一些具有潜在应用前景的超导体研究,正预示着它们将成为超导技术中使用价值更高的新型材料。基于所研究的科学问题具有交叉学科的特点,今后组织多学科的力量开展合作研究,必将加速这一领域工作的发展。     

Plasma processing

Low pressure, non-equilibrium, weakly to partially ionized gas discharge plasmas are used for a variety of surface materials processing applications. The most extensive applications are in microelectronics manufacturing, where plasma sputtering, etching, stripping, cleaning and film deposition play key roles in this growing industry. Up to 30% of all process steps in integrated circuit manufacture involve low pressure plasmas in one way or another. The rapid pace of process and product technological change in this industry, coupled with the unique capabilities of plasma processing for extremely finely controlled surface modification, offers new opportunities to plasma scientists     

Engineering Materials

The existence of the Stone, Bronze, and Iron Ages points to the importance of materials in humankind's development. The corresponding materials were used for art and jewelry, but most prominently for structural applications—as tools and weapons. While the ages themselves define step changes in material strength and durability, there was also significant material development within each age, such as the evolution from pure copper to alloys with tin, arsenic, and other metals in the Bronze Age. In a sense, we are still partially in the Iron Age, as steel (along with concrete) is the dominant structural material in our modern infrastructure, and continues to evolve in performance. For example, today's steels are significantly stronger and less prone to embrittlement than steel used for the RMS Titanic a century ago. On the other hand, we increasingly use specialty materials, such as polymer-metal composites, for high strength-to-weight ratio applications, and thermal-barrier coatings on Ni-based superalloys to operate turbines at very high temperatures. Most recently, the additive manufacturing revolution has opened up new possibilities for materials by design, where enhanced flexibility in composition, microstructure, and topological optimization relative to conventional processing methods offers many new opportunities and challenges.     

二维平面和范德瓦耳斯异质结的可控制备与光电应用

自石墨烯被发现以来,二维材料因其优异的特性获得了持续且深入的探索与发展,以石墨烯、六方氮化硼、过渡金属硫化物、黑磷等为代表的二维材料相关研究层出不穷.随着二维新材料制备与应用探索的不断发展,单一材料性能的不足逐渐凸显,研究者们开始考虑采用平面拼接和层间堆垛所产生的协同效应来弥补单一材料的不足,甚至获得一些新的性能.利用二维材料晶格结构的匹配构建异质结,实现特定的功能化,或利用范德瓦耳斯力进行堆垛,将不同二维材料排列组合,从而在体系里引入新的自由度,为二维材料的性质研究和实际应用打开了新的窗口.本文从原子制造角度,介绍了二维平面和范德瓦耳斯异质结材料的可控制备和光电应用.首先简要介绍了应用于异质结制备的常见二维材料的分类及异质结的相关概念,然后从原理上分类列举了常用的表征方法,随后介绍了平面和垂直异质结的制备方法,并对其光电性质及器件应用做了简要介绍.最后,对领域内存在的问题进行了讨论,对未来发展方向做出了展望.     

A review of 3D-printed sensors

Nowadays, sensors play an important role in human life. Among the many manufacturing methods used in the fabrication of sensors, three-dimensional (3D) printing has gradually shown its advantages, particularly with commercial products. Physical sensors, biosensors, and chemical sensors can all be fabricated via 3D printing technology, through either directly printing sensing components, printing molds for casting sensors, or printing platforms to be integrated with commercial sensors. In this article, the varieties of features and applications of 3D printing technologies used in the fabrication of sensors are reviewed. Several types of 3D printing technologies are compared for better understanding of the tools. With the development of new or hybrid manufacturing methods and materials used in the 3D printing technology, this technology will show its great advantages and potential in the fabrication of highly sensitive nanosensors or compound sensors with 3D intricate structures.     

Track-etch membranes as templates enabled nano/micro technology: a review

Many techniques are being used in order to synthesize nano-micro materials falling under the realm of nanotechnology. It need not be overemphasized that the miniaturization of devices and synthesis of new materials have a tremendous role in the development of powerful electronics as well as material based technologies in other areas but for the laws of quantum mechanics posing limitations besides the increasing cost and difficulties in manufacturing in such a small scale. The quest, therefore, for the alternative technologies, have stimulated a surge of interest in nano-meter scale materials and devices in the recent years. Metallic as well as semiconducting nano wires are the most attractive materials because of their unique properties having myriad of applications like interconnects for nano-electronics, magnetic devices, chemical and biosensors, whereas the hollow tubules are equally considered to be candidates for more potent applications — both in physical as well as biosciences. Materials’ processing for nano-structured devices is indispensable to their rational design. The technique, known as “Template Synthesis”, using electrochemical-electro less deposition is one of the most important processes for manufacturing nano-micro structures, nano-composites and devices and is relatively inexpensive and simple. The technique involves using membranes — ion crafted ones (popularly known as Particle Track-Etch Membranes or Nuclear Track Filters), alumite substrate membranes, besides other types of membranes as templates. The parameters viz., diameter as well as length i.e., aspect ratio, shape and wall surface traits in these membranes are controllable. In the present article a detailed review of this technique using track-etch membranes as templates in synthesis of nano-micro materials including hybrid materials and devices like field-ion emitters, resonant tunneling diodes (RTDs) etc. is presented including most of the results obtained in our laboratory.      

原子尺度构建二维材料的第一性原理计算研究

随着信息技术的不断进步,核心元器件朝着运行速度更快、能耗更低、尺寸更小的方向快速发展.尺寸不断减小导致的量子尺寸效应使得材料和器件呈现出许多与传统三维体系不同的新奇物性.从原子结构出发,预测低维材料物性、精准合成、表征、调控并制造性能良好的电子器件,对未来电子器件的发展及相关应用具有至关重要的意义.理论计算能在保持原子级准确度的情况下高效、低耗地预测材料结构、物性、界面效应等,是原子制造技术中不可或缺的重要研究手段.本综述从第一性原理计算角度出发,回顾了近年来其在二维材料结构探索、物性研究和异质结构造等方面的应用及取得的重要进展,并展望了在原子尺度制造背景下二维材料的发展前景.     

New aspects of micromachining and microlithography using 157-nm excimer laser radiation

The use of F₂ excimer laser sources, emitting at 157 nm, constitutes a new promising tool for scientific, industrial and lithography applications. The 157-nm laser emission enables high-resolution processes and the high photon energy offers the unique possiblity of photoionizing molecules in a single step. Therefore a lower fragmentation or thermal loading takes place. The 157-nm radiation will enable fundamental research and development for deep UV (DUV) high-resolution optical microlithography in the manufacturing of integrated circuits. This is the next step from the technology of ArF lasers at 193 nm. Furthermore, benefits are expected for key technologies requiring high-resolution processing and the micromachining of tough materials like Teflon or fused silica for micro-optics fabrication. Such applications require F₂ excimer laser sources with high performance, reliability and efficiency. The world of nanotechnology is just beginning to reveal its potential.     

DNA折纸结构介导的多尺度纳米结构精准制造

原子及近原子尺度制造在近年来一直是物质科学领域被广泛探讨的前沿问题.当制造和加工的尺度从微米、纳米逐渐走向原子级别时,材料在常规尺度下所具备的性质已无法通过经典理论进行解释,相反地,会在这一尺度下展现出一系列新奇的特性.因而对材料极限制造尺度和颠覆性物性的不断追求始终是科学界共同关注的重点领域.作为一种在纳米尺度下对结构制造单元进行精细操控的先进手段,DNA纳米技术的开发和发展为纳米制造甚至原子制造提供了新的观点和思路,而DNA折纸术作为DNA纳米技术的重要组成部分,正在凭借其在结构制造过程当中的高度可编程性成为纳米尺度下进行各类物质精准制造的独特的解决方案,并可能为不同物质不同材料更小尺度和任意形状的精准构筑带来机遇.本文首先简单概述了DNA折纸术的基本原理和发展历程,然后根据制造策略的不同对DNA折纸结构的纳米制造的相关代表性工作做了总结,并在文末提出了对于DNA折纸结构在原子制造中的可行性的思考和未来发展方向的展望.     

Sb-based IR photodetector epiwafers on 100 mm GaSb substrates manufactured by MBE

Antimony-based materials continue to provide great interest for infrared photodetector and focal plane array imaging applications. Detector architectures include InAs/Ga(In)Sb strained-layer superlattices, which create a type-II band alignment that can be tailored to cover a wide range of the mid- and long-wavelength bands by varying the thickness and composition of the constituent materials, and bulk InAsSb-based XBn barrier designs. These materials can provide desirable detector features such as wider wavelength range, suppression of tunneling currents, improved quantum efficiency, and higher operating temperatures. In order to bring these advantages to market, a reliable manufacturing process must be established on large diameter substrates. We report our latest work on the molecular beam epitaxy growth of Sb-detector epiwafers on 100 mm diameter GaSb substrates in a multi-wafer production format. The growth process has been established to address the challenges of these demanding structures, including the large numbers of alternating thin layers and mixed group-V elements. Various characterization techniques demonstrate excellent surface morphology, crystalline structure quality, and optical properties of the epiwafers. The measured wafer-to-wafer consistency and cross-wafer uniformity demonstrate the potential for volume manufacturing.     

高次非球面的工艺技术研究

 高次非球面在光学系统应用中意义重大,但是一直以来缺乏一套快速、有效的工艺方法。利用VC6.0编制了一款面型计算软件以辅助加工,并提出了一种新的高次非球面补偿检验方法。针对一块巡天光谱仪中口径Φ244 mm的一面平面另一面为高次非球面的改正镜开展工艺方法的设计与研究,从铣磨成形开始,根据高次非球面的特点提出了几种新型磨削工艺,建立相应的数学模型。由于高次非球面的特殊性,试验了数控铣磨直接成型法,很大程度上降低后继工艺难度,在细磨和抛光阶段采用数控小工具和整工具研磨相结合,能够很好地克服面型不平滑等技术难题。总结出了一套高效率、低成本、高精度的高次非球面工艺方法。     

新型二维材料在固体激光器中的应用研究进展

本文主要介绍了二维可饱和吸收体材料在固体激光器中的应用与研究进展。简要介绍了新型二维材料的性质和优点。以石墨烯、拓扑绝缘体、过渡金属硫化物和黑磷等新型二维材料为例分析了它们在固体激光器中实现调Q或锁模的过程,展示了二维材料在脉冲固体激光研究中的重要应用前景。二维材料与固体激光器的结合,可进一步推进二维材料的研究,有望开发出大量新型固体激光器件并且作为基础光源应用于多个领域,推动相关领域的发展。     

Infrared thermography for monitoring heat generation in a linear friction welding process of Ti6Al4V alloy

The increasing use of titanium alloys in a wider range of applications requires the development of new techniques and processes capable to decrease production costs and manufacturing times. In this regard welding and other joining techniques play an important role. Today, solid state friction joining processes, such as friction stir welding, friction spot welding, inertia friction welding, continuous-drive friction welding and linear friction welding (LFW), represent promising methods for part manufacturing. They allow for joining at temperature essentially below the melting point of the base materials being joined, without the addition of filler metal.However, the knowledge of temperature is essential to understand and model the phenomena involved in metal welding. A global measured value represents only a clue of the heat generation during the process; while, a deep understanding of welding thermal aspects requires temperature field measurement. This paper is focused on the use of infrared thermography applied to the linear friction welding process of Ti6Al4V alloy. The attention is concentrated on thermal field that develops on the outer wall of the two parts to be joined (i.e. heat generated in the friction zone), and on the maximum temperature that characterizes the process before and after the flash formation.     

Microdrilling and micromachining with diode-pumped solid-state lasers

The trend of the ever-continuing miniaturization requires fast and flexible processing tools. Lasers are flexible tools which have proven their reliability in manufacturing of macrofeatures for many years already. However, to process small features the requirements of the laser source, e.g. in regard to the beam profile, are very high. Innovative laser sources which meet these requirements, such as diode-pumped solid-state lasers, and the progress in processing technology, have made microfeature processing commercially viable during recent years. Examples of industrial applications are laser-drilled micro-injection nozzles for highly efficient automobile engines or manufacturing of complex spinnerets for production of synthetic fibers. The unique advantages of laser-based techniques stem from their ability to produce high-aspect-ratio holes, while yielding small heat-affected zones with exceptional surface quality, roundness and taper tolerances. Additionally, the ability to drill blind holes and slots in very hard materials such as diamond, silicon, sapphire, ceramics and steel is of great interest for many applications in the microelectronics, semiconductor and automotive industries. This kind of high-quality, high-aspect-ratio micromachining requires high peak powers and short pulse durations. PACS 42.55.Xi; 42.62.Cf; 81.40.-z     

Stack-and-Draw Manufacture Process of a Seven-Core Optical Fiber for Fluorescence Measurements

Multi-core, optical-fiber technology is expected to be used in telecommunications and sensory systems in a relatively short amount of time. However, a successful transition from research laboratories to industry applications will only be possible with an optimized design and manufacturing process. The fabrication process is an important aspect in designing and developing new multi-applicable, multi-core fibers, where the best candidate is a seven-core fiber. Here, the basics for designing and manufacturing a single-mode, seven-core fiber using the stack-and-draw process is described for the example of a fluorescence sensory system.     

Applications for Tomographic Technology in Mining,Minerals and Food Engineering

Existing and new applications for tomographic technology using optical, electrical radar and seismic sensing principles are described. It is demonstrated that important similarities link process instrumentation needs in the mineral benefication and food manufacturing sectors. The minerals industries provide a variety of challenging applications for tomography in the development and validation of models associated with acid mine drainage, the stability of mine workings, mineral exploration and other environmental needs such as monitoring landfill sites and groundwater plume dispersion.     

Terahertz Thermometry: Combining Hyperspectral Imaging and Temperature Mapping at Terahertz Frequencies

The accurate and non‐invasive determination of multiple physical parameters, with well‐defined spatial resolution, is crucial for applications in manufacturing, chemistry, medicine and biology. Specifically, the ability to simultaneously measure both temperature and spectral signatures is still experimentally unavailable. To this end, we propose a mapping technique for biological systems, which exploits a linear correlation between terahertz wave reflectivity and temperature, and allows to spatially and spectrally resolve thermal distributions. This method is applied to a model biological system in two relevant cases where in one example, nanoplasmonic‐induced photothermal effects are imaged gaining new insights into collective heating phenomena. In the second example, we demonstrate a joint thermal‐hyperspectral imaging approach to chemically map the presence of a model drug formulation and simultaneously investigate its thermal stability in our biological system. This concept can be easily extended and widely applied to all materials that demonstrate a measurable change in their dielectric properties.     

先进核能系统结构材料辐照性能研究

首先简要介绍第一代到先进的第四代核能系统的发展、与核能系统发展密切的抗辐照结构材料研发进展、第四代核能系统结构材料辐照性能研究新方法。第四代核能系统发展中,辐照引起材料性能退化是一个需要研究和解决的瓶颈问题。现有中子源都不能满足第四代核能系统结构材料高剂量中子辐照性能研究的要求。为此,发展了用于核能系统结构材料高剂量辐照性能快速检测加速器重离子辐照方法和第四代核能系统实际辐照工况模拟的重离子与氢和氦三束同时辐照新方法,文中进行了详细的介绍。最后介绍了中国原子能科学研究院核能系统结构材料辐照性能研究现状和近期发展计划。该院在HI-13串列加速器器上建立了多种不同用途的重离子辐照装置、三个独立加速器构成的重离子与氢和氦三束同时辐照实验平台,开展了一系列核能结构材料,例如国产改进型奥氏体钢、CLAM钢、1515钢、钽、钨等的辐照性能的系统测试和研究。为了更好地开展核能结构材料性能研究,从国外引进了一台超导直线加速器和一台可变能量重离子回旋加速器。结合现有2×13 MeV,2×1.7 MV串列加速器、30 MeV和100 MeV质子回旋加速器、高压倍加器,中国实验快堆、中国先进研究堆、微堆等,CIAE将建成一个比较完整和先进的核能系统结构材料辐照实验平台系统供国内外用户使用。This paper introduces briefly the development of nuclear energy systems from the GEN I to the advanced GEN IV, the progress of manufacturing radiation resistant materials associated with the development of nuclear energy systems and the new methods of investigating radiation properties of the structural materials for the GEN IV nuclear energy systems at first. Irradiation induced deterioration of materials properties is a bottle neck problem, which must be investigated and solved for the development of the GEN IV nuclear energy systems. Unfortunately, all the currently available neutron sources cannot meet the requirements of investigating radiation properties of structural materials irradiated by high dose neutron irradiation in the GEN IV nuclear energy systems. Therefore, two new methods of the accelerator heavy ion irradiation that simulates the high-dose neutron irradiation and the triple beam irradiation that mimics the real neutron irradiation environment in the GEN IV nuclear energy systems have been developed. These two methods are introduced in this paper. The present status of the study on radiation properties of structural materials for nuclear energy systems of the new generation and the near future development plan at China Institute of Atomic Energy (CIAE) are described also. The accelerator heavy ion irradiation facilities for different applications and the simultaneous triple beam irradiation platform with three separate accelerators or implanters have been established at the HI-13 tandem accelerator of CIAE. A series of structural materials for nuclear energy systems, such as the home-made modified austenic steel, CLAM steel, 1515 steel, Tantalum, Tungsten, etc. have been tested and investigated systematically. A superconducting linear accelerator and a variable energy heavy ion cyclotron have been imported from abroad for a better performance of the study. Combined with the currently existing facilities of 2×13 MeV and 2×1.7 MV tandem accelerators, 30 and 100 MeV proton cyclotrons, China experimental fast reactor, China advance research reactor, Miniature neutron source reactor, etc. a comprehensive and advanced system of experimental irradiation platform for structural materials of nuclear energy systems will be established in the near future for both domestic and foreign users.     

A review of hyperspectral imaging for nanoscale materials research

As an emerging technology, hyperspectral imaging (HSI), which combines both advanced spectroscopy and imaging techniques, provides sufficient information for spectral and spatial analysis and is thus suitable for distribution and property investigation of nanoscale materials. Considering the applications of HSI have spread from remote sensing to quality control of macro products such as food and milk, this article reviews recent research of HSI in a new field of nanoscale materials. On the basis of fundamental parts of a HSI system, new techniques fitting specifically for nanoscale materials imaging such as dark field and Raman spectroscopy are introduced. Nanoscale materials, including metal nanoparticles, carbon nanotubes and graphene, biological components in cells and tissues, as well as multi-layer nanoscale materials, are the research hotspots utilizing HSI technology. Related research reports of the above materials are reviewed based on the physical distinction of these nanoscale materials. It is believed that HSI technology is a strongly potential technique for property investigation and manipulation of nanomaterial for various applications.