| Demonstration of Four Fundamental Operations of Liquid Droplets for Digital Microfluidic Systems Based on an Electrowetting-on-Dielectric Actuator |
| |
| 作者姓名： | 岳瑞峰 吴建刚 曾雪锋 康明 刘理天 |
| |
| 作者单位： | Institute of Microelectronics, Tsinghua University, Beijing 100084 |
| |
| 基金项目： | Supported by the National Natural Science Foundation of China under Grant No 10472055. |
| |
| 摘 要： | An electrowetting-on-dielectric actuator is developed, in which the liquid is sandwiched between top and bottom plates. For the bottom plate, silicon wafer is used as the substrate, the heavily phosphorus-doped polysilicon film is deposited by low pressure chemical vapour deposition as the microelectrode array, and thermally grown SiO2 film as the dielectric layer. The top p/ate is a glass plate covered with transparent and conductive indium tin oxide as the ground electrode. In addition, a Teflon AF1600 film is spun on the surface of both the plates as the hydrophobic layer. The experimental results show that when the gap height between two plates is 133μm, a prototype of the device is capable of creating, transporting, merging and dividing droplets of deionized water in an air environment with a 70V at lOHz voltage pulse. This is also established by simulations using the computational fluidic software of CFD-ACE＋.
|
| 关 键 词： | 底板 硅晶 衬底 薄膜物理学 |
| 收稿时间： | 2005 |
| 修稿时间： | 2005 |
Demonstration of Four Fundamental Operations of Liquid Droplets for Digital Microfluidic Systems Based on an
Electrowetting-on-Dielectric Actuator |
| |
| YUE Rui-Feng,WU Jian-Gang,ZENG Xue-Feng,KANG Ming,LIU Li-Tian.Demonstration of Four Fundamental Operations of Liquid Droplets for Digital Microfluidic Systems Based on an Electrowetting-on-Dielectric Actuator[J].Chinese Physics Letters,2006,23(8):2303-2306. |
| |
| Authors: | YUE Rui-Feng WU Jian-Gang ZENG Xue-Feng KANG Ming LIU Li-Tian |
| |
| Affiliation: | Institute of Microelectronics, Tsinghua University, Beijing 100084 |
| |
| Abstract: | |
| |
| Keywords: | 85 85 +j 47 62 +q 68 08 Bc 47 55 Dz 82 35 Gh |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《中国物理快报》浏览原始摘要信息 |
|
点击此处可从《中国物理快报》下载免费的PDF全文 |
