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Analysis of Frequency Spectrum of Laser-Induced Vibration of Microbeam Resonators
作者姓名:方岱宁  孙玉鑫  苏爱嘉
作者单位:[1]Department of Engineering Mechanics, Tsinghua University, Beijing 100084 [2]Department of Mechanical Engineering, University of Hong Kong, Hong Kong
基金项目:Supported by the National Natural Science Foundation of China under Grant Nos 10025209, 10121202, and 10572069, and the Key Project of the Ministry of Education of China under Grant No 0306.
摘    要:

关 键 词:频率光谱  激光感应振动  微光束共振器  阻尼效应
收稿时间:2006-02-14
修稿时间:2006-02-14

Analysis of Frequency Spectrum of Laser-Induced Vibration of Microbeam Resonators
FANG Dai-Ning,SUN Yu-Xin,SOH Ai-Kah.Analysis of Frequency Spectrum of Laser-Induced Vibration of Microbeam Resonators[J].Chinese Physics Letters,2006,23(6):1554-1557.
Authors:FANG Dai-Ning  SUN Yu-Xin  SOH Ai-Kah
Affiliation:Department of Engineering Mechanics, Tsinghua University, Beijing 100084 Department of Mechanical Engineering, University of Hong Kong, Hong Kong
Abstract:The vibration phenomenon during pulsed laser heating of micro-beams is investigated. The beam is made of silicon and is heated by a laser pulse with a non-Gaussian temporal profile and with an ultrashort pulse duration of 2ps, which incites vibration due to the thermoelastic damping effect. This coupled thermoelastic problem is solved using an analytical-numerical technique based on the Laplace transformation. The damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are also examined and discussed.
Keywords:65  40  De  46  40  Ff  42  62  Cf
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