Analysis and finite element simulation of electromagnetic heating in the nitride MOCVD reactor |
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| Authors: | Li Zhi-Ming Hao Yue Zhang Jin-Cheng Xu Sheng-Rui Ni Jin-Yu and Zhou Xiao-Wei |
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| Affiliation: | School of Microelectronics, Xidian University, Xi'an 710071, China;Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, Xi'an 710071, China |
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| Abstract: | Electromagnetic field distribution in the vertical metal
organic chemical vapour deposition (MOCVD) reactor is simulated by
using the finite element method (FEM). The effects of alternating
current frequency, intensity, coil turn number and the distance
between the coil turns on the distribution of the Joule heat are
analysed separately, and their relations to the value of Joule heat
are also investigated. The temperature distribution on the
susceptor is also obtained. It is observed that the results of the
simulation are in good agreement with previous measurements. |
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| Keywords: | MOCVD finite element electromagnetic heating Joule heat |
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