| 基于增量光栅尺的纵横转换图像细分算法实现 |
| |
| 引用本文： | 蔡铁根,杨志军,陈超然,刘杏明,李彦锋.基于增量光栅尺的纵横转换图像细分算法实现[J].应用光学,2017,38(1):56-61. |
| |
| 作者姓名： | 蔡铁根 杨志军 陈超然 刘杏明 李彦锋 |
| |
| 作者单位： | 广东工业大学 广东省微纳加工技术与装备重点实验室，广东 广州 510006 |
| |
| 基金项目： | 广东省自然科学基金2015A030312008广东省科技计划2015B010104006广东省科技计划2013B010402014广东省科技计划2015B010133005广州市科技计划201510010281 |
| |
| 摘 要： | 针对现有光栅测量方法不能兼顾高速与高精度的问题，为适应电子制造装备高速运动和高精密定位的位移反馈要求，提出基于增量式光栅尺的纵横转换细分测量原理和相应的图像快速处理算法。为了提高光栅图像采集处理速度，搭建基于FPGA的硬件测试平台，先将采集到的图像进行滤波和二值化处理，然后对图像先进行纵横坐标相加，求取像素点最小值得到交点位移值。实验结果表明:应用纵横转换算法并搭载FPGA测试系统，能够达到0.029 μm的分辨率，精度达到0.3 μm。
|
| 关 键 词： | 增量光栅 纵横转换 高精度 FPGA 图像处理 |
| 收稿时间： | 2016-06-21 |
Realization of image subdivision algorithm with transformation from horizontal to vertical scale based on incremental grating ruler |
| |
| Affiliation: | Guangdong Provincial Key Laboratory of Micro-nano Processing Technology and Equipment, Guangdong Univ. of Tech., Guangzhou 510006, China |
| |
| Abstract: | Aiming at solving problem of existing grating ruler measurement method with which high speed and high precision can not be taken into account, measurement principle of transformation from horizontal to vertical scale of incremental grating and corresponding image processing algorithms are proposed in order to meet the requirement of feedback displacement for high speed motion and high precision positioning of electronic manufacturing equipment. In order to improve speed of grating image acquisition and processing, a hardware testing platform based on FPGA is built. Firstly, images collected by FPGA system are filtered and binarized, then processed images are added with vertical coordinates and horizontal coordinates accordingly. In this way point displacement value is obtained by calculating smallest pixels. Experimental results show resolution of 0.029 μm and precision of 0.3 μm can be achieved by using FPGA testing system with vertical and horizontal conversion algorithms. |
| |
| Keywords: | |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《应用光学》浏览原始摘要信息 |
|
点击此处可从《应用光学》下载全文 |
