| 氮化硼薄膜的脉冲激光沉积 |
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| 引用本文： | 毕兆琪,张兵临,李运钧,杨全玖. 氮化硼薄膜的脉冲激光沉积[J]. 中国激光, 1995, 22(1): 65-68 |
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| 作者姓名： | 毕兆琪 张兵临 李运钧 杨全玖 |
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| 作者单位： | 河南省基础及应用科学研究所 |
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| 摘 要： | 用Ｑ开关ＹＡＧ激光器的１．０６μｍ的脉冲激光在硅及玻璃衬底上沉积了氮化硼薄膜。做了ＳＥＭ，ＸＲＤ，红外透射谱和紫外一可见透射谱等测试。确认为六方氮化硼（ｈ－ＢＮ）薄膜．并测出其禁带宽度、晶格常数等。
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| 关 键 词： | 六方氮化硼薄膜，Q开关YAG激光器，脉冲激光沉积 |
| 收稿时间： | 1994-03-14 |
Pulsed Laser Deposition of Boron Nitride Films |
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| Bi Zhaoqi, Zhang Binglin, Li Yunjun, Yang Quanjiu, Bryan Keily. Pulsed Laser Deposition of Boron Nitride Films[J]. Chinese Journal of Lasers, 1995, 22(1): 65-68 |
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| Authors: | Bi Zhaoqi Zhang Binglin Li Yunjun Yang Quanjiu Bryan Keily |
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| Abstract: | Thin films of BN have been depotted on silicon and glass substrates using a Q-switched YAG laser (λ=1. 06 μm) on the basis of XRD, IR and UV-visible transmission spectra and of investiSations by SEM, the films thus preP8red were identified as h-BN films. The optical band gap and lattice costunts were determined. |
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| Keywords: | hexagonal boron nitride film Q-switched YAG laser pulsed laser deposition |
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