| 自组装单层膜表面制备BiFeO3图案化薄膜的研究 |
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| 引用本文： | 谈国强,宋亚玉,苗鸿雁,博海洋,夏 傲. 自组装单层膜表面制备BiFeO3图案化薄膜的研究[J]. 无机化学学报, 2009, 25(11): 2048-2052 |
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| 作者姓名： | 谈国强 宋亚玉 苗鸿雁 博海洋 夏 傲 |
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| 作者单位： | 陕西科技大学教育部轻化工助剂化学与技术重点实验室,西安,710021 |
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| 基金项目： | 国家自然科学基金项目，国家科技支撑计划项目(No.2006BAF02A28).国家自然科学基金项目，陕西科技大学研究生创新基金 |
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| 摘 要： | 采用短波紫外光(UV)对十八烷基三氯硅烷(OTS)自组装单分子层(SAMs)进行刻蚀，利用化学液相法在OTS-SAMs模板表面制备出铁酸铋(BiFeO3)图案化薄膜。通过接触角、X射线衍射(XRD)、扫描电镜(SEM)、X射线能谱(EDS)等测试手段对OTS膜和BiFeO3薄膜进行表征。结果表明：以OTS为模板利用化学液相法成功制备出边缘轮廓清晰、条纹宽度为10~20 μm的BiFeO3图案化薄膜。
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| 关 键 词： | 十八烷基三氯硅烷(OTS)； 自组装； 铁酸铋薄膜； 图案化 |
Micropatterning BiFeO3 Thin Films on Self-assembled Monolayers |
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| TAN Guo-Qiang,SONG Ya-Yu,MIAO Hong-Yan,BO Hai-Yang and XIA Ao. Micropatterning BiFeO3 Thin Films on Self-assembled Monolayers[J]. Chinese Journal of Inorganic Chemistry, 2009, 25(11): 2048-2052 |
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| Authors: | TAN Guo-Qiang SONG Ya-Yu MIAO Hong-Yan BO Hai-Yang XIA Ao |
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| Abstract: | Different kinds of micro-patterns were fabricated within octadecyhrichlorosilane (OTS) self-assembled monolayers(SAMs) utilizing UV lithography. The BiFeO_3 pattern films have been formed on silanol SAMs by the chemical solution deposition(CSD). The crystal phase composition, microstructure and topography of the as-prepared films were characterized by contact angle tester, X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy disperse spectroscopy (EDS). The large contrast between octadecyl regions and silanol regions suggests selective deposition of BiFeO_3 film on the silanol regions with deposited line width of 10-20 μm. |
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| Keywords: | octadecyltrichlorosilane(OTS) self-assembly BiFeO3 films micropatterning |
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