Institution: | (1) Micro-processing and Nano-technology Department, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China;(2) KEY Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei, 230027, China;(3) Silicon Device & Integrated Technology Department, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China |