Using NAA to the Determination of Antimony in Trichlorosilane with Substoichiometric Extraction

Neutron activation analysis has been applied to the determination of trace of antimony based on the substoichiometric extraction of Sb(III) with BPHA (N-benzoyl-N-phenyl hydroxylamine). The antimony contens in trichlorosilane or high purity silicon can be determined by the proposed method down to ppb range. The effect of acid concentration, shaking time, the amount of carrier and the decontamination factors were studied.