Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis |
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Authors: | Attota Ravikiran Germer Thomas A Silver Richard M |
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Institution: | National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. ravikiran.attota@nist.gov |
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Abstract: | We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology. |
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