Design of broadband and broad angular Cr/C multilayer reflector for “near water window” region

Traditional periodic multilayer reflector working in the soft X-ray region should be placed at the designed incidence angle and wavelength, which is extremely difficult and complicate in practice especially for “near water window region” (4.43-6.50 nm). In this region, Ni-like-Ta laser working at the wavelength 4.48 nm provides a possible source which has caught a lot attention. In this paper, to overcome the shortcoming of the periodic structure, top-flat broad band (normal incidence) and broad angular (around quasi-Brewster angle) Cr/C non-periodic multilayer reflector have been designed for the 4.48 nm soft X-ray optical system. In the wavelength region 4.473-4.488 nm, 4.455-4.496 nm and 4.435-4.529 nm, mean theoretical normal-incidence reflectivity can get 35.0%, 24.2% and 12.6%, respectively, by the top-flat broad band reflectors. In the grazing incidence angle region 44.85-45.16°, 44.54-45.46° and 44.02-45.98°, mean s-component theoretical reflectivity at 4.48 nm can get 39.7%, 23.1% and 13.0%, respectively, by the top-flat broad angular reflectors.