Reflectancevs. Electroreflectance measurements on arsenic-doped silicon crystal |
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Authors: | A Borghesi M Geddo G Guizzetti D Maghini A Stella U Campisano E Rimini |
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Institution: | (1) Dipartimento di Fisica dell'Università, Via A. Bassi 6, 27100 Pavia, Italia;(2) Dipartimento di Fisica dell'Università, Corso Italia 57, 95129 Catania, Italia |
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Abstract: | Summary Reflectance and electroreflectance measurements from 2.5 to 5.5 eV, performed on arsenic heavily doped silicon samples, are
reported and discussed. Silicon crystals implanted with arsenic up to a fluence of 1017 cm−2 were laser irradiated and a free-carrier concentration of the order of 1021cm−3 was reached. The reordering of the system is studied in detail at different initial conditions. A comparison between reflectance
and electro-reflectance appears to be quite useful to determine the behaviour of the heavily doped semiconductor.
To speed up publication, the authors of this paper have agreed to not receive the proofs for correction. |
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Keywords: | Optical properties and materials |
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