| 反应磁控溅射制备AZO薄膜相结构的演化及机理研究 |
| |
| 引用本文： | 赵志明,丁宇,田亚萍,张晓静,马二云,白力静,蒋百灵. 反应磁控溅射制备AZO薄膜相结构的演化及机理研究[J]. 人工晶体学报, 2012, 41(1): 177-182 |
| |
| 作者姓名： | 赵志明 丁宇 田亚萍 张晓静 马二云 白力静 蒋百灵 |
| |
| 作者单位： | 西安理工大学材料科学与工程学院,西安,710048 |
| |
| 基金项目： | 陕西省自然科学基金资助项目，陕西省科学研究计划，陕西省重点学科建设专项资金资助项目 |
| |
| 摘 要： | 在室温下,利用直流反应磁控溅射技术在不同的氧气流量下沉积ZnO∶ Al (AZO)薄膜.采用XRD、SEM和TEM技术分析薄膜相成分、表面截面形貌及微观结构.结果表明:氧气流量为2.5 sccm时,沉积形成的薄膜为不透明具有金属导电性能的AZO/Zn( AZO)双层复合膜结构；氧气流量为3.5 sccm时,沉积形成了透明导电的AZO薄膜；氧气流量为5.0 sccm时,形成了透明不导电且含有纳米Al2O3颗粒的AZO薄膜；此外,AZO薄膜在400℃退火后,薄膜晶粒长大和(002)晶面方向择优生长更加明显以及高氧气流量沉积的AZO薄膜中的纳米Al2O3颗粒消失.
|
| 关 键 词： | 直流反应磁控溅射 AZO薄膜 Al2O3纳米颗粒, |
Evolution Mechanisim of Microstructure of AZO Thin Films Prepared by Reactive Magnetron Sputtering |
| |
| ZHAO Zhi-ming , DING Yu , TIAN Ya-ping , ZHANG Xiao-jing , MA Er-yun , BAI Li-jing , JIANG Bai-ling. Evolution Mechanisim of Microstructure of AZO Thin Films Prepared by Reactive Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2012, 41(1): 177-182 |
| |
| Authors: | ZHAO Zhi-ming DING Yu TIAN Ya-ping ZHANG Xiao-jing MA Er-yun BAI Li-jing JIANG Bai-ling |
| |
| Affiliation: | (School of Materials Science and Engineering,Xi’an University of Technology,Xi’an 710048,China)(Received 23 September 2011,accepted 30 November 2011) |
| |
| Abstract: | ZnO∶Al(AZO) thin films were grown by reactive DC magnetron sputtering technique under various oxygen flow ratio at room temperature.The effect of oxygen flow on phase,morphology and structure of the deposited films were systematically analyzed by XRD,SEM and TEM,respectively.The thin films deposited under 2.5 sccm O2 flows show AZO/Zn(AZO) bilayers structure.As the oxygen flow is 3.5 sccm,the AZO thin films with good visible transparency and low resistivity exhibited the c-axis(002) oriented polycrystalline films.As the oxygen flow is 5.0 sccm,Al2O3 nanoparticles were formed in AZO films with visible transparency and high resistivity and disappeared after annealing at 400 ℃. |
| |
| Keywords: | reactive DC magnetron sputtering AZO film Al2O3 nanoparticles |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《人工晶体学报》浏览原始摘要信息 |
|
点击此处可从《人工晶体学报》下载全文 |
|
