Selective removal and patterning of a Co/Cu/Co trilayer created by femtosecond laser processing |
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Authors: | M Ulmeanu M Filipescu N D Scarisoreanu G Georgescu L Rusen M Zamfirescu |
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Institution: | 1.Laser Department,National Institute for Laser, Plasma and Radiation Physics,Magurele-Bucharest,Romania |
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Abstract: | The selective removal and patterning of a typical pseudo-spin-valve structure, consisting of a Co(20 nm)/ Cu(6 nm)/Co(3 nm)
trilayer, by femtosecond laser has been examined in terms of irradiation parameters and layer structure. Ablation thresholds
of the individual Co and Cu thin films and the SiO2/Si substrate have been measured for single-shot irradiation with a 200 femtosecond (fs) laser pulses of a Ti:sapphire laser
operating at 775 nm. Ablation of the entire trilayer structure was characterized by a sequential removal of the layers at
a threshold level of fluence of 0.28 J/cm2. Atomic Force Microscopy, optical microscopy, profilometry and Sputtered Neutral Mass Spectroscopy were employed to characterize
the laser-induced single-shot laser selective removal and patterned areas. As a result, two phenomena were found to characterize
the laser process: (i) selective removal of the Co and Cu layer due to the change of the laser fluence and (ii) regular pillars’
area of Co/Cu/Co could be achieved in a regular manner with the lowest pillar width size of 1.5 μm. Ablation through the layers
was accompanied by the formation of bulges at the edges of the pillars, which was the biggest inconvenience in lowering the
pillar size through the femtosecond laser process. |
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