| 激光自混合显微系统的设计及实验研究 |
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| 引用本文： | 杨新建,朱钧,刘刚,张书练.激光自混合显微系统的设计及实验研究[J].光学学报,2004,24(3):18-422. |
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| 作者姓名： | 杨新建 朱钧 刘刚 张书练 |
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| 作者单位： | 清华大学精密测试技术及仪器国家重点实验室,北京,100084;清华大学精密测试技术及仪器国家重点实验室,北京,100084;清华大学精密测试技术及仪器国家重点实验室,北京,100084;清华大学精密测试技术及仪器国家重点实验室,北京,100084 |
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| 基金项目： | 国家科技部(GN99 5 )，清华大学校基金(JZ2 0 0 10 0 7)资助课题 |
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| 摘 要： | 论述了自混合干涉技术的发展历程，并引入了自混合干涉显微技术的实验原理和研究近展；建立了He—Ne激光自混合干涉实验装置系统，获得了稳定的激光功率输出。然后，对基于激光自混合干涉技术的显微镜进行了研究，并详细给出了该系统的设计原理、装调方法和实验结果，得到了玻璃小球的三维形体信息图像。系统达到的横向分辨力1μm，纵向分辨力为15nm。上述实验结果证明自混合显微镜在微小物体的高精度形貌成像方面有着很大的潜力。
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| 关 键 词： | 应用光学 显微镜 激光 自混合干涉效应 |
| 收稿时间： | 2002/12/18 |
Design and Experimental Study of Laser Self-Mixing Microscopic System |
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| Yang Xinjian,Liu Gang,Zhu Jun,Zhang Shulian.Design and Experimental Study of Laser Self-Mixing Microscopic System[J].Acta Optica Sinica,2004,24(3):18-422. |
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| Authors: | Yang Xinjian Liu Gang Zhu Jun Zhang Shulian |
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| Abstract: | The progress of laser self-mixing technology is reviewed. Theory and recent research in the microscopic technology based on laser self-mixing interference effect is introduced. The experimental system of the self-mixing interference with He-Ne laser is established and satisfying power stability of the system is obtained. The microscope based on the laser self-mixing technology is investigated. The design, structure, adjustment and experimental result of laser self-mixing microscopic system is given. Finally the profile of the micro-ball made of glass is three-dimensionally imaged. The lateral resolution is 1 μm and longitudiual resolution is 15 nm. It's proved that the microscope based on laser self-mixing interference effect has great potential in the field of high-resolution imaging on the micro-objects. |
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| Keywords: | applied optics microscope laser self-mixing interference effect |
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