周期极化的电极结构及相关工艺缺陷的电场分析

本文采用有限元方法分析外加电场法对铁电体进行周期极化时的电场分布,讨论尖端效应对极化的影响,比较两种不同的电极设计方案-梳形电极和框形电极的优劣.分析了多周期光栅同时极化时的电场分布,推断了大周期与小周期之间存在的竞争现象.本文最后对光刻造成周期电极的断条、毛刺工艺缺陷和液体电极方案的残留气泡缺陷进行了探讨.数值计算得出的结论比较圆满地解释了实验中的许多现象.

Electric Field Distribution Analysis of Electrode Configuration and Process Defects of Periodic Electric Poling

The electric field distribution of electric field periodic poling of ferroelectric is analyzed by finite element method in this paper. The impact of fringing field on poling progress is discussed in detail and a comparison between two approaches of electrode configuration, comb-like and frame-like, is made. The numerical analysis revealed a competing process of large period and small period area exhibited while simultaneously poling multiple period. Defects, such as broken strip and small protrusion occurring in the lithographically defined periodic electrode and residual bubble within electrolyte, are investigated, showing a great impact on the quality of poling. The numerical results achieved in this paper are useful for explaining some experimental phenomena.