| Abstract: | Inorganic-organic hybrid coating films were prepared from various trifunctional silicon alkoxides with a C=C double bond in their organic components, such as vinyltriethoxysilane (VTES), allyltriethoxysilane (ATES) or trimethoxysilylpropylmethacrylate (TMSPM), and zirconium n-tetrapropoxide modified with methacrylic acid. UV light from a high-pressure mercury lamp was irradiated through a photomask on the hybrid films, and this irradiation increased refractive index and microhardness of the films and decreased solubility of the films in alcohol or alkaline solution. IR spectra of the coating films have shown that C=C bonds in these trifunctional silicon alkoxides were polymerized with the UV irradiation. Patterns with a width of about 10  m and thickness of about 5–15 m were formed by the etching of unirradiated region of the films. Since VTES and ATES have a shorter organic chain than TMSPM, the hybrid films prepared from VTES or ATES are expected to show small optical loss in the near-infrared region due to C—H bonds in their use as waveguides. |
