二维点阵的软X射线衍射实验研究

以光刻胶作为探测器，用3.2nm的X射线进行了二维点阵测试样品的软X射线衍射实验，记录了探测器和样品间隔分别为0、2mm和80mm时的图像，并用光学显微镜放大观察。实验结果表明，探测器记录的图像与探测 和样品之间的距离有关，即随探测器和样品之间距离的变化而变化。这与理论模拟的结果一致。

Experimental Study on Soft X-Ray Diffraction of a Two-Dimensional Array

The experiment of soft X ray diffraction has been carried out with synchrotzon radiation to a two dimensional array. Some images, which correspond to 0, 2 mm and 80 mm separation behind the specimen, were recorded as a relief pattern on photoresist with use of 3.2 nm X rays from U 12A bending magnet at National Synchrotron Radiation Laboratory. The processed photoresists were enlarged with an optical microscope. The experimental result shows that patterns vary with the distance between specimen and photoresist detector, which are in excellent agreement with the theoretical results.