| 指示光源衍射所引起的位置敏感探测器附加定位误差探讨 |
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| 引用本文： | 袁红星,贺安之,李振华,王志兴. 指示光源衍射所引起的位置敏感探测器附加定位误差探讨[J]. 光学学报, 2000, 20(1): 18-126 |
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| 作者姓名： | 袁红星 贺安之 李振华 王志兴 |
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| 作者单位： | 南京理工大学应用物理系,南京,210094 |
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| 摘 要： | 介绍位置敏感探测器工作原理，分析了其自动取光斑重心的定位机理。概括了位置敏感探测器的各种工作方式，指出了在许多位置敏感探测器的应用场合，光源衍射不可避免，并从理论上分析了因衍射而造成的对位置第三探测器定位的影响，为估算由此造成的定位误差提供了理论依据，同时对工程应用也有一定的参考价值。
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| 关 键 词： | 衍射 位置敏感探测器 光斑定位 定位误差 |
| 收稿时间： | 1998-07-10 |
Additional Position Error of PSD Caused by Diffraction of Light Source |
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| Yuan Hongxing,He Anzhi,Li Zhenhua,Wang Zhixing. Additional Position Error of PSD Caused by Diffraction of Light Source[J]. Acta Optica Sinica, 2000, 20(1): 18-126 |
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| Authors: | Yuan Hongxing He Anzhi Li Zhenhua Wang Zhixing |
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| Abstract: | The principle of position sensitive detector (PSD) is introduced, and automatic determination of the center of the intensity of light spot is analyzed. Various working modes are also outlined. As a main probeam, the unavoidable diffraction of light source in many applications is pointed out. Theoretical analysis of position error caused by diffraction is presented accordingly, which makes it possible to evaluate such additional position error quantitatively and guide the application of PSD. |
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| Keywords: | diffraction PSD spot location position error. |
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