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Crystal growth of InN by MOCVD with electric field along the c-axis
Authors:Yuichi Ota  Ramkrishna BiswasMasaaki Higo  Takashi Inushima
Affiliation:Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292 Japan
Abstract:We report on physical properties of InN grown by metalorganic chemical vapor deposition (MOCVD) with electric field applied along the c-axis. The electric field is applied continuously from the growth of the low temperature InN buffer layer to the procedure of cooling down to room temperature. As a result, the crystal morphology degrades, c-lattice constant elongates by 0.12% at ±1 kV/cm, Hall mobility decreases, and the phonon vibration along the c-axis broadens, which suggests that the physical properties of InN can be controlled by the electric field applied along the c-axis during the crystal growth.
Keywords:68.55.ag
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