光激励和光检测微型硅谐振器研究

分析了光激励谐振器振动的检测问题，用调制激光束激励谐振器使其发生振动，并采用光学干涉的方法测量了这种微振动。

The Research of Optically Excited and Interrogated Silicon Resonators

Silicon substrates have optical and mechanical properties that provide excellent opportunities for fiber optic sensors. The microbeam forms a structure that functions as an optomechanical modulator. Modulated light can be use to excite the microbeam into resonance. The measured value (such as pressure) causes the deformation of the substrate and, consequently, varies the resonance frequency of the fundamental flexural mode through the intrinsic tension in the microbeam. When the beam vibrates, the incident light is modulated and the reflected light is used to sense vibration of the beam. Microbeams attached to the substrate at both ends are highly strain sensitive and form the basis of a variety of sensors, including pressure sensors, accelerometers, strain, vibration, and temperature sensors. In this paper, the problems in measuring the vibration of microbeams are analyzed. A modulated light from a laser diode has been used to excite the microbeam into vibration. The vibration of the microbeam is measured by using a laser interferometric method. The test results suggest that this method can be used for precision measurment of microbeams.