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数字微镜器件的时空特性对相位测量轮廓术的影响
引用本文:曹益平,苏显渝,陈文静,向立群,张启灿.数字微镜器件的时空特性对相位测量轮廓术的影响[J].光学技术,2004,30(2):157-160.
作者姓名:曹益平  苏显渝  陈文静  向立群  张启灿
作者单位:四川大学,光电科学技术系,四川,成都,610064;四川大学,光电科学技术系,四川,成都,610064;四川大学,光电科学技术系,四川,成都,610064;四川大学,光电科学技术系,四川,成都,610064;四川大学,光电科学技术系,四川,成都,610064
基金项目:国家自然科学基金资助项目(60177001),四川省重点科研资助项目
摘    要:数字微镜器件是一种新型的微电子、微机械、微光学集成器件,可广泛的用于大屏幕投影显示。实际上,数字微镜器件作为一种新型的空间光调制器,在光学信息处理和结构照明型三维传感中也具有广泛的应用前景。介绍了数字微镜器件和数字光处理器的基本原理,分析了数字微镜器件的时间空间特性,用计算机模拟了这种时空特性对相位测量轮廓术的影响。结果表明,数字微镜器件(DMD)可为投影系统在结构照明型光学三维传感中的应用提供指导。

关 键 词:数字微镜器件  时空特性  相位测量轮廓术  三维测量  结构照明
文章编号:1002-1582(2004)02-0157-04
修稿时间:2003年7月21日

Effect on the phase measuring profilometer to the spatio-temporal characteristic of DMD
CAO Yi-ping,SU Xian-yu,CHEN Wen-jing,XIANG Li-qun,ZHANG Qi-can.Effect on the phase measuring profilometer to the spatio-temporal characteristic of DMD[J].Optical Technique,2004,30(2):157-160.
Authors:CAO Yi-ping  SU Xian-yu  CHEN Wen-jing  XIANG Li-qun  ZHANG Qi-can
Abstract:Digital micro-mirror device(DMD) is a new type of component which integrates with micro-electronics, micro-machinery and micro-optics. It can be widely used in the large-screen projection display system. In fact, DMD used as a new type of spatial-light modulator have a wide prospect in optical information processing and structured illumination three-dimensional sensing.The basic principles of DMD and digital light processor(DLP) are introduced particularly. The spatio-temporal characteristic of DMD is studied extensively. The effect on the phase measuring profilometer to the spatio-temporal characteristic of DMD is discussed by computer simulation. The result can give the guidance for the application of DMD in structured illumination three-dimensional sensing.
Keywords:digital micro-mirror device(DMD)  spatio-temporal characteristic  phase measuring profilometer  three-dimensional sensing  structured illumination
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