XPS分析中使用样品磁透镜引起的谱峰位移和峰形畸变

发现当使用Mg/Al双阳极和样品磁透镜进行非导电样品（或与样品托绝缘的导电样品）的X射线光电子能谱分析时，谱峰出现异常大的位移和谱形出现畸变；在同时使用电子中和枪时谱峰位移变小，当导电样品与样品托有良好的电接触时谱峰位移消失；作者提出这种异常大的位移来自样品荷电效应，后者是由于样品磁透镜的磁场与来自X射线枪A1窗的低能杂散电子发生了相互作用并使这些杂散电子不能到达样品表面起中和作用所致。

Abnormal Peak Shifts and Spectra Distortion Effects Introduced by Using XL Magnetic Lens in XPS Analyses

Abnormally large peak shifts and spectra distortion effects have been observed on XPS analyses of electrically isolated conductors and insulating materials when a dual anode X-ray source is used and a XL magnetic lens is activated. The peak shifts become smaller when an electron flood gun is switched on, and the peak shifts disappear when conducting samples are in electrical contact with the sample holder. Therefore, the abnormal peak shifts have been attributed to a charging effect. The latter is due to interaction between the stray low energy electrons from the X-ray gun window and magnetic field of the XL lens, such that the stray low energy electrons may not reach the sample surface to neutralize the positive charge.