Scanning electron microscope resolution: 2. Resolution measurements using structures with a rectangular profile

Different techniques for estimating the resolution of a scanning electron microscope are considered. A method for determining the resolution using reduced standard deviations of the distances between reference points which characterize features of the profile of the test object measured at video signals is proposed. Measurements of the resolution of scanning electron microscopes using test objects that represent slitlike grooves in silicon with a rectangular profile are exemplified.