On the problems of the application of atomic-force microscopes for studying the surface roughness of elements for imaging optics |
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| Authors: | M M Barysheva B A Gribkov M V Zorina N N Salashchenko N I Chkhalo |
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| Institution: | 1. Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhni Novgorod, 603950, Russia
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| Abstract: | The key problems of applying atomic-force microscopes when studying the surface roughness of elements for imaging optics are discussed. Special attention is paid to optics of ultrahigh spatial resolution with an operating wavelength of no shorter than 100 nm. It is proposed that a specialized microscope for optical applications equipped with a tetraaxial goniometer be developed. |
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