| 可见光区大角度减反射光学薄膜制备工艺研究 |
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| 引用本文： | 曹一鸣,卫红,王小辉,唐振方.可见光区大角度减反射光学薄膜制备工艺研究[J].光学与光电技术,2012,10(2):97-100. |
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| 作者姓名： | 曹一鸣 卫红 王小辉 唐振方 |
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| 作者单位： | 广州市光机电技术研究院;暨南大学理工学院物理系 |
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| 基金项目： | 广州市科技攻关项目(2008Z1-D581)资助项目 |
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| 摘 要： | 为获得可见光波长范围的大角度减反射光学薄膜,采用电子束蒸发斜角蒸镀工艺,按照设计好的膜系,通过蒸镀一系列低折射率膜层,最终得到在380～780nm波长间,入射角0～70°,平均反射率低于1%的光学薄膜。实验结果表明利用斜角蒸镀工艺镀制出折射率从基底到空气的渐变多层膜结构以取得优良的减反射效果是可行的。
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| 关 键 词： | 可见光区 大入射角度 减反射薄膜 斜角蒸镀 |
| 收稿时间： | 2011/9/3 |
Big Incident Angle Antireflective Film in Visible Range |
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| CAO Yi-ming,WEI Hong,WAN Xiao-hui,TANG Zhen-fang.Big Incident Angle Antireflective Film in Visible Range[J].optics&optoelectronic technology,2012,10(2):97-100. |
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| Authors: | CAO Yi-ming WEI Hong WAN Xiao-hui TANG Zhen-fang |
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| Institution: | 1 Guangzhou Institute of Optical Mechanical and Electrical Technology,Guangzhou 510663,China; 2 Department of Physics,College of Science and Engineering,Jinan University,Guangzhou 510632,China) |
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| Abstract: | In order to get big incident angle antireflective film in visible range,the electronic beam evaporating and glancing angle deposition are used.According to the designed coatings,by depositing a set of low refractive index film,the film is obtained.The incident angle is from 0 to 70 degree,wavelength is from 380 nm to 780 nm and the average reflectance is lower than 1%.The result shows that the method depositing graded refractive index film from the base material to the air to get fine antireflective effect is feasible. |
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| Keywords: | visible range big incident angle antireflective film glancing angle deposition |
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