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Total-Ionizing-Dose-Induced Body Current Lowering in the 130 nm PDSOI I/O NMOSFETs
Abstract:The body current lowering effect of 130 nm partially depleted silicon-on-insulator(PDSOI) input/output(I/O)n-type metal-oxide-semiconductor field-effect transistors(NMOSFETs) induced by total-ionizing dose is observed and analyzed. The decay tendency of current ratio of body current and drain current I_b/I_d is also investigated.Theoretical analysis and TCAD simulation results indicate that the physical mechanism of body current lowering effect is the reduction of maximum lateral electric field of the pinch-off region induced by the trapped charges in the buried oxide layer(BOX). The positive charges in the BOX layer can counteract the maximum lateral electric field to some extent.
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