Abstract: | Ionic liquids (IL) hold a great potential as novel electrolytes for applications in electronic materials and energy technology. The functionality of ILs in these applications relies on their interface to semiconducting nanomaterials. Therefore, methods to control the chemistry and structure of this interface are the key to assemble new IL‐based electronic and electrochemical materials. Here, we present a new method to prepare a chemically well‐defined interface between an oxide and an IL film. An imidazolium‐based IL, which is carrying an ester group, is deposited onto cobalt oxide surface by evaporation. The IL binds covalently to the surface by thermally activated cleavage of the ester group and formation of a bridging carboxylate. The anchoring reaction shows high structure sensitivity, which implies that the IL film can be adhered selectively to specific oxide surfaces. |