| 质量分离低能离子束沉积碳膜及离子轰击效应 |
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| 引用本文： | 廖梅勇,张键辉,秦复光,刘志凯,杨少延,王占国,李述汤. 质量分离低能离子束沉积碳膜及离子轰击效应[J]. 物理学报, 2000, 49(11): 2186-2190 |
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| 作者姓名： | 廖梅勇 张键辉 秦复光 刘志凯 杨少延 王占国 李述汤 |
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| 作者单位： | (1)香港城市大学物理和材料科学系，香港; (2)中国科学院半导体研究所半导体材料科学实验室，北京 100083 |
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| 摘 要： | 用质量分离的低能离子束沉积技术得到了非晶碳薄膜，X射线衍射、Raman谱以及俄歇深度谱的线形表明，此种非晶碳膜中镶嵌着金刚石颗粒.碳离子的浅注入是该碳膜SP3形成的主要机理.从一个侧面说明了化学气相沉积法中偏压预处理增加金刚石成核的主要原因是因为离子轰击效应.关键词：非晶碳离子轰击质量分离低能离子束
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| 关 键 词： | 非晶碳 离子轰击 质量分离低能离子束 |
| 收稿时间： | 2000-04-22 |
| 修稿时间： | 2000-04-22 |
CARBON FILM DEPOSITED BY MASS-SELECTED LOW ENERGY ION BEAM TECHNIQUE AND ION BOMBARDMENT EFFECT |
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| LIAO MEI-YONG,ZHANG JIAN-HUI,QIN FU-GUANG,LIU ZHI-KAI,YANG SHAO-YAN,WANG ZHAN-GUO,LIEE SHUIT-TANG. CARBON FILM DEPOSITED BY MASS-SELECTED LOW ENERGY ION BEAM TECHNIQUE AND ION BOMBARDMENT EFFECT[J]. Acta Physica Sinica, 2000, 49(11): 2186-2190 |
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| Authors: | LIAO MEI-YONG ZHANG JIAN-HUI QIN FU-GUANG LIU ZHI-KAI YANG SHAO-YAN WANG ZHAN-GUO LIEE SHUIT-TANG |
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| Abstract: | By mass-selected low energy ion beam deposition, amorphous carbon film was obtained. X-ray diffraction, Raman and Auger electron spectroscopy depth line shape measurements showed that such carbon films contained diamond particles. The main growth mechanism is subsurface implantation. Furthermore, it was indicated in a different way that ion bombardment played a decisive role in bias enhanced nucleation of chemical vapor deposition diamond. |
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| Keywords: | amorphous carbon ion bombardment mass-selected low energy ion beam |
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