Implanted-fluorine depth profiles in molybdenum

Implanted-fluorine profiles in molybdenum have been accurately measured using¹⁹F (p,)¹⁶O resonant nuclear reaction atE_R=872.1 keV. A proper convolution-calculation method was used to extract the true distribution of fluorine from the experimental excitationyield curves. The range-distribution parameters,R_p and R_p, were thereby obtained and were compared with those obtained by Monte-Carlo simulation with a computer code developed recently in this gorup, and the TRIM'90 code. They show that the experimentalR_p values agree very well with the Monte-Carlo simulation values, while the experimental R_p values are larger than those obtained from the simulations.