Small-size spectrometer for emission analysis of low-temperature plasma flows |
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Authors: | V I Nalivaiko P A Chubakov A N Pokrovsky A A Mikhalchenko V I Kuz’min E V Kartaev |
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Institution: | (1) Institute of Automation and Electrometry SB RAS, Novosibirsk, Russia;(2) Khristianovich Institute of Theoretical and Applied Mechanics SB RAS, Novosibirsk, Russia |
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Abstract: | Calculation data for characteristics of concave holographic arrays are reported, allowing development of low-size spectrometers
with medium and high spectral resolution. The holographic arrays were fabricated around new subnanostructured films of chalcogenide
semiconductors. A medium-resolution, small-size spectrometer was used to measure the distribution of temperature in the gas
flow emanating from a DC plasmatorch with sectioned inter-electrode insert by the relative-intensity method. Presently available
methods for measuring the temperature of non-uniform optically thin plasma were employed. A comparison of spectral and thermophysical
methods for temperature measurements is given. |
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