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高导热AlN陶瓷材料制造及其应用研究
引用本文:李发,刘征,鲁燕萍,刘慧卿,高陇桥. 高导热AlN陶瓷材料制造及其应用研究[J]. 真空电子技术, 2002, 0(3)
作者姓名:李发  刘征  鲁燕萍  刘慧卿  高陇桥
作者单位:北京真空电子技术研究所,北京,100016
摘    要:对AlN陶瓷材料制备过程中影响其性能尤其是导热性能的诸多因素进行实验 ,摸索出一套较合理的制备工艺 ,制造出性能较稳定、导热率高的AlN陶瓷材料。观察了AlN陶瓷的微结构并得出某些结论。已加工出AlN陶瓷夹持杆、收集极和输出窗 ,在微波管上试用 ,取得一些经验。

关 键 词:AlN陶瓷  高导热率  微波管

Investigation on the Development of High Thermal Conductivity AlN Ceramics and Its Application
LI Fa,LIU Zheng,LU Yan ping,LIU Hui qing,GAO Long qiao. Investigation on the Development of High Thermal Conductivity AlN Ceramics and Its Application[J]. Vacuum Electronics, 2002, 0(3)
Authors:LI Fa  LIU Zheng  LU Yan ping  LIU Hui qing  GAO Long qiao
Abstract:In the paper, the effects of many processing factors on AlN ceramic material were investigated. A proper process was developed to manufacture AlN ceramic with high thermal conductivity and better dielectric properties. Microstructure of AlN ceramic was observed and some conclusions were obtained. AlN ceramic supporting bar, collector and output window were processed and used in microwave tubes. Some experiences were obtained.
Keywords:AlN ceramics  High thermal conductivity  Microwave tube
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