| 60keV质子辐照对TiNi记忆合金薄膜马氏体相变的影响 |
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| 引用本文： | 王治国,祖小涛,雷雨,莫华强,傅永庆.60keV质子辐照对TiNi记忆合金薄膜马氏体相变的影响[J].强激光与粒子束,2004,16(11):1473-1476. |
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| 作者姓名： | 王治国 祖小涛 雷雨 莫华强 傅永庆 |
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| 作者单位： | 1. 电子科技大学 应用物理系，四川 成都 610054；2. Department of Engineering, University of Cambridge, Trumpington Street, CB2, 1PZ, Cambridge, UK |
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| 基金项目： | 国家自然科学基金(10175042)资助课题 |
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| 摘 要： | 利用磁控溅射的方法在氧化后的单晶Si基片上制备了TiNi形状记忆合金薄膜，利用示差扫描量热法和原位X射线衍射研究了薄膜的马氏体相变特征。通过60keV质子注入（辐照）薄膜样品研究了H+离子对合金薄膜马氏体相变特征的影响，结果表明氢离子注入后引起了马氏体相变开始Ms和结束点Mf以及逆马氏体相变开始As和结束温度Af的下降，而对R相变开始Rs和结束温度Rf影响不大。掠入射X射线衍射表明H+离子注入后有氢化物形成。H+离子注入形成的氢化物是引起相变点的变化的主要因素。
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| 关 键 词： | TiNi形状记忆合金薄膜 H离子注入 马氏体相变 示差扫描量热仪 Ｘ射线衍射 |
| 文章编号： | 1001-4322(2004)11-1473-04 |
| 收稿时间： | 2004/1/4 |
| 修稿时间： | 2004年1月4日 |
Influence of 60keV proton irradiation on the transformation behavior of a TiNi shape memory alloy thin film |
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| WANG Zhi-guo,ZU Xiao-tao,LEI Yu,MO Hua-qiang,FU Yong-qing.Influence of 60keV proton irradiation on the transformation behavior of a TiNi shape memory alloy thin film[J].High Power Laser and Particle Beams,2004,16(11):1473-1476. |
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| Authors: | WANG Zhi-guo ZU Xiao-tao LEI Yu MO Hua-qiang FU Yong-qing |
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| Institution: | 1. Department of Applied Physics, University of Electronic Science and Technology of China, Chengdu 610054, China；2. Department of Engineering, University of Cambridge, Trumpington Street, CB2, 1PZ, Cambridge, UK |
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| Abstract: | In this work, TiNi shape memory alloy films on oxidized single crystal Si substrate were successfully prepared by co-sputtering of TiNi target with a separated Ti target. The transformation behavior was investigated by differential scanning calorimeter (DSC) and in-situ XRD. 60 keV H~ ions implantation shifted martensite transformation start/finish temperature M_s/M_f and austenite transformation start/finish temperature A_s/A_f to lower temperature, whereas H~ implantation had little effect on the R-phase transformation temperatures R_s and R_f. glance incidence XRD results showed that titanium hydride formed after H~ implantation .The change of transformation temperatures can be attributed to the formation of hydride. |
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| Keywords: | TiNi shape memory alloy film Proton irradiation Martensitic transformation Differential scanning calorimeter (DSC) X-ray diffraction (XRD) |
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