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Effect of polarization on femtosecond pulsed laser ablation of surface relief gratings using a novel interferometer
Authors:C W Hee  B K A Ngoi  L E N Lim  K Venkatakrishnan  W L Liang
Institution:Block 201, #24-105, Jurong East Street 21, Singapore 600201, Singapore
Abstract:In this paper, we report the effects of polarization state of individual beams in ablation of surface relief gratings using a two-beam interferometric technique. We have carried out ablation experiments on (1 1 1) silicon to form surface relief gratings by interfering two femtosecond laser beams under different polarization combinations. Four combinations of polarization were studied, i.e., s-: s-polarization, s-: p-polarization, p-: p-polarization and circular-: circular-polarization (c-: c-polarization). A novel interferometer was used for the investigation. The grating depths, surface roughness and ablation thresholds have been shown to depend on the polarization state of the interfering beams.
Keywords:Femtosecond pulsed laser  Surface relief grating  Polarization
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