用于微型光谱仪的硅基多级微反射镜设计与制作研究

提出了一种基于微光机电系统技术实现的空间调制方式的微型傅里叶变换光谱仪,介绍了其分光干涉系统结构及工作原理.对其核心部件多级微反射镜的制作方法进行了研究,采用硅在KOH溶液中的各向异性腐蚀方法制作多级微反射镜,硅腐蚀后形成的(111)反射面的表面粗糙度均方根小于10nm.

Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer

A micro-spectrometer without moving parts that can be manufactured through micro-opto-electro-mechanical system techniques is developed,and the interference system is introduced. The fabrication of the micro multi-mirrors,which is the core part of the system,is investigated and wet etching of silicon in KOH solution is testified to be a good method. The root mean square surface roughness of the reflect surface made up of Si planes (111) through wet etching is less than 10 nm.